Register information Patent

DE file number : 698 37 972.1 (Status: not pending/lapsed, Query started: September 21, 2024)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTNot pending/lapsed
21DE file number DAKZ698 37 972.1
96EP file numberEAKZ98 96 7092.2
86WO file numberWAKZPCT/US98/26143
97EP publication numberEPN1044074
87WO publication numberWPN1999029439
54Designation/titleTIVERFAHRENSREGELUNG FÜR PHOTORESISTENTE BESCHICHTUNG MIT SOLVENTDAMPFSENSOR
51IPC main classICM
(ICMV)		 B05D 3/12 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 B05D 3/02 (2006.01), B05D 3/10 (2006.01), H01L 21/469 (2006.01), B05C 11/00 (2006.01), B05C 11/02 (2006.01), C23C 16/00 (2006.01)
22DE application dateDATDec 8, 1998
96EP application dateEATDec 8, 1998
86WO application dateWATDec 8, 1998
43Date of first publicationOTJun 17, 1999
Date of publication of grantPETJun 20, 2007
71/73Applicant/ownerINHASML Holding, N.V., Veldhoven, NL
72InventorINGurer, Emir, Scotts Valley, CA 95066, US; Litvak, Herbert, San Jose, CA 95120, US; Savage, Richard, Scotts Valley, CA 95066, US
74RepresentativeVTRWSL Patentanwälte Partnerschaft mbB, 65185 Wiesbaden, DE
10Published DE documentsDEPNOriginal document: DE000069837972T2
Searchable text: DE000069837972T2
Address for service WSL Patentanwälte Partnerschaft mbB, 65051 Wiesbaden, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
987179
Dec 8, 1997
Patent division in charge 45
97EP language of publicationELANGEN - Englisch
87WO language of publicationWLANGEN - Englisch
84Designated EP contracting statesEDSAT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LI, LU, MC, NL, PT, SE
Published EP/WO documentsEPWOPNOriginal document: EP000001044074
Searchable text: EP000001044074
Original document: EP000001044074B1
Searchable text: EP000001044074B1
Original document: WO001999029439
Searchable text: WO001999029439
43Date of first publicationEVTJun 17, 1999
Date of the first transfer into DPMAregisterEREGTSep 29, 2012
Date of the (most recent) update in DPMAregisterREGTJan 7, 2024
(Show all update days)(Hide all update days)
  • Jan 7, 2024; Dec 11, 2018; Oct 30, 2018; Jan 3, 2018; Dec 21, 2016; Jan 12, 2016; Dec 23, 2014; Jan 18, 2014; Jan 9, 2014; Jan 11, 2013; Jan 9, 2013
    • Historical data not available for this/these date(s)
  • Sep 29, 2012
    • Date of the first transfer into DPMAregister
Procedural data
No. Kind of procedure Legal status Date of legal/procedural status Date of legal/procedural status sorted ascending Date of first publication Display all details
1 Procedure relating to PCT application WO first publication without search report Jun 17, 1999   Display details
2 Procedure relating to EP application EPO 1st publication Oct 18, 2000   Display details
3 Procedure relating to EP application EPO publication of search report Oct 18, 2000   Display details
4 Publications Publication of a mention regarding EP 1st publication by DPMA Nov 23, 2000 Nov 23, 2000 Display details
5 Change of classification Change of IPC main class Oct 17, 2005   Display details
6 New applicant/owner details New applicant/owner details May 23, 2007   Display details
7 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Jun 20, 2007   Display details
8 Publications Publication by DPMA of mention regarding EP patent grant Aug 2, 2007 Aug 2, 2007 Display details
9 Publications Translation of EP patent specification Feb 21, 2008 Feb 21, 2008 Display details
10 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Mar 20, 2008 Jul 10, 2008 Display details
11 Administrative procedure IP right lapsed through expiry of term of protection Dec 8, 2018   Display details