Register information Patent

WO file number: PCT/EP2022/068240 (Status: not pending/lapsed, Query started: April 27, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INID	Criterion	Field	Content
	Type of IP right	SART	Patent
	Status	ST	Not pending/lapsed
86	WO file number	WAKZ	PCT/EP2022/068240
87	WO publication number	WPN	2023275352
54	Designation/title	TI	VERFAHREN ZUM HERSTELLEN EINES SILIZIUMKARBID-HALBLEITERBAUELEMENTS
51	IPC main class	ICM (ICMV)	H01L 21/02 (2006.01)
86	WO application date	WAT	Jul 1, 2022
72	Inventor	IN	Inventor not yet named
66 66	Domestic priority	PRN PRD	10 2021 206 965.7 Jul 2, 2021
	Patent division in charge		13
87	WO language of publication	WLANG	DE - Deutsch
57	Abstract	AB	Verfahren (100) zum Herstellen eines Siliziumkarbid-Halbleiterbauelements mit einem monokristallinen Siliziumkarbidsubstrat, wobei das monokristalline Siliziumkarbidsubstrat eine Substratdicke im Bereich zwischen 50 pm und 100 pm aufweist, und einem polykristallinen Siliziumkarbidsubstrat mit den Schritten Aufbringen (105) einer Siliziumschicht auf das polykristalline Siliziumkarbidsubstrat mittels physikalischer Dampfabscheidung, Aufbringen (110) einer Germaniumschicht auf das monokristalline Siliziumkarbidsubstrat mittels einer weiteren physikalischen Dampfabscheidung, Verbinden (115) der Siliziumschicht und der Germaniumschicht mit Hilfe eines ersten Lasers, wobei Laserstrahlen durch das polykristalline Siliziumkarbidsubstrat eingekoppelt werden und eine Verbindungsschicht aus Silizium und Germanium erzeugt wird, Erzeugen (120) aktiver Bereiche des Siliziumkarbid-Halbleiterbauelements auf oder innerhalb des monokristallinen Siliziumkarbidsubstrats, wobei Hochtemperaturprozesse mit Hilfe eines zweiten Lasers mit einer Wellenlänge von ungefähr 350 nm und einer Energiedichte von 0,5 J/cm
81	Designated WO countries	WDS	AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IQ, IR, IS, IT, JM, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, WS, ZA, ZM, ZW
	Published EP/WO documents	EPWOPN	Original document: WO002023275352A1 Searchable text: WO002023275352A1
43	Date of first publication	EVT	Jan 5, 2023
	Date of the first transfer into DPMAregister	EREGT	Jan 10, 2023
	Date of the (most recent) update in DPMAregister	REGT	Mar 6, 2024 (Show all update days)(Hide all update days) Mar 6, 2024 Historical data not available for this/these date(s) Jan 10, 2023 Date of the first transfer into DPMAregister

Procedural data
No.	Kind of procedure	Legal status	Date of legal/procedural status	Alle Details anzeigen
1	Pre-registration procedure	The application is under preliminary examination	Jul 1, 2022	Details anzeigen
2	Search procedure	Request for search effectively filed	Jul 1, 2022	Details anzeigen
3	Procedure relating to PCT application	WO first publication with search report	Jan 5, 2023	Details anzeigen
4	Procedure relating to PCT application	Ceased to have effect for DE	Feb 3, 2024	Details anzeigen

View procedures Pre-registration procedure (No.: 1)
Criterion	Field	Content Close details
Type of procedure	VART	Pre-registration procedure
Legal/procedural status	VST	The application is under preliminary examination
Date of legal/procedural status	VSTT	Jul 1, 2022
Date of update of the procedure	REGT	Jan 10, 2023

View procedures Search procedure (No.: 2)
Criterion	Field	Content Close details
Type of procedure	VART	Search procedure
Legal/procedural status	VST	Request for search effectively filed
Date of legal/procedural status	VSTT	Jul 1, 2022
Third party request		No
Date of receipt	AEGT	Jul 1, 2022
Date of update of the procedure	REGT	Jan 10, 2023

View procedures Procedure relating to PCT application (No.: 3)
Criterion	Field	Content Close details
Type of procedure	VART	Procedure relating to PCT application
Legal/procedural status	VST	WO first publication with search report
Date of legal/procedural status	VSTT	Jan 5, 2023
Date of update of the procedure	REGT	Jan 10, 2023

View procedures Procedure relating to PCT application (No.: 4)
Criterion	Field	Content Close details
Type of procedure	VART	Procedure relating to PCT application
Legal/procedural status	VST	Ceased to have effect for DE
Date of legal/procedural status	VSTT	Feb 3, 2024
Date of update of the procedure	REGT	Mar 6, 2024