Register information Patent

DE file number : 693 33 282.4 (Status: not pending/lapsed, Query started: September 21, 2024)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTNot pending/lapsed
21DE file number DAKZ693 33 282.4
96EP file numberEAKZ93 11 3473.8
97EP publication numberEPN584778
54Designation/titleTIVerfahren zur Herstellung eines Halbleitersubstrats
51IPC main classICM
(ICMV)		 H01L 21/20 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 H01L 21/76 (2006.01)
22DE application dateDATAug 24, 1993
96EP application dateEATAug 24, 1993
43Date of first publicationOTApr 7, 1994
Date of publication of grantPETNov 5, 2003
71/73Applicant/ownerINHCanon K.K., Tokyo, JP
72InventorINYonehara, Takao, Ohta-ku, JP
74RepresentativeVTRTBK, 80336 München, DE
10Published DE documentsDEPNOriginal document: DE000069333282T2
Searchable text: DE000069333282T2
Address for service TBK, 80019 München, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
JP
24717392
Aug 25, 1992
Patent division in charge 33
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSDE, FR, GB, IT, NL
43Date of first publicationEVTMar 2, 1994
Date of the first transfer into DPMAregisterEREGTSep 27, 2012
Date of the (most recent) update in DPMAregisterREGTJan 20, 2013
(Show all update days)(Hide all update days)
  • Jan 20, 2013
    • Historical data not available for this/these date(s)
  • Sep 27, 2012
    • Date of the first transfer into DPMAregister
Procedural data
No. Kind of procedure Legal status Date of legal/procedural status Date of legal/procedural status sorted ascending Date of first publication Display all details
1 Procedure relating to EP application EPO 1st publication Mar 2, 1994   Display details
2 Publications Publication of a mention regarding EP 1st publication by DPMA Apr 7, 1994 Apr 7, 1994 Display details
3 Change of classification Change of IPC main class Aug 2, 2002   Display details
4 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Nov 5, 2003   Display details
5 Publications Publication by DPMA of mention regarding EP patent grant Dec 11, 2003 Dec 11, 2003 Display details
6 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Aug 5, 2004 Dec 2, 2004 Display details
7 Publications Translation of EP patent specification Aug 26, 2004 Aug 26, 2004 Display details
8 Change of classification Change of IPC main class Oct 17, 2005   Display details
9 Administrative procedure Application is deemed to be withdrawn due to non-payment of annual fee/ IP right has lapsed due to non-payment of annual fee Mar 1, 2007 Jun 28, 2007 Display details