Register information Patent

DE file number : 699 16 256.4 (Status: not pending/lapsed, Query started: September 18, 2024)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTNot pending/lapsed
21DE file number DAKZ699 16 256.4
96EP file numberEAKZ99 90 8403.1
86WO file numberWAKZPCT/US99/03978
97EP publication numberEPN1064527
87WO publication numberWPN1999047901
54Designation/titleTIVERFAHREN UND VORRICHTUNG ZUM MESSEN VON SUBSTRATTEMPERATUREN
51IPC main classICM
(ICMV)		 G01J 5/00 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 G01J 5/04 (2006.01)
22DE application dateDATFeb 23, 1999
96EP application dateEATFeb 23, 1999
86WO application dateWATFeb 23, 1999
43Date of first publicationOTSep 23, 1999
Date of publication of grantPETApr 7, 2004
71/73Applicant/ownerINHApplied Materials, Inc., Santa Clara, Calif., US
72InventorINPEUSE W., Bruce, San Carlos, US; MINER E., Gary, Fremont, US; YAM, Mark, San Jose, US; HUNTER, Aaron, Santa Cruz, US; KNOOT, Peter, San Carlos, US; MERSHON, Jason, Santa Clara, US
74RepresentativeVTRv. Füner Ebbinghaus Finck Hano, 81541 München, DE
10Published DE documentsDEPNOriginal document: DE000069916256T2
Searchable text: DE000069916256T2
Address for service v. Füner Ebbinghaus Finck Hano Patentanwälte - European Patent Attorneys, 81517 München, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
44217
Mar 18, 1998
Patent division in charge 52
97EP language of publicationELANGEN - Englisch
87WO language of publicationWLANGEN - Englisch
84Designated EP contracting statesEDSDE, FR, GB, IT, NL
Published EP/WO documentsEPWOPNOriginal document: EP000001064527
Searchable text: EP000001064527
Original document: EP000001064527B1
Searchable text: EP000001064527B1
Original document: WO001999047901
Searchable text: WO001999047901
43Date of first publicationEVTSep 23, 1999
Date of the first transfer into DPMAregisterEREGTSep 29, 2012
Date of the (most recent) update in DPMAregisterREGTOct 25, 2018
(Show all update days)(Hide all update days)
  • Oct 25, 2018; Apr 21, 2018; Jan 22, 2013
    • Historical data not available for this/these date(s)
  • Sep 29, 2012
    • Date of the first transfer into DPMAregister
Procedural data
No. Kind of procedure Legal status Date of legal/procedural status Date of legal/procedural status sorted ascending Date of first publication Display all details
1 Procedure relating to PCT application WO first publication without search report Sep 23, 1999   Display details
2 Procedure relating to EP application EPO 1st publication Jan 3, 2001   Display details
3 Procedure relating to EP application EPO publication of search report Jan 3, 2001   Display details
4 Publications Publication of a mention regarding EP 1st publication by DPMA Feb 8, 2001 Feb 8, 2001 Display details
5 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Apr 7, 2004   Display details
6 Publications Publication by DPMA of mention regarding EP patent grant May 13, 2004 May 13, 2004 Display details
7 Procedure relating to EP application The European patent is deemed not to have had, from the outset, the effects for DE Jul 8, 2004 Jan 13, 2005 Display details
8 Administrative procedure Internal rectification of the legal status completed Jul 8, 2004   Display details
9 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Jan 10, 2005 May 19, 2005 Display details
10 Publications Translation of EP patent specification Apr 14, 2005 Apr 14, 2005 Display details
11 Change of classification Change of IPC main class Oct 17, 2005   Display details
12 Administrative procedure Application is deemed to be withdrawn due to non-payment of annual fee/ IP right has lapsed due to non-payment of annual fee Sep 1, 2007 Dec 13, 2007 Display details