Register information Patent

DE file number : 60 2009 009 884.5 (Status: pending/in force, Query started: August 24, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INID	Criterion	Field	Content
	Type of IP right	SART	Patent
	Status	ST	Pending/in force
21	DE file number	DAKZ	60 2009 009 884.5
96	EP file number	EAKZ	09 78 6648.7
86	WO file number	WAKZ	PCT/IB2009/053146
97	EP publication number	EPN	2308272
87	WO publication number	WPN	2010013167
54	Designation/title	TI	VERFAHREN UND VORRICHTUNG ZUR ERZEUGUNG VON EUV-STRAHLUNG ODER WEICHEN RÖNTGENSTRAHLEN
51	IPC main class	ICM (ICMV)	H05G 2/00 (2006.01)
22	DE application date	DAT	Jul 21, 2009
96	EP application date	EAT	Jul 21, 2009
86	WO application date	WAT	Jul 21, 2009
43	Date of first publication	OT	Feb 4, 2010
	Date of publication of grant	PET	Sep 19, 2012
71/73	Applicant/owner	INH	Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein, 80686 München, DE; Philips GmbH, 22335 Hamburg, DE; Ushio Denki Kabushiki Kaisha, Tokio, JP
72	Inventor	IN	ZINK, Peter, NL-5656 AE Eindhoven, NL; VAUDREVANGE, Dominik, M., NL-5656 AE Eindhoven, NL; NEFF, Jakob, W., NL-5656 AE Eindhoven, NL
74	Representative	VTR	Meissner Bolte Patentanwälte Rechtsanwälte Partnerschaft mbB, 80538 München, DE
	Address for service		Meissner Bolte Patentanwälte Rechtsanwälte Partnerschaft mbB, 81633 München, DE
33 31 32	Foreign priority	PRC PRNA PRDA	EP 08104888 Jul 28, 2008
	Due date	FT FG	Jul 31, 2026 Annual fee for the 18th year Patent fees
	Patent division in charge		54
97	EP language of publication	ELANG	EN - Englisch
84	Designated EP contracting states	EDS	AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR
81	Designated WO countries	WDS	AL, RS, BA
	Published EP/WO documents	EPWOPN	Original document: EP000002308272 Searchable text: EP000002308272 Original document: EP000002308272B1 Searchable text: EP000002308272B1 Original document: WO002010013167 Searchable text: WO002010013167
43	Date of first publication	EVT	Feb 4, 2010
	Date of the first transfer into DPMAregister	EREGT	May 31, 2011
	Date of the (most recent) update in DPMAregister	REGT	Aug 12, 2025 (Show all update days)(Hide all update days) Aug 12, 2025 Due date: changed Jun 7, 2025 Procedures: Procedure relating to EP application, EPO publication of mention of grant , 19.09.2012: new Procedures: Procedure relating to EP application, EPO publication of mention of grant , 19.09.2012: deleted Aug 9, 2024 Due date: changed May 31, 2011 Date of the first transfer into DPMAregister

Procedural data
No.	Kind of procedure	Legal status	Date of legal/procedural status	Publication date	Alle Details anzeigen
1	Procedure relating to PCT application	WO first publication without search report	Feb 4, 2010		Details anzeigen
2	Procedure relating to PCT application	WO publication	Feb 4, 2010		Details anzeigen
3	Procedure relating to EP application	EPO 1st publication	Apr 13, 2011		Details anzeigen
4	Procedure relating to EP application	EPO publication of search report	Apr 13, 2011		Details anzeigen
5	Publications	Publication of a mention regarding EP 1st publication by DPMA	May 26, 2011	May 26, 2011	Details anzeigen
6	Procedure relating to EP application	EPO publication of mention regarding patent grant (beginning of opposition period)	Sep 19, 2012		Details anzeigen
7	Publications	Publication by DPMA of mention regarding EP patent grant	Nov 15, 2012	Nov 15, 2012	Details anzeigen
8	Procedure relating to EP application	No opposition to patent grant filed, or opposition proceedings at EPO completed without decision	Jun 20, 2013	Oct 10, 2013	Details anzeigen
9	New applicant/owner details	New applicant/owner details	Mar 31, 2014	May 8, 2014	Details anzeigen
10	New applicant/owner details	New applicant/owner details	Apr 2, 2015	May 13, 2015	Details anzeigen
11	New applicant/owner details	New applicant/owner details	Jul 29, 2015	Sep 3, 2015	Details anzeigen
12	New applicant/owner details	New applicant/owner details	Jan 27, 2021	Mar 4, 2021	Details anzeigen

View procedures Procedure relating to PCT application (No.: 1)
Criterion	Field	Content Close details
Type of procedure	VART	Procedure relating to PCT application
Legal/procedural status	VST	WO first publication without search report
Date of legal/procedural status	VSTT	Feb 4, 2010

View procedures Procedure relating to PCT application (No.: 2)
Criterion	Field	Content Close details
Type of procedure	VART	Procedure relating to PCT application
Legal/procedural status	VST	WO publication
Date of legal/procedural status	VSTT	Feb 4, 2010

View procedures Procedure relating to EP application (No.: 3)
Criterion	Field	Content Close details
Type of procedure	VART	Procedure relating to EP application
Legal/procedural status	VST	EPO 1st publication
Date of legal/procedural status	VSTT	Apr 13, 2011

