Register information Patent

DE file number : 11 2018 000 173.3 (Status: pending/in force, Query started: August 3, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ11 2018 000 173.3
86WO file numberWAKZPCT/EP2018/063527
87WO publication numberWPN2018233966
54Designation/titleTIVerfahren zum Bestimmen eines charakteristischen Beitrags einer Vorrichtung aus einer Vielzahl von Vorrichtungen zu einem Fingerabdruck eines Parameters
51IPC main classICM
(ICMV)		 G03F 7/20 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 G05B 13/04 (2006.01), G05B 19/418 (2006.01), H01L 21/66 (2006.01)
22DE application dateDATMay 23, 2018
85PCT national phase entry patentPATNATJun 17, 2019
86WO application dateWATMay 23, 2018
43Date of first publicationOTDec 27, 2018
Date of publication of grantPETDec 15, 2022
71/73Applicant/ownerINHASML Netherlands B.V., Veldhoven, NL
72InventorINHarutyunyan, Davit, Veldhoven, NL; Jia, Fei, Veldhoven, NL; Staals, Frank, Veldhoven, NL; Wang, Fuming, San Jose, CA, US; Looijestijn, Hugo Thomas, Veldhoven, NL; Rijnierse, Cornelis Johannes, Veldhoven, NL; Pisarenco, Maxim, Veldhoven, NL; Werkman, Roy, Veldhoven, NL; Theeuwes, Thomas, Veldhoven, NL; Hemert, Tom van, Veldhoven, NL; Bastani, Vahid, Veldhoven, NL; Wildenberg, Jochem Sebastiaan, Veldhoven, NL; Mos, Everhardus Cornelis, Veldhoven, NL; Wallerbos, Erik Johannes Maria, Veldhoven, NL
74RepresentativeVTRMurgitroyd Germany Patentanwaltsgesellschaft mbH, 80636 München, DE
10Published DE documentsDEPNOriginal document: DE112018000173B4
Searchable text: DE112018000173B4
Original document: DE112018000173T5
Searchable text: DE112018000173T5
Address for service Murgitroyd Germany Patentanwaltsgesellschaft mbH, 80636 München, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
62/523,531
Jun 22, 2017
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
62/639,481
Mar 6, 2018
Due dateFT
FG		May 31, 2026
Annual fee for the 9th year Patent fees
Patent division in charge 51
62Free division/divided out on the grounds of lack of unity in file numberTIAKZ11 2018 008 256.3
87WO language of publicationWLANGEN - Englisch
57AbstractABA method, system and program for determining a fingerprint of a parameter. The method includes determining a contribution from a device out of a plurality of devices to a fingerprint of a parameter. The method comprising: obtaining parameter data and usage data, wherein the parameter data is based on measurements for multiple substrates having been processed by the plurality of devices, and the usage data indicates which of the devices out of the plurality of the devices were used in the processing of each substrate; and determining the contribution using the usage data and parameter data.
