Register information Patent

DE file number : 60 2014 086 258.6 (Status: pending/in force, Query started: April 28, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2014 086 258.6
96EP file numberEAKZ21 15 8423.0
97EP publication numberEPN3862460
54Designation/titleTISPUTTERZIEL MIT RÜCKSEITIGEN KÜHLRILLEN
51IPC main classICM
(ICMV)
C23C 14/34 (2006.01)
51IPC secondary class(es)ICS
(ICSV)
H01J 37/34 (2006.01)
22DE application dateDATAug 14, 2014
96EP application dateEATAug 14, 2014
43Date of first publicationOTAug 11, 2021
Date of publication of grantPETFeb 15, 2023
71/73Applicant/ownerINHApplied Materials, Inc., Santa Clara, CA, US
72InventorINWest, Brian T., San Jose, CA California 95130, US; Cox, Michael S., Gilroy, CA California 95020, US; Oh, Jeonghoon, Saratoga, CA California 95070, US
74RepresentativeVTRZimmermann & Partner Patentanwälte mbB, 80331 München, DE
Address for service Zimmermann & Partner Patentanwälte mbB, 80069 München, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
201361866006 P
Aug 14, 2013
Due dateFT
FG
Aug 31, 2025
Annual fee for the 12th year Patent fees
Patent division in charge 45
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Published EP/WO documentsEPWOPNOriginal document: EP000003862460A1
Searchable text: EP000003862460A1
Original document: EP000003862460B1
Searchable text: EP000003862460B1
43Date of first publicationEVTAug 11, 2021
Date of the first transfer into DPMAregisterEREGTAug 11, 2021
Date of the (most recent) update in DPMAregisterREGTJul 30, 2024
(Show all update days)(Hide all update days)
  • Jul 30, 2024
    • Due date: changed
  • Jul 25, 2024
    • St.36: changed (technical change)
  • May 2, 2024; Feb 8, 2024; Jan 4, 2024; Jul 29, 2023; Feb 28, 2023; Jan 26, 2023
    • Historical data not available for this/these date(s)
  • Aug 11, 2021
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to EP application EPO 1st publication Aug 11, 2021  Details anzeigen
2 Publications Publication of a mention regarding EP 1st publication by DPMA Sep 23, 2021 Sep 23, 2021 Details anzeigen
3 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Feb 15, 2023  Details anzeigen
4 Publications Publication by DPMA of mention regarding EP patent grant Mar 2, 2023 Mar 2, 2023 Details anzeigen
5 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Nov 16, 2023 Feb 8, 2024 Details anzeigen
View procedures Procedure relating to EP application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTAug 11, 2021
Date of update of the procedureREGTAug 11, 2021
View procedures Publications (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTSep 23, 2021
Issue numberHN38
YearPJ2021
Publication dateVTSep 23, 2021
Type of publicationPARTBibliographic data
Date of update of the procedureREGTAug 11, 2021
View procedures Procedure relating to EP application (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTFeb 15, 2023
Date of update of the procedureREGTJan 26, 2023
View procedures Publications (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTMar 2, 2023
Issue numberHN9
YearPJ2023
Publication dateVTMar 2, 2023
Type of publicationPARTBibliographic data
PartHTPart 5
Date of update of the procedureREGTFeb 28, 2023
View procedures Procedure relating to EP application (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTNov 16, 2023
Issue numberHN6
YearPJ2024
Publication dateVTFeb 8, 2024
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTFeb 8, 2024