Register information Patent

WO file number: PCT/EP2022/067789 (Status: not pending/lapsed, Query started: June 16, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTNot pending/lapsed
86WO file numberWAKZPCT/EP2022/067789
87WO publication numberWPN2023275084
54Designation/titleTIVORRICHTUNG UND VERFAHREN ZUR BESTIMMUNG DES EINDRINGENS EINES TEILCHENS IN EIN MATERIAL
51IPC main classICM
(ICMV)		 G01N 27/04 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 H01J 37/30 (2006.01), H01L 21/00 (2006.01), H01L 21/66 (2006.01)
86WO application dateWATJun 28, 2022
72InventorINInventor not yet named
66
66
Domestic priorityPRN
PRD
10 2021 117 027.3
Jul 1, 2021
Patent division in charge 13
87WO language of publicationWLANGDE - Deutsch
57AbstractABMit der vorliegenden Erfindung werden eine Vorrichtung (10) und ein Verfahren zur Bestimmung des Eindringens eines Teilchens (42a) aus einer Teilchenquelle (40) in ein Material (12) bereitgestellt, durch die eine hoch ortsaufgelöste Teilchendetektion, insbesondere eine Einzelteilchendetektion, in einfacher und kostengünstiger Art und Weise ermöglicht wird. Damit kann das Eindringen von Teilchen (42a) in ein Material (12) schnell und sicher detektiert werden. Außerdem lässt sich mit der vorliegenden Erfindung eine deterministische Teilchenimplantation in einfacher und kostengünstiger Art und Weise verwirklichen.
81Designated WO countriesWDSAE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IQ, IR, IS, IT, JM, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, WS, ZA, ZM, ZW
Published EP/WO documentsEPWOPNOriginal document: WO002023275084A1
Searchable text: WO002023275084A1
43Date of first publicationEVTJan 5, 2023
Date of the first transfer into DPMAregisterEREGTJan 10, 2023
Date of the (most recent) update in DPMAregisterREGTMar 2, 2024
(Show all update days)(Hide all update days)
  • Mar 2, 2024
    • Historical data not available for this/these date(s)
  • Jan 10, 2023
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Pre-registration procedure The application is under preliminary examination Jun 28, 2022  Details anzeigen
2 Search procedure Request for search effectively filed Jun 28, 2022  Details anzeigen
3 Procedure relating to PCT application WO first publication with search report Jan 5, 2023  Details anzeigen
4 Procedure relating to PCT application Ceased to have effect for DE Feb 2, 2024  Details anzeigen
View procedures Pre-registration procedure (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTPre-registration procedure
Legal/procedural statusVSTThe application is under preliminary examination
Date of legal/procedural statusVSTTJun 28, 2022
Date of update of the procedureREGTJan 10, 2023
View procedures Search procedure (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTSearch procedure
Legal/procedural statusVSTRequest for search effectively filed
Date of legal/procedural statusVSTTJun 28, 2022
Third party request No
Date of receiptAEGTJun 28, 2022
Date of update of the procedureREGTJan 10, 2023
View procedures Procedure relating to PCT application (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO first publication with search report
Date of legal/procedural statusVSTTJan 5, 2023
Date of update of the procedureREGTJan 10, 2023
View procedures Procedure relating to PCT application (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTCeased to have effect for DE
Date of legal/procedural statusVSTTFeb 2, 2024
Date of update of the procedureREGTMar 2, 2024