Register information Patent

DE file number : 60 2021 000 473.7 (Status: pending/in force, Query started: August 9, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2021 000 473.7
96EP file numberEAKZ21 16 9501.0
97EP publication numberEPN3913430
54Designation/titleTISUPERKONTINUUMSTRAHLUNGSQUELLE UND ZUGEHÖRIGE METROLOGIEVORRICHTUNGEN
51IPC main classICM
(ICMV)		 G02F 1/35 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 G03F 7/20 (2006.01), G03F 9/00 (2006.01), G02B 6/02 (2006.01), G02B 6/42 (2006.01), H01S 3/00 (2006.01)
22DE application dateDATApr 20, 2021
96EP application dateEATApr 20, 2021
43Date of first publicationOTNov 24, 2021
Date of publication of grantPETSep 28, 2022
71/73Applicant/ownerINHASML Netherlands B.V., Veldhoven, NL
72InventorINBAUERSCHMIDT, Sebastian, Thomas, 5500 AH Veldhoven, NL; GÖTZ, Peter, Maximilian, 5500 AH Veldhoven, NL; UEBEL, Patrick, Sebastian, 5500 AH Veldhoven, NL
Address for service ASML Netherlands B.V., 5500 AH Veldhoven, NL
33
31
32
Foreign priorityPRC
PRNA
PRDA
EP
20175307
May 19, 2020
Due dateFT
FG		Apr 30, 2026
Annual fee for the 6th year Patent fees
Patent division in charge 51
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Published EP/WO documentsEPWOPNOriginal document: EP000003913430A1
Searchable text: EP000003913430A1
Original document: EP000003913430B1
Searchable text: EP000003913430B1
43Date of first publicationEVTNov 24, 2021
Date of the first transfer into DPMAregisterEREGTNov 24, 2021
Date of the (most recent) update in DPMAregisterREGTMay 9, 2025
(Show all update days)(Hide all update days)
  • May 9, 2025
    • Due date: changed
  • May 7, 2025
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 28.09.2022: new
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 28.09.2022: deleted
  • Nov 27, 2024
    • St.36: changed (technical change)
  • Nov 24, 2021
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to EP application EPO 1st publication Nov 24, 2021  Details anzeigen
2 Publications Publication of a mention regarding EP 1st publication by DPMA Jan 5, 2022 Jan 5, 2022 Details anzeigen
3 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Sep 28, 2022  Details anzeigen
4 Publications Publication by DPMA of mention regarding EP patent grant Oct 13, 2022 Oct 13, 2022 Details anzeigen
5 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Jun 29, 2023 Sep 21, 2023 Details anzeigen
View procedures Procedure relating to EP application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTNov 24, 2021
Date of update of the procedureREGTNov 24, 2021
View procedures Publications (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTJan 5, 2022
Issue numberHN1
YearPJ2022
Publication dateVTJan 5, 2022
Type of publicationPARTBibliographic data
Date of update of the procedureREGTNov 24, 2021
View procedures Procedure relating to EP application (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTSep 28, 2022
Date of update of the procedureREGTMay 7, 2025
View procedures Publications (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTOct 13, 2022
Issue numberHN41
YearPJ2022
Publication dateVTOct 13, 2022
Type of publicationPARTBibliographic data
PartHTPart 5
Date of update of the procedureREGTOct 13, 2022
View procedures Procedure relating to EP application (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTJun 29, 2023
Issue numberHN38
YearPJ2023
Publication dateVTSep 21, 2023
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTSep 21, 2023