Register information Patent

DE file number : 11 2018 008 256.3 (Status: pending/in force, Query started: August 3, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ11 2018 008 256.3
54Designation/titleTIVerfahren zum Bestimmen eines Beitrags einer Vorrichtung aus einer Vielzahl von Vorrichtungen zu einem Parameterfingerabdruck, System und Computerprogrammprodukt
51IPC main classICM
(ICMV)		 G03F 7/20 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 G05B 13/04 (2006.01), G05B 19/418 (2006.01), H01L 21/66 (2006.01)
22DE application dateDATMay 23, 2018
43Date of first publicationOTAug 22, 2019
Date of publication of grantPETAug 31, 2023
71/73Applicant/ownerINHASML Netherlands B.V., Veldhoven, NL
72InventorINHarutyunyan, Davit, Veldhoven, NL; Jia, Fei, Veldhoven, NL; Staals, Frank, Veldhoven, NL; Wang, Fuming, San Jose, CA, US; Looijestijn, Hugo Thomas, Veldhoven, NL; Rijnierse, Cornelis Johannes, Veldhoven, NL; Pisarenco, Maxim, Veldhoven, NL; Werkman, Roy, Veldhoven, NL; Theeuwes, Thomas, Veldhoven, NL; Hemert, Tom van, Veldhoven, NL; Bastani, Vahid, Veldhoven, NL; Wildenberg, Jochem Sebastiaan, Veldhoven, NL; Mos, Everhardus Cornelis, Veldhoven, NL; Wallerbos, Erik Johannes Maria, Veldhoven, NL
74RepresentativeVTRMurgitroyd Germany Patentanwaltsgesellschaft mbH, 80636 München, DE
10Published DE documentsDEPNOriginal document: DE112018008256B3
Searchable text: DE112018008256B3
Address for service Murgitroyd Germany Patentanwaltsgesellschaft mbH, 80636 München, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
62/639,481
Mar 6, 2018
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
62/523,531
Jun 22, 2017
Due dateFT
FG		May 31, 2026
Annual fee for the 9th year Patent fees
Patent division in charge 51
62Free division/divided out on the grounds of lack of unity in file numberTIAKZ11 2018 008 274.1
62Free division/divided out on the grounds of lack of unity from file numberTAAKZ11 2018 000 173.3
57AbstractABA method, system and program for determining a fingerprint of a parameter. The method includes determining a contribution from a device out of a plurality of devices to a fingerprint of a parameter. The method comprising: obtaining parameter data and usage data, wherein the parameter data is based on measurements for multiple substrates having been processed by the plurality of devices, and the usage data indicates which of the devices out of the plurality of the devices were used in the processing of each substrate; and determining the contribution using the usage data and parameter data.
81Designated WO countriesWDSAE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
56CitationsCT[A]    US020160246185A1 (US 2016 / 0 246 185 A1)
[A]    US000006477685B1 (US 6 477 685 B1)
43Date of first publicationEVTNov 10, 2022
Number of official communications (office actions) 1
Number of responses 1
Date of the first transfer into DPMAregisterEREGTNov 10, 2022
Date of the (most recent) update in DPMAregisterREGTJun 12, 2025
(Show all update days)(Hide all update days)
  • Jun 12, 2025
    • Due date: changed
  • Jun 10, 2025
    • St.36: changed (technical change)
  • Aug 8, 2024
    • Procedures: Examination procedure, Grant of patent has become final, 01.06.2024: changed
  • Nov 10, 2022
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Pre-registration procedure The application is under preliminary examination Sep 19, 2022  Details anzeigen
2 Administrative procedure Divisional application from (free division or divided out on the grounds of lack of unity) initial file Sep 19, 2022 Nov 10, 2022 Details anzeigen
3 Examination procedure Request for examination effectively filed Oct 13, 2022  Details anzeigen
4 Pre-registration procedure Pre-registration procedure has been concluded Nov 2, 2022  Details anzeigen
5 Examination procedure Official communication on examination Mar 21, 2023  Details anzeigen
6 Examination procedure Reply to official communication Apr 21, 2023  Details anzeigen
7 Examination procedure Decision to grant patent by Examining Section/Patent Division May 23, 2023  Details anzeigen
8 Administrative procedure Divisional application (free division or divided out on the grounds of lack of unity) new file Jun 21, 2023 Aug 3, 2023 Details anzeigen
9 Publications Patent specification Aug 31, 2023 Aug 31, 2023 Details anzeigen
10 Examination procedure Grant of patent has become final Jun 1, 2024 Aug 8, 2024 Details anzeigen
View procedures Pre-registration procedure (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTPre-registration procedure
Legal/procedural statusVSTThe application is under preliminary examination
Date of legal/procedural statusVSTTSep 19, 2022
Date of update of the procedureREGTNov 10, 2022
View procedures Administrative procedure (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTAdministrative procedure
Legal/procedural statusVSTDivisional application from (free division or divided out on the grounds of lack of unity) initial file
Date of legal/procedural statusVSTTSep 19, 2022
Issue numberHN45
YearPJ2022
Publication dateVTNov 10, 2022
Type of publicationPARTBibliographic data
PartHTPart 2
Date of update of the procedureREGTNov 10, 2022
View procedures Examination procedure (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTRequest for examination effectively filed
Date of legal/procedural statusVSTTOct 13, 2022
Third party request No
Date of receiptAEGTJun 17, 2019
Date of update of the procedureREGTNov 10, 2022
View procedures Pre-registration procedure (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTPre-registration procedure
Legal/procedural statusVSTPre-registration procedure has been concluded
Date of legal/procedural statusVSTTNov 2, 2022
Date of update of the procedureREGTNov 10, 2022
View procedures Examination procedure (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTOfficial communication on examination
Date of legal/procedural statusVSTTMar 21, 2023
Date of update of the procedureREGTMar 22, 2023
View procedures Examination procedure (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTReply to official communication
Date of legal/procedural statusVSTTApr 21, 2023
Date of update of the procedureREGTApr 25, 2023
View procedures Examination procedure (No.: 7)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTDecision to grant patent by Examining Section/Patent Division
Date of legal/procedural statusVSTTMay 23, 2023
Date of update of the procedureREGTMay 24, 2023
View procedures Administrative procedure (No.: 8)
INIDCriterionFieldContent Close details
Type of procedureVARTAdministrative procedure
Legal/procedural statusVSTDivisional application (free division or divided out on the grounds of lack of unity) new file
Date of legal/procedural statusVSTTJun 21, 2023
Issue numberHN31
YearPJ2023
Publication dateVTAug 3, 2023
Type of publicationPARTBibliographic data
PartHTPart 2
Date of update of the procedureREGTJul 26, 2023
View procedures Publications (No.: 9)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPatent specification
Date of legal/procedural statusVSTTAug 31, 2023
Issue numberHN35
YearPJ2023
Publication dateVTAug 31, 2023
Type of publicationPARTDocuments
PartHTPart 3
10Published DE documentsDEPNOriginal document: DE112018008256B3
Searchable text: DE112018008256B3
Date of update of the procedureREGTAug 31, 2023
View procedures Examination procedure (No.: 10)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTGrant of patent has become final
Date of legal/procedural statusVSTTJun 1, 2024
Issue numberHN32
YearPJ2024
Publication dateVTAug 8, 2024
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTAug 8, 2024