View procedures Procedure relating to EP application (No.: 4)
Criterion	Field	Content Close details
Type of procedure	VART	Procedure relating to EP application
Legal/procedural status	VST	EPO publication of search report
Date of legal/procedural status	VSTT	Apr 13, 2011

View procedures Publications (No.: 5)
Criterion	Field	Content Close details
Type of procedure	VART	Publications
Legal/procedural status	VST	Publication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural status	VSTT	May 26, 2011
Issue number	HN	21
Year	PJ	2011
Publication date	VT	May 26, 2011
Type of publication	PART	Bibliographic data

View procedures Procedure relating to EP application (No.: 6)
Criterion	Field	Content Close details
Type of procedure	VART	Procedure relating to EP application
Legal/procedural status	VST	EPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural status	VSTT	Sep 19, 2012
Date of update of the procedure	REGT	Jun 7, 2025

View procedures Publications (No.: 7)
Criterion	Field	Content Close details
Type of procedure	VART	Publications
Legal/procedural status	VST	Publication by DPMA of mention regarding EP patent grant
Date of legal/procedural status	VSTT	Nov 15, 2012
Issue number	HN	46
Year	PJ	2012
Publication date	VT	Nov 15, 2012
Type of publication	PART	Bibliographic data
Part	HT	Part 5

View procedures Procedure relating to EP application (No.: 8)
Criterion	Field	Content Close details
Type of procedure	VART	Procedure relating to EP application
Legal/procedural status	VST	No opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural status	VSTT	Jun 20, 2013
Issue number	HN	41
Year	PJ	2013
Publication date	VT	Oct 10, 2013
Type of publication	PART	Bibliographic data
Part	HT	Part 3

View procedures New applicant/owner details (No.: 9)
INID	Criterion	Field	Content Close details
	Type of procedure	VART	New applicant/owner details
	Legal/procedural status	VST	New applicant/owner details
	Date of legal/procedural status	VSTT	Mar 31, 2014
	Issue number	HN	19
	Year	PJ	2014
	Publication date	VT	May 8, 2014
	Type of publication	PART	Bibliographic data
	Part	HT	Part 2
71/73	Applicant/owner	INH	Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 80686 München, DE; Philips Deutschland GmbH, 20099 Hamburg, DE; Xtreme Technologies GmbH, 52074 Aachen, DE
71/73	Previous applicant/owner	INHF	Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 80686 München, DE, Philips Intellectual Property & Standards GmbH, 20099 Hamburg, DE, Xtreme Technologies GmbH, 52074 Aachen, DE

View procedures New applicant/owner details (No.: 10)
INID	Criterion	Field	Content Close details
	Type of procedure	VART	New applicant/owner details
	Legal/procedural status	VST	New applicant/owner details
	Date of legal/procedural status	VSTT	Apr 2, 2015
	Issue number	HN	19
	Year	PJ	2015
	Publication date	VT	May 13, 2015
	Type of publication	PART	Bibliographic data
	Part	HT	Part 2
71/73	Applicant/owner	INH	Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 80686 München, DE; Philips Deutschland GmbH, 20099 Hamburg, DE; Ushio Denki Kabushiki Kaisha, Tokio, JP
71/73	Previous applicant/owner	INHF	Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 80686 München, DE, Philips Deutschland GmbH, 20099 Hamburg, DE, Xtreme Technologies GmbH, 52074 Aachen, DE

View procedures New applicant/owner details (No.: 11)
INID	Criterion	Field	Content Close details
	Type of procedure	VART	New applicant/owner details
	Legal/procedural status	VST	New applicant/owner details
	Date of legal/procedural status	VSTT	Jul 29, 2015
	Issue number	HN	36
	Year	PJ	2015
	Publication date	VT	Sep 3, 2015
	Type of publication	PART	Bibliographic data
	Part	HT	Part 2
71/73	Applicant/owner	INH	Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 80686 München, DE; Philips GmbH, 20099 Hamburg, DE; Ushio Denki Kabushiki Kaisha, Tokio, JP
71/73	Previous applicant/owner	INHF	Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 80686 München, DE, Philips Deutschland GmbH, 20099 Hamburg, DE, Ushio Denki Kabushiki Kaisha, Tokio, JP

View procedures New applicant/owner details (No.: 12)
INID	Criterion	Field	Content Close details
	Type of procedure	VART	New applicant/owner details
	Legal/procedural status	VST	New applicant/owner details
	Date of legal/procedural status	VSTT	Jan 27, 2021
	Issue number	HN	9
	Year	PJ	2021
	Publication date	VT	Mar 4, 2021
	Type of publication	PART	Bibliographic data
	Part	HT	Part 3
71/73	Applicant/owner	INH	Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein, 80686 München, DE; Philips GmbH, 22335 Hamburg, DE; Ushio Denki Kabushiki Kaisha, Tokio, JP
71/73	Previous applicant/owner	INHF	Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 80686 München, DE, Philips GmbH, 20099 Hamburg, DE, Ushio Denki Kabushiki Kaisha, Tokio, JP
	Date of update of the procedure	REGT	Mar 5, 2021