81Designated WO countriesWDSAE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
Published EP/WO documentsEPWOPNOriginal document: WO2018233966A1
Searchable text: WO2018233966A1
56CitationsCT[X]    US020160246185A1 (US 2016 / 0 246 185 A1)
[X]    US000006477685B1 (US 6 477 685 B1)
43Date of first publicationEVTDec 27, 2018
Number of official communications (office actions) 1
Number of responses 1
Date of the first transfer into DPMAregisterEREGTAug 22, 2019
Date of the (most recent) update in DPMAregisterREGTJun 12, 2025
(Show all update days)(Hide all update days)
  • Jun 12, 2025
    • Due date: changed
  • Jun 10, 2025
    • St.36: changed (technical change)
  • Aug 16, 2024
    • St.36: changed (technical change)
  • Aug 22, 2019
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Pre-registration procedure The application is under preliminary examination May 23, 2018  Details anzeigen
2 Procedure relating to PCT application WO first publication with search report Dec 27, 2018  Details anzeigen
3 Examination procedure Request for examination effectively filed Jun 17, 2019  Details anzeigen
4 Pre-registration procedure Pre-registration procedure has been concluded Jul 15, 2019  Details anzeigen
5 Pre-registration procedure Closing PCT nationale phase entry Jul 15, 2019  Details anzeigen
6 Publications Publication of translation of PCT application Aug 22, 2019 Aug 22, 2019 Details anzeigen
7 Examination procedure Official communication on examination Nov 12, 2020  Details anzeigen
8 Examination procedure Reply to official communication Feb 2, 2021  Details anzeigen
9 Examination procedure Decision to grant patent by Examining Section/Patent Division Sep 6, 2022  Details anzeigen
10 Administrative procedure Divisional application (free division or divided out on the grounds of lack of unity) new file Sep 19, 2022 Nov 10, 2022 Details anzeigen
11 Publications Patent specification Dec 15, 2022 Dec 15, 2022 Details anzeigen
12 Examination procedure Grant of patent has become final Sep 16, 2023 Nov 23, 2023 Details anzeigen
View procedures Pre-registration procedure (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTPre-registration procedure
Legal/procedural statusVSTThe application is under preliminary examination
Date of legal/procedural statusVSTTMay 23, 2018
View procedures Procedure relating to PCT application (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO first publication with search report
Date of legal/procedural statusVSTTDec 27, 2018
View procedures Examination procedure (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTRequest for examination effectively filed
Date of legal/procedural statusVSTTJun 17, 2019
Third party request No
Date of receiptAEGTJun 17, 2019
View procedures Pre-registration procedure (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTPre-registration procedure
Legal/procedural statusVSTPre-registration procedure has been concluded
Date of legal/procedural statusVSTTJul 15, 2019
View procedures Pre-registration procedure (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTPre-registration procedure
Legal/procedural statusVSTClosing PCT nationale phase entry
Date of legal/procedural statusVSTTJul 15, 2019
View procedures Publications (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of translation of PCT application
Date of legal/procedural statusVSTTAug 22, 2019
Issue numberHN34
YearPJ2019
Publication dateVTAug 22, 2019
Type of publicationPARTDocuments
PartHTPart 6
10Published DE documentsDEPNOriginal document: DE112018000173T5
Searchable text: DE112018000173T5
View procedures Examination procedure (No.: 7)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTOfficial communication on examination
Date of legal/procedural statusVSTTNov 12, 2020
Date of update of the procedureREGTNov 13, 2020
View procedures Examination procedure (No.: 8)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTReply to official communication
Date of legal/procedural statusVSTTFeb 2, 2021
Date of update of the procedureREGTFeb 4, 2021
View procedures Examination procedure (No.: 9)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTDecision to grant patent by Examining Section/Patent Division
Date of legal/procedural statusVSTTSep 6, 2022
Date of update of the procedureREGTSep 7, 2022
View procedures Administrative procedure (No.: 10)
INIDCriterionFieldContent Close details
Type of procedureVARTAdministrative procedure
Legal/procedural statusVSTDivisional application (free division or divided out on the grounds of lack of unity) new file
Date of legal/procedural statusVSTTSep 19, 2022
Issue numberHN45
YearPJ2022
Publication dateVTNov 10, 2022
Type of publicationPARTBibliographic data
PartHTPart 2
Date of update of the procedureREGTOct 27, 2022
View procedures Publications (No.: 11)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPatent specification
Date of legal/procedural statusVSTTDec 15, 2022
Issue numberHN50
YearPJ2022
Publication dateVTDec 15, 2022
Type of publicationPARTDocuments
PartHTPart 3
10Published DE documentsDEPNOriginal document: DE112018000173B4
Searchable text: DE112018000173B4
Date of update of the procedureREGTDec 15, 2022
View procedures Examination procedure (No.: 12)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTGrant of patent has become final
Date of legal/procedural statusVSTTSep 16, 2023
Issue numberHN47
YearPJ2023
Publication dateVTNov 23, 2023
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTNov 23, 2023