DPMAregister | Patents - ST.27-legal status data

ST.27-legal status data

The legal status information displayed below is based on WIPO Standard ST.27 and of a purely informative nature. Binding information on the status of the IP right is only available in DPMAregister (Show details).

DE file number: 60 2009 009 884.5, EP file number: 09 78 6648.7, WO file number: PCT/IB2009/053146 (Designation/title: VERFAHREN UND VORRICHTUNG ZUR ERZEUGUNG VON EUV-STRAHLUNG ODER WEICHEN RÖNTGENSTRAHLEN)

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Tabular representation
Current state: Active, Current state: Grant

Key event history
No.	Key Event Code	Key Event Name	Event Date	Effective Date	Publication Date	To Stage
1	Q10	Document published	Feb 4, 2010	Feb 4, 2010		unchanged
2	Q10	Document published	Feb 4, 2010	Feb 4, 2010		unchanged
3	Q10	Document published	Apr 13, 2011	Apr 13, 2011		Filing
4	Q10	Document published	Apr 13, 2011	Apr 13, 2011		Filing
5	Q10	Document published	May 26, 2011	May 26, 2011	May 26, 2011	Filing
6	Q10	Document published	Sep 19, 2012	Sep 19, 2012		Examination
7	Q10	Document published	Nov 15, 2012	Nov 15, 2012	Nov 15, 2012	Examination
8	F10	IP right granted	Jun 20, 2013	Jun 20, 2013	Oct 10, 2013	Grant
9	R10	Party data changed	Mar 31, 2014	Mar 31, 2014	May 8, 2014	Grant
10	R10	Party data changed	Apr 2, 2015	Apr 2, 2015	May 13, 2015	Grant
11	R10	Party data changed	Jul 29, 2015	Jul 29, 2015	Sep 3, 2015	Grant
12	R10	Party data changed	Jan 27, 2021	Jan 27, 2021	Mar 4, 2021	Grant

Detailed event history
No.	Detailed Event Code	Detailed Event Name	Event Date	Effective Date	Publication Date	To Stage
1	Q12	Application published	Feb 4, 2010	Feb 4, 2010		unchanged
2	Q12	Application published	Feb 4, 2010	Feb 4, 2010		unchanged
3	Q12	Application published	Apr 13, 2011	Apr 13, 2011		Filing
4	Q10	Document published	Apr 13, 2011	Apr 13, 2011		Filing
5	Q10	Document published	May 26, 2011	May 26, 2011	May 26, 2011	Filing
6	Q10	Document published	Sep 19, 2012	Sep 19, 2012		Examination
7	Q10	Document published	Nov 15, 2012	Nov 15, 2012	Nov 15, 2012	Examination
8	F10	IP right granted	Jun 20, 2013	Jun 20, 2013	Oct 10, 2013	Grant
9	R12	Change to the name of applicant or owner or transfer of ownership recorded	Mar 31, 2014	Mar 31, 2014	May 8, 2014	Grant
10	R12	Change to the name of applicant or owner or transfer of ownership recorded	Apr 2, 2015	Apr 2, 2015	May 13, 2015	Grant
11	R12	Change to the name of applicant or owner or transfer of ownership recorded	Jul 29, 2015	Jul 29, 2015	Sep 3, 2015	Grant
12	R12	Change to the name of applicant or owner or transfer of ownership recorded	Jan 27, 2021	Jan 27, 2021	Mar 4, 2021	Grant

Graphical representation

Below you will see a simplified graphical representation of the legal status information, which is based on WIPO Standard ST.27 using the "Overall Patent/SPC Prosecution Model" defined therein.