Register information Patent

DE file number : 103 26 223.7 (Status: not pending/lapsed, Query started: June 4, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INID	Criterion	Field	Content
	Type of IP right	SART	Patent
	Status	ST	Not pending/lapsed
21	DE file number	DAKZ	103 26 223.7
54	Designation/title	TI	Verfahren zur Strukturierung dünner Schichten mittels optischer Lithographie und Anordnung zur Durchführung der optischen Lithographie
51	IPC main class	ICM (ICMV)	G03F 7/20 (2006.01)
22	DE application date	DAT	Jun 11, 2003
43	Date of first publication	OT	Jan 20, 2005
	Date of publication of grant	PET	Jul 31, 2008
71/73	Applicant/owner	INH	Technische Universität Dresden, 01069 Dresden, DE
72	Inventor	IN	Steiner, Gerald, Dr.-Ing., 08340 Schwarzenberg, DE; Zimmerer, Cordelia, Dipl.-Chem., 01157 Dresden, DE; Salzer, Reiner, Prof. Dr., 04463 Großpösna, DE
10	Published DE documents	DEPN	Original document: DE000010326223A1 Searchable text: DE000010326223A1 Original document: DE000010326223B4 Searchable text: DE000010326223B4
	Address for service		Technische Universität Dresden Technologietransferstelle der TU Dezernat 5, SG 5.1., 01062 Dresden, DE
	Patent division in charge		51
57	Abstract	AB	Die Erfindung betrifft ein Verfahren zur Strukturierung dünner Schichten mittels optischer Lithographie, bei dem in der Schicht Bereiche mit einer höheren Löslichkeit erzeugt werden, anschließend die Bereiche entwickelt und herausgelöst werden, dadurch gekennzeichnet, dass zur Erhöhung der Löslichkeit die dünne Schicht (6) mit einem optischen Element in Kontakt gebracht wird, in den sichtbares oder ultraviolettes Licht (3) mittels Totalreflexion (4) oder als einzelne Mode geführt wird, wobei sich in der dünnen Schicht (6) strukturgemäß evaneszente Felder (5) ausbilden, die die dünnen Schichten (6) durchdringen, womit eine auf die Ausdehnung des evaneszenten Feldes (5) begrenzte erhöhte Löslichkeit in der dünnen Schicht (6) hervorgerufen wird.$A Eine Anordnung zur Durchführung der optischen Lithographie ist beschrieben.
56	Citations	CT	US000006671034B1 (US 66 71 034 B1) US000006569575B1 (US 65 69 575 B1) US000006238826B1 (US 62 38 826 B1) US020020102475A1 (US2002/01 02 475 A1) US020010003043A1 (US2001/00 03 043 A1) JP000H07106229A (JP 07-1 06 229 A) JP002000021770A (JP 2000-0 21 770 A)
43	Date of first publication	EVT	Jan 20, 2005
	Number of official communications (office actions)		2
	Number of responses		2
	Date of the first transfer into DPMAregister	EREGT	May 26, 2011
	Date of the (most recent) update in DPMAregister	REGT	Jan 22, 2016 (Show all update days)(Hide all update days) Jan 22, 2016; Jan 25, 2013; Apr 12, 2012; Feb 23, 2012; Feb 22, 2012; Nov 19, 2011; Nov 18, 2011; Oct 12, 2011; Oct 4, 2011; Jul 18, 2011; Jul 9, 2011 Historical data not available for this/these date(s) May 26, 2011 Date of the first transfer into DPMAregister

Procedural data
No.	Kind of procedure	Legal status	Date of legal/procedural status	Publication date	Alle Details anzeigen
1	Pre-registration procedure	The application is under preliminary examination	Jun 11, 2003		Details anzeigen
2	Examination procedure	Request for examination effectively filed	Jul 1, 2003		Details anzeigen
3	Pre-registration procedure	Pre-registration procedure has been concluded	Jul 25, 2003		Details anzeigen
4	Publications	Publication of application (Offenlegungsschrift)	Jan 20, 2005	Jan 20, 2005	Details anzeigen
5	Change of classification	Change of IPC main class	Oct 17, 2005		Details anzeigen
6	Examination procedure	Reply to official communication	Sep 15, 2007		Details anzeigen
7	Examination procedure	Decision to grant patent by Examining Section/Patent Division	Mar 10, 2008		Details anzeigen
8	Publications	Patent specification	Jul 31, 2008	Jul 31, 2008	Details anzeigen
9	Examination procedure	Grant of patent has become final	Oct 31, 2008	Jan 29, 2009	Details anzeigen
10	Administrative procedure	Application is deemed to be withdrawn due to non-payment of annual fee/ IP right has lapsed due to non-payment of annual fee	Jan 3, 2012	Apr 12, 2012	Details anzeigen

