ST.27-legal status data

The legal status information displayed below is based on WIPO Standard ST.27 and of a purely informative nature. Binding information on the status of the IP right is only available in DPMAregister (Show details).

DE file number: 60 2013 066 165.0, EP file number: 13 16 5414.7 (Designation/title: Verfahren zur Herstellung eine Maske mit hoher Dichte für dreidimensionale Substrate.)

Tabular representation
Current state: Not active, Current state: Termination likely/termination

Key event history
No. Key Event Code Key Event Name Event Date Effective Date Effective Date sorted ascending Publication Date To Stage
1 Q10 Document published Oct 30, 2013Oct 30, 2013 Filing
2 Q10 Document published Dec 12, 2013Dec 12, 2013Dec 12, 2013 Filing
3 Q10 Document published Feb 26, 2020Feb 26, 2020 Examination
4 Q10 Document published Mar 19, 2020Mar 19, 2020Mar 19, 2020 Examination
5 B10 Application discontinued Nov 3, 2020Nov 3, 2020Jan 28, 2021 Termination likely/termination
Detailed event history
No. Detailed Event Code Detailed Event Name Event Date Effective Date Effective Date sorted ascending Publication Date To Stage
1 Q12 Application published Oct 30, 2013Oct 30, 2013 Filing
2 Q10 Document published Dec 12, 2013Dec 12, 2013Dec 12, 2013 Filing
3 P22 Classification modified Apr 9, 2019Apr 9, 2019 Filing
4 Q10 Document published Feb 26, 2020Feb 26, 2020 Examination
5 Q10 Document published Mar 19, 2020Mar 19, 2020Mar 19, 2020 Examination
6 B12 Application deemed to be withdrawn, abandoned or lapsed Nov 3, 2020Nov 3, 2020Jan 28, 2021 Termination likely/termination

Graphical representation

Below you will see a simplified graphical representation of the legal status information, which is based on WIPO Standard ST.27 using the "Overall Patent/SPC Prosecution Model" defined therein.

Graphical representation of the ST.27 legal status data