Master dataINID | Criterion | Field | Content |
---|
| Type of IP right | SART | Patent |
| Status | ST | Pending/in force |
21 | DE file number | DAKZ | 50 2021 002 799.2 |
96 | EP file number | EAKZ | 21 16 7990.7 |
97 | EP publication number | EPN | 4075488 |
54 | Designation/title | TI | VERFAHREN ZUM HERSTELLEN VON HALBLEITERSCHEIBEN MIT AUS DER GASPHASE ABGESCHIEDENER EPITAKTISCHER SCHICHT IN EINER ABSCHEIDEKAMMER |
51 | IPC main class | ICM (ICMV) | H01L 21/68 (2006.01) |
22 | DE application date | DAT | Apr 13, 2021 |
96 | EP application date | EAT | Apr 13, 2021 |
43 | Date of first publication | OT | Oct 19, 2022 |
| Date of publication of grant | PET | Feb 28, 2024 |
71/73 | Applicant/owner | INH | Siltronic AG, 81677 München, DE |
72 | Inventor | IN | Stettner, Thomas, 83329 Waging am See, DE |
| Address for service | | Siltronic AG, 81677 München, DE |
| Due date | FT FG | Apr 30, 2025 Annual fee for the 5th year
Patent fees |
| Patent division in charge | | 36 |
97 | EP language of publication | ELANG | DE - Deutsch |
84 | Designated EP contracting states | EDS | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR |
| Published EP/WO documents | EPWOPN | Original document:
EP000004075488A1 Searchable text:
EP000004075488A1 Original document:
EP000004075488B1 Searchable text:
EP000004075488B1 |
43 | Date of first publication | EVT | Oct 19, 2022 |
| Date of the first transfer into DPMAregister | EREGT | Oct 19, 2022 |
| Date of the (most recent) update in DPMAregister | REGT | Apr 11, 2025 (Show all update days)(Hide all update days)- Apr 11, 2025
- Procedures: Procedure relating to EP application, EPO publication of mention of grant , 28.02.2024: new
- Procedures: Procedure relating to EP application, EPO publication of mention of grant , 28.02.2024: deleted
- Jan 30, 2025
- Procedures: Procedure relating to EP application, Grant has become final, 29.11.2024: changed
- Jan 16, 2025
- Procedures: Procedure relating to EP application, Grant has become final, 29.11.2024: new
- Jul 18, 2024
- St.36: changed (technical change)
- Apr 27, 2024; Mar 14, 2024; Feb 8, 2024
- Historical data not available for this/these date(s)
- Oct 19, 2022
- Date of the first transfer into DPMAregister
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