Register information Patent

DE file number : 11 2018 008 274.1 (Status: pending/in force, Query started: August 3, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ11 2018 008 274.1
54Designation/titleTIVerfahren zur Bestimmung des Beitrags zu einem Fingerabdruck
51IPC main classICM
(ICMV)		 G03F 7/20 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 G05B 13/04 (2006.01), G05B 19/418 (2006.01), H01L 21/66 (2006.01)
22DE application dateDATMay 23, 2018
43Date of first publicationOTAug 3, 2023
71/73Applicant/ownerINHASML Netherlands B.V., Veldhoven, NL
72InventorINHarutyunyan, Davit, Veldhoven, NL; Jia, Fei, Veldhoven, NL; Staals, Frank, Veldhoven, NL; Wang, Fuming, San Jose, CA, US; Looijestijn, Hugo Thomas, Veldhoven, NL; Rijnierse, Cornelis Johannes, Veldhoven, NL; Pisarenco, Maxim, Veldhoven, NL; Werkman, Roy, Veldhoven, NL; Theeuwes, Thomas, Veldhoven, NL; Hemert, Tom van, Veldhoven, NL; Bastani, Vahid, Veldhoven, NL; Wildenberg, Jochem Sebastiaan, Veldhoven, NL; Mos, Everhardus Cornelis, Veldhoven, NL; Wallerbos, Erik Johannes Maria, Veldhoven, NL
74RepresentativeVTRMurgitroyd Germany Patentanwaltsgesellschaft mbH, 80636 München, DE
Address for service Murgitroyd Germany Patentanwaltsgesellschaft mbH, 80636 München, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
62/523,531
Jun 22, 2017
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
62/639,481
Mar 6, 2018
Due dateFT
FG		May 31, 2026
Annual fee for the 9th year Patent fees
Patent division in charge 51
62Free division/divided out on the grounds of lack of unity from file numberTAAKZ11 2018 008 256.3
57AbstractABA method, system and program for determining a fingerprint of a parameter. The method includes determining a contribution from a device out of a plurality of devices to a fingerprint of a parameter. The method comprising: obtaining parameter data and usage data, wherein the parameter data is based on measurements for multiple substrates having been processed by the plurality of devices, and the usage data indicates which of the devices out of the plurality of the devices were used in the processing of each substrate; and determining the contribution using the usage data and parameter data.
81Designated WO countriesWDSAE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
43Date of first publicationEVTAug 3, 2023
Number of official communications (office actions) 0
Number of responses 0
Date of the first transfer into DPMAregisterEREGTAug 3, 2023
Date of the (most recent) update in DPMAregisterREGTJun 12, 2025
(Show all update days)(Hide all update days)
  • Jun 12, 2025
    • Due date: changed
  • Jun 10, 2025
    • St.36: changed (technical change)
  • Aug 16, 2024
    • St.36: changed (technical change)
  • Aug 3, 2023
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Pre-registration procedure The application is under preliminary examination Jun 21, 2023  Details anzeigen
2 Administrative procedure Divisional application from (free division or divided out on the grounds of lack of unity) initial file Jun 21, 2023 Aug 3, 2023 Details anzeigen
3 Examination procedure Request for examination effectively filed Sep 12, 2023  Details anzeigen
4 Pre-registration procedure Pre-registration procedure has been concluded Oct 30, 2023  Details anzeigen
View procedures Pre-registration procedure (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTPre-registration procedure
Legal/procedural statusVSTThe application is under preliminary examination
Date of legal/procedural statusVSTTJun 21, 2023
Date of update of the procedureREGTAug 3, 2023
View procedures Administrative procedure (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTAdministrative procedure
Legal/procedural statusVSTDivisional application from (free division or divided out on the grounds of lack of unity) initial file
Date of legal/procedural statusVSTTJun 21, 2023
Issue numberHN31
YearPJ2023
Publication dateVTAug 3, 2023
Type of publicationPARTBibliographic data
PartHTPart 2
Date of update of the procedureREGTAug 3, 2023
View procedures Examination procedure (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTRequest for examination effectively filed
Date of legal/procedural statusVSTTSep 12, 2023
Third party request No
Date of receiptAEGTJun 17, 2019
Date of update of the procedureREGTSep 26, 2023
View procedures Pre-registration procedure (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTPre-registration procedure
Legal/procedural statusVSTPre-registration procedure has been concluded
Date of legal/procedural statusVSTTOct 30, 2023
Date of update of the procedureREGTOct 31, 2023