View procedures Pre-registration procedure (No.: 1)
Criterion	Field	Content Close details
Type of procedure	VART	Pre-registration procedure
Legal/procedural status	VST	The application is under preliminary examination
Date of legal/procedural status	VSTT	Jun 11, 2003

View procedures Examination procedure (No.: 2)
Criterion	Field	Content Close details
Type of procedure	VART	Examination procedure
Legal/procedural status	VST	Request for examination effectively filed
Date of legal/procedural status	VSTT	Jul 1, 2003
Third party request		No
Date of receipt	AEGT	Jun 11, 2003

View procedures Pre-registration procedure (No.: 3)
Criterion	Field	Content Close details
Type of procedure	VART	Pre-registration procedure
Legal/procedural status	VST	Pre-registration procedure has been concluded
Date of legal/procedural status	VSTT	Jul 25, 2003

View procedures Publications (No.: 4)
INID	Criterion	Field	Content Close details
	Type of procedure	VART	Publications
	Legal/procedural status	VST	Publication of application (Offenlegungsschrift)
	Date of legal/procedural status	VSTT	Jan 20, 2005
	Issue number	HN	3
	Year	PJ	2005
	Publication date	VT	Jan 20, 2005
	Type of publication	PART	Documents
	Part	HT	Part 2
10	Published DE documents	DEPN	Original document: DE000010326223A1 Searchable text: DE000010326223A1

View procedures Change of classification (No.: 5)
INID	Criterion	Field	Content Close details
	Type of procedure	VART	Change of classification
	Legal/procedural status	VST	Change of IPC main class
	Date of legal/procedural status	VSTT	Oct 17, 2005
51	IPC main class	ICM (ICMV)	G03F 7/20 (2006.01)
51	Previous IPC main class	ICMF (ICMVF)	G03F 7/20 (2000.01)

View procedures Examination procedure (No.: 6)
Criterion	Field	Content Close details
Type of procedure	VART	Examination procedure
Legal/procedural status	VST	Reply to official communication
Date of legal/procedural status	VSTT	Sep 15, 2007

View procedures Examination procedure (No.: 7)
Criterion	Field	Content Close details
Type of procedure	VART	Examination procedure
Legal/procedural status	VST	Decision to grant patent by Examining Section/Patent Division
Date of legal/procedural status	VSTT	Mar 10, 2008

View procedures Publications (No.: 8)
INID	Criterion	Field	Content Close details
	Type of procedure	VART	Publications
	Legal/procedural status	VST	Patent specification
	Date of legal/procedural status	VSTT	Jul 31, 2008
	Issue number	HN	31
	Year	PJ	2008
	Publication date	VT	Jul 31, 2008
	Type of publication	PART	Documents
	Part	HT	Part 3
10	Published DE documents	DEPN	Original document: DE000010326223B4 Searchable text: DE000010326223B4

View procedures Examination procedure (No.: 9)
Criterion	Field	Content Close details
Type of procedure	VART	Examination procedure
Legal/procedural status	VST	Grant of patent has become final
Date of legal/procedural status	VSTT	Oct 31, 2008
Issue number	HN	5
Year	PJ	2009
Publication date	VT	Jan 29, 2009
Type of publication	PART	Bibliographic data
Part	HT	Part 3

View procedures Administrative procedure (No.: 10)
Criterion	Field	Content Close details
Type of procedure	VART	Administrative procedure
Legal/procedural status	VST	Application is deemed to be withdrawn due to non-payment of annual fee/ IP right has lapsed due to non-payment of annual fee
Date of legal/procedural status	VSTT	Jan 3, 2012
Issue number	HN	15
Year	PJ	2012
Publication date	VT	Apr 12, 2012
Type of publication	PART	Bibliographic data
Part	HT	Part 3