ST.27-legal status data

The legal status information displayed below is based on WIPO Standard ST.27 and of a purely informative nature. Binding information on the status of the IP right is only available in DPMAregister (Show details).

DE file number: 50 2015 015 760.7, EP file number: 15 72 1571.6, WO file number: PCT/EP2015/000872 (Designation/title: INTERFEROMETRISCHER WEGSENSOR ZUR INTEGRATION IN WERKZEUGMASCHINEN UND HALBLEITER-LITHOGRAFIESYSTEMEN)

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Tabular representation
Current state: Active, Current state: Grant

Key event history
No. Key Event Code Key Event Name Event Date Effective Date Effective Date sorted ascending Publication Date To Stage
1 Q10 Document published Nov 5, 2015Nov 5, 2015 unchanged
2 Q10 Document published Mar 8, 2017Mar 8, 2017 Filing
3 Q10 Document published Apr 20, 2017Apr 20, 2017Apr 20, 2017 Filing
4 Q10 Document published Apr 13, 2022Apr 13, 2022 Examination
5 Q10 Document published May 5, 2022May 5, 2022May 5, 2022 Examination
6 F10 IP right granted Jan 16, 2023Jan 16, 2023Apr 6, 2023 Grant
Detailed event history
No. Detailed Event Code Detailed Event Name Event Date Effective Date Effective Date sorted ascending Publication Date To Stage
1 Q12 Application published Nov 5, 2015Nov 5, 2015 unchanged
2 Q12 Application published Mar 8, 2017Mar 8, 2017 Filing
3 Q10 Document published Apr 20, 2017Apr 20, 2017Apr 20, 2017 Filing
4 P22 Classification modified Nov 29, 2021Nov 29, 2021 Filing
5 Q10 Document published Apr 13, 2022Apr 13, 2022 Examination
6 Q10 Document published May 5, 2022May 5, 2022May 5, 2022 Examination
7 F10 IP right granted Jan 16, 2023Jan 16, 2023Apr 6, 2023 Grant

Graphical representation

Below you will see a simplified graphical representation of the legal status information, which is based on WIPO Standard ST.27 using the "Overall Patent/SPC Prosecution Model" defined therein.

Graphical representation of the ST.27 legal status data