Register information Patent

WO file number: PCT/US2010/034164 (Status: not pending/lapsed, Query started: August 4, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTNot pending/lapsed
86WO file numberWAKZPCT/US2010/034164
87WO publication numberWPN2010132319
54Designation/titleTIADJUSTING THRESHOLD VOLTAGE FOR SOPHISTICATED TRANSISTORS BY DIFFUSING A GATE DIELECTRIC CAP LAYER MATERIAL PRIOR TO GATE DIELECTRIC STABILIZATION
51IPC main classICM
(ICMV)		 H01L 21/8234 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 H01L 21/3115 (2006.01), H01L 21/28 (2006.01), H01L 29/51 (2006.01)
86WO application dateWATMay 10, 2010
72InventorINInventor not yet named
66
66
Domestic priorityPRN
PRD
10 2009 021 486.0
May 15, 2009
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
12/775,555
May 7, 2010
Patent division in charge 33
87WO language of publicationWLANGEN - Englisch
57AbstractABSophisticated gate electrode structures may be formed by providing a cap layer (121) including a desired species that may diffuse into the gate dielectric material (110) prior to performing a treatment for stabilizing the sensitive gate dielectric material (110). In this manner, complex high-k metal gate electrode structures may be formed on the basis of reduced temperatures and doses for a threshold adjusting species compared to conventional strategies. Moreover, a single metal-containing electrode material may be deposited for both types of transistors.
81Designated WO countriesWDSAE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KM, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PE, PG, PH, PL, PT, RO, RS, RU, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
Published EP/WO documentsEPWOPNOriginal document: WO2010132319A8
Searchable text: WO2010132319A8
43Date of first publicationEVTNov 18, 2010
Date of the first transfer into DPMAregisterEREGTOct 17, 2012
Date of the (most recent) update in DPMAregisterREGTMay 19, 2020
(Show all update days)(Hide all update days)
  • Oct 17, 2012
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Pre-registration procedure The application is under preliminary examination May 10, 2010  Details anzeigen
2 Search procedure Request for search effectively filed May 10, 2010  Details anzeigen
3 Search procedure Information on identified prior art provided Nov 18, 2010  Details anzeigen
4 Procedure relating to PCT application WO publication Nov 18, 2010  Details anzeigen
5 Procedure relating to PCT application Ceased to have effect for DE Nov 15, 2011  Details anzeigen
View procedures Pre-registration procedure (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTPre-registration procedure
Legal/procedural statusVSTThe application is under preliminary examination
Date of legal/procedural statusVSTTMay 10, 2010
View procedures Search procedure (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTSearch procedure
Legal/procedural statusVSTRequest for search effectively filed
Date of legal/procedural statusVSTTMay 10, 2010
Third party request No
Date of receiptAEGTMay 10, 2010
View procedures Search procedure (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTSearch procedure
Legal/procedural statusVSTInformation on identified prior art provided
Date of legal/procedural statusVSTTNov 18, 2010
Third party request No
Date of receiptAEGTMay 10, 2010
View procedures Procedure relating to PCT application (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO publication
Date of legal/procedural statusVSTTNov 18, 2010
View procedures Procedure relating to PCT application (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTCeased to have effect for DE
Date of legal/procedural statusVSTTNov 15, 2011