DPMAregister
The legal status information displayed below is based on WIPO Standard ST.27 and of a purely informative nature. Binding information on the status of the IP right is only available in DPMAregister (Show details).
DE file number: 60 2011 056 814.0, EP file number: 11 17 9985.4 (Designation/title: Wässrige Polierzusammensetzung und Verfahren zum chemisch-mechanischen Polieren von Substraten mit dielektrischen Siliciumoxid- und Polysiliciumfilmen)
Tabular representationCurrent state: Not active, Current state: Termination likely/termination
Graphical representation
Below you will see a simplified graphical representation of the legal status information, which is based on WIPO Standard ST.27 using the "Overall Patent/SPC Prosecution Model" defined therein.
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