Register information Patent

DE file number : 598 02 288.0 (Status: not pending/lapsed, Query started: May 8, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INID	Criterion	Field	Content
	Type of IP right	SART	Patent
	Status	ST	Not pending/lapsed
21	DE file number	DAKZ	598 02 288.0
96	EP file number	EAKZ	98 10 5913.2
97	EP publication number	EPN	872573
54	Designation/title	TI	Vakuumbehandlungsvorrichtung zum Aufbringen dünner Schichten
51	IPC main class	ICM (ICMV)	C23C 14/56 (2006.01)
51	IPC secondary class(es)	ICS (ICSV)	H01L 21/00 (2000.01), H01J 37/00 (2006.01)
22	DE application date	DAT	Apr 1, 1998
96	EP application date	EAT	Apr 1, 1998
43	Date of first publication	OT	Oct 21, 1998
	Date of publication of grant	PET	Dec 5, 2001
71/73	Applicant/owner	INH	Unaxis Trading AG, Trübbach, CH
72	Inventor	IN	Maidhof, Hans, 63773 Goldbach, DE; Schüssler, Hans, 66578 Schiffweiler, DE; Kunkel, Stefan, 63457 Hanau, DE; Beul, Johannes, 56479 Rehe, DE; Heinrich, Jürgen, W-6369 Limeshain, DE
74	Representative	VTR	Bockhorni & Kollegen Patent- und Rechtsanwälte, 80687 München, DE
	Address for service		Patent- und Rechtsanwälte Bockhorni & Kollegen, 80687 München, DE
66 66	Domestic priority	PRN PRD	19715245 Apr 12, 1997
	Patent division in charge		45
97	EP language of publication	ELANG	DE - Deutsch
84	Designated EP contracting states	EDS	CH, DE, ES, FR, GB, IT, LI, NL, PT
	Published EP/WO documents	EPWOPN	Original document: EP000000872573 Searchable text: EP000000872573 Original document: EP000000872573 Searchable text: EP000000872573 Original document: EP000000872573B1 Searchable text: EP000000872573B1
43	Date of first publication	EVT	Oct 21, 1998
	Date of the first transfer into DPMAregister	EREGT	Sep 28, 2012
	Date of the (most recent) update in DPMAregister	REGT	Jul 8, 2017 (Show all update days)(Hide all update days) Jul 8, 2017; Oct 10, 2014; May 9, 2014; Jul 31, 2013; May 9, 2013; Jan 21, 2013 Historical data not available for this/these date(s) Sep 28, 2012 Date of the first transfer into DPMAregister

Procedural data
No.	Kind of procedure	Legal status	Date of legal/procedural status	Publication date	Alle Details anzeigen
1	Procedure relating to EP application	EPO 1st publication	Oct 21, 1998		Details anzeigen
2	Procedure relating to EP application	EPO publication of search report	Oct 21, 1998		Details anzeigen
3	Publications	Publication of a mention regarding EP 1st publication by DPMA	Nov 26, 1998	Nov 26, 1998	Details anzeigen
4	Change of classification	Change of IPC main class	Jan 19, 2001		Details anzeigen
5	New applicant/owner details	New applicant/owner details	Oct 30, 2001		Details anzeigen
6	Procedure relating to EP application	EPO publication of mention regarding patent grant (beginning of opposition period)	Dec 5, 2001		Details anzeigen
7	Publications	Publication by DPMA of mention regarding EP patent grant	Jan 17, 2002	Jan 17, 2002	Details anzeigen
8	Procedure relating to EP application	No opposition to patent grant filed, or opposition proceedings at EPO completed without decision	Sep 5, 2002	Jan 9, 2003	Details anzeigen
9	Change of classification	Change of IPC main class	Oct 17, 2005		Details anzeigen
10	Administrative procedure	Application is deemed to be withdrawn due to non-payment of annual fee/ IP right has lapsed due to non-payment of annual fee	Nov 1, 2011		Details anzeigen

View procedures Procedure relating to EP application (No.: 1)
Criterion	Field	Content Close details
Type of procedure	VART	Procedure relating to EP application
Legal/procedural status	VST	EPO 1st publication
Date of legal/procedural status	VSTT	Oct 21, 1998

View procedures Procedure relating to EP application (No.: 2)
Criterion	Field	Content Close details
Type of procedure	VART	Procedure relating to EP application
Legal/procedural status	VST	EPO publication of search report
Date of legal/procedural status	VSTT	Oct 21, 1998

View procedures Publications (No.: 3)
Criterion	Field	Content Close details
Type of procedure	VART	Publications
Legal/procedural status	VST	Publication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural status	VSTT	Nov 26, 1998
Issue number	HN	48
Year	PJ	1998
Publication date	VT	Nov 26, 1998
Type of publication	PART	Bibliographic data

View procedures Change of classification (No.: 4)
INID	Criterion	Field	Content Close details
	Type of procedure	VART	Change of classification
	Legal/procedural status	VST	Change of IPC main class
	Date of legal/procedural status	VSTT	Jan 19, 2001
51	IPC main class	ICM (ICMV)	C23C 14/56 (2000.01)
51	Previous IPC main class	ICMF (ICMVF)	C23C 14/56 (1995.01)

View procedures New applicant/owner details (No.: 5)
INID	Criterion	Field	Content Close details
	Type of procedure	VART	New applicant/owner details
	Legal/procedural status	VST	New applicant/owner details
	Date of legal/procedural status	VSTT	Oct 30, 2001
71/73	Applicant/owner	INH	Unaxis Trading AG, Trübbach, CH
71/73	Previous applicant/owner	INHF	Leybold Systems GmbH, 63450 Hanau, DE

View procedures Procedure relating to EP application (No.: 6)
Criterion	Field	Content Close details
Type of procedure	VART	Procedure relating to EP application
Legal/procedural status	VST	EPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural status	VSTT	Dec 5, 2001

View procedures Publications (No.: 7)
Criterion	Field	Content Close details
Type of procedure	VART	Publications
Legal/procedural status	VST	Publication by DPMA of mention regarding EP patent grant
Date of legal/procedural status	VSTT	Jan 17, 2002
Issue number	HN	3
Year	PJ	2002
Publication date	VT	Jan 17, 2002
Type of publication	PART	Bibliographic data
Part	HT	Part 5

View procedures Procedure relating to EP application (No.: 8)
Criterion	Field	Content Close details
Type of procedure	VART	Procedure relating to EP application
Legal/procedural status	VST	No opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural status	VSTT	Sep 5, 2002
Issue number	HN	2
Year	PJ	2003
Publication date	VT	Jan 9, 2003
Type of publication	PART	Bibliographic data
Part	HT	Part 3

View procedures Change of classification (No.: 9)
INID	Criterion	Field	Content Close details
	Type of procedure	VART	Change of classification
	Legal/procedural status	VST	Change of IPC main class
	Date of legal/procedural status	VSTT	Oct 17, 2005
51	IPC main class	ICM (ICMV)	C23C 14/56 (2006.01)
51	Previous IPC main class	ICMF (ICMVF)	C23C 14/56 (2000.01)

View procedures Administrative procedure (No.: 10)
Criterion	Field	Content Close details
Type of procedure	VART	Administrative procedure
Legal/procedural status	VST	Application is deemed to be withdrawn due to non-payment of annual fee/ IP right has lapsed due to non-payment of annual fee
Date of legal/procedural status	VSTT	Nov 1, 2011