Master dataINID | Criterion | Field | Content |
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| Type of IP right | SART | Patent |
| Status | ST | Pending/in force |
21 | DE file number | DAKZ | 10 2021 117 027.3 |
54 | Designation/title | TI | Vorrichtung und Verfahren zur Bestimmung des Eindringens eines Teilchens in ein Material |
51 | IPC main class | ICM (ICMV) | H01L 21/265 (2006.01) |
51 | IPC secondary class(es) | ICS (ICSV) | H01J 37/317 (2006.01), B82B 3/00 (2006.01), G01N 27/04 (2006.01) |
22 | DE application date | DAT | Jul 1, 2021 |
43 | Date of first publication | OT | Jan 5, 2023 |
71/73 | Applicant/owner | INH | SaxonQ GmbH, 04107 Leipzig, DE |
72 | Inventor | IN | Esquinazi, Pablo David, Prof. Dr., 04109 Leipzig, DE; Meijer, Jan Berend, Prof. Dr., 04109 Leipzig, DE; Küpper, Johannes, 04109 Leipzig, DE |
74 | Representative | VTR | Patentanwaltskanzlei Dr. Jan-David Hecht, 04109 Leipzig, DE |
10 | Published DE documents | DEPN | Original document:
DE102021117027A1 Searchable text:
DE102021117027A1 |
| Address for service | | Patentanwaltskanzlei Dr. Jan-David Hecht, 04109 Leipzig, DE |
| Domestic priority claimed in | PRNCI | PCT/EP2022/067789 |
| Due date | FT FG | Jul 31, 2025 Annual fee for the 5th year
Patent fees |
| Patent division in charge | | 33 |
56 | Citations | CT | [X, Y, D]
CN000109786198A (CN 1 09 786 198 A) [X, Y, D]
EP000001747579B1 (EP 1 747 579 B1)
|
56 | NPL citations | CTNP | JAMIESON, D. N., et al.: Deterministic doping. In: Mater. Sci. Semicond. Process., Vol. 62, 2017, S. 23 bis 30. – ISSN: 1369-8001; MCCALLUM, J. C., et al.: Single-Ion Implantation for the Development of Si-Based MOSFET Devices with Quantum Functionalities. In: Adv. Mater. Sci. Eng., Vol. 2012, 2011, S. 1 bis 10. – ISSN: 1687-8434 |
43 | Date of first publication | EVT | Jan 5, 2023 |
| Number of official communications (office actions) | | 0 |
| Number of responses | | 0 |
| Date of the first transfer into DPMAregister | EREGT | Jan 5, 2023 |
| Date of the (most recent) update in DPMAregister | REGT | Jul 19, 2024 (Show all update days)(Hide all update days)- Jul 19, 2024
- Jul 19, 2023; Apr 13, 2023; Mar 7, 2023; Feb 16, 2023
- Historical data not available for this/these date(s)
- Jan 5, 2023
- Date of the first transfer into DPMAregister
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