Master dataINID | Criterion | Field | Content |
---|
| Type of IP right | SART | Patent |
| Status | ST | Pending/in force |
21 | DE file number | DAKZ | 50 2015 015 760.7 |
96 | EP file number | EAKZ | 15 72 1571.6 |
86 | WO file number | WAKZ | PCT/EP2015/000872 |
97 | EP publication number | EPN | 3137847 |
87 | WO publication number | WPN | 2015165587 |
54 | Designation/title | TI | INTERFEROMETRISCHER WEGSENSOR ZUR INTEGRATION IN WERKZEUGMASCHINEN UND HALBLEITER-LITHOGRAFIESYSTEMEN |
51 | IPC main class | ICM (ICMV) | G01B 5/00 (2006.01) |
51 | IPC secondary class(es) | ICS (ICSV) | G01D 11/24 (2006.01) |
22 | DE application date | DAT | Apr 29, 2015 |
96 | EP application date | EAT | Apr 29, 2015 |
86 | WO application date | WAT | Apr 29, 2015 |
43 | Date of first publication | OT | Nov 5, 2015 |
| Date of publication of grant | PET | Apr 13, 2022 |
71/73 | Applicant/owner | INH | attocube systems AG, 85540 Haar, DE |
72 | Inventor | IN | ZECH, Martin, D-85464 Finsing, DE; THURNER, Klaus, 85622 Feldkirchen, DE |
74 | Representative | VTR | DTS Patent- und Rechtsanwälte PartmbB, 80333 München, DE |
| Address for service | | DTS Patent- und Rechtsanwälte PartmbB, 80333 München, DE |
66 66
| Domestic priority | PRN PRD
| 10 2014 006 305.4 Apr 30, 2014
|
| Due date | FT FG | Apr 30, 2025 Annual fee for the 11th year
Patent fees |
| Patent division in charge | | 52 |
97 | EP language of publication | ELANG | DE - Deutsch |
84 | Designated EP contracting states | EDS | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR |
| Published EP/WO documents | EPWOPN | Original document:
EP000003137847A1 Searchable text:
EP000003137847A1 Original document:
EP000003137847B1 Searchable text:
EP000003137847B1 Original document:
WO002015165587 Searchable text:
WO002015165587 |
43 | Date of first publication | EVT | Nov 5, 2015 |
| Date of the first transfer into DPMAregister | EREGT | Mar 9, 2017 |
| Date of the (most recent) update in DPMAregister | REGT | Sep 19, 2024 (Show all update days)(Hide all update days)- Sep 19, 2024
- Procedures: Procedure relating to PCT application, Publication of PCT application, 05.11.2015: deleted
- May 9, 2024; Apr 30, 2024; Apr 27, 2024; Apr 22, 2023; Mar 30, 2023; Mar 2, 2023; Sep 14, 2022; Sep 13, 2022; May 7, 2022; Apr 26, 2022; Apr 23, 2022; Mar 29, 2022; Mar 24, 2022; Aug 22, 2019; Feb 14, 2019; Aug 10, 2017; Apr 20, 2017
- Historical data not available for this/these date(s)
- Mar 9, 2017
- Date of the first transfer into DPMAregister
|