Register information Patent

DE file number : 60 2020 019 539.4 (Status: not pending/lapsed, Query started: May 13, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTNot pending/lapsed
21DE file number DAKZ60 2020 019 539.4
96EP file numberEAKZ20 78 4526.4
86WO file numberWAKZPCT/JP2020/010050
97EP publication numberEPN3950744
87WO publication numberWPN2020203073
54Designation/titleTILICHTEMPFINDLICHE ZUSAMMENSETZUNG FÜR EUV-LICHT, VERFAHREN ZUR MUSTERBILDUNG UND VERFAHREN ZUR HERSTELLUNG EINER ELEKTRONISCHEN VORRICHTUNG
51IPC main classICM
(ICMV)		 C08F 220/16 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 C08F 220/22 (2006.01), G03F 7/039 (2006.01), G03F 7/20 (2006.01), C08F 220/18 (2006.01), C08F 220/24 (2006.01), C08F 220/28 (2006.01), G03F 7/004 (2006.01), C08L 33/12 (2006.01)
22DE application dateDATMar 9, 2020
96EP application dateEATMar 9, 2020
86WO application dateWATMar 9, 2020
43Date of first publicationOTOct 8, 2020
Date of publication of grantPETOct 18, 2023
71/73Applicant/ownerINHFUJIFILM Corporation, Tokyo, JP
72InventorINSAKITA, Kyohei, Haibara-gun, Shizuoka 421-0396, JP
Address for service FUJIFILM Corporation, TOKYO 106-8620, JP
33
31
32
Foreign priorityPRC
PRNA
PRDA
JP
2020030660
Feb 26, 2020
33
31
32
Foreign priorityPRC
PRNA
PRDA
JP
2019067401
Mar 29, 2019
Patent division in charge 44
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Published EP/WO documentsEPWOPNOriginal document: EP000003950744A1
Searchable text: EP000003950744A1
Original document: EP000003950744B1
Searchable text: EP000003950744B1
Original document: WO002020203073
Searchable text: WO002020203073
43Date of first publicationEVTOct 8, 2020
Date of the first transfer into DPMAregisterEREGTFeb 9, 2022
Date of the (most recent) update in DPMAregisterREGTFeb 13, 2025
(Show all update days)(Hide all update days)
  • Feb 13, 2025
    • St.36: changed (technical change)
  • Jan 2, 2025
    • Procedures: Administrative procedure, Application deemed withdrawn due to non-payment of annual fee, 01.10.2024: changed
  • Nov 14, 2024
    • Status: changed
    • Due date: deleted
    • Procedures: Administrative procedure, Application deemed withdrawn due to non-payment of annual fee, 01.10.2024: new
  • Oct 10, 2024
    • Procedures: Procedure relating to EP application, Grant has become final, 19.07.2024: changed
  • Sep 5, 2024
    • Procedures: Procedure relating to EP application, Grant has become final, 19.07.2024: new
  • Aug 15, 2024
    • St.36: changed (technical change)
  • Aug 8, 2024
    • St.36: changed (technical change)
  • Aug 1, 2024
    • St.36: changed (technical change)
  • Jul 25, 2024
    • St.36: changed (technical change)
  • Jun 6, 2024; May 16, 2024; May 2, 2024; Nov 9, 2023; Sep 29, 2023; Sep 28, 2023; Apr 13, 2023
    • Historical data not available for this/these date(s)
  • Feb 9, 2022
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to PCT application WO publication Oct 8, 2020  Details anzeigen
2 Procedure relating to EP application EPO 1st publication Feb 9, 2022  Details anzeigen
3 Publications Publication of a mention regarding EP 1st publication by DPMA Mar 24, 2022 Mar 24, 2022 Details anzeigen
4 Change of classification Change of IPC main class Mar 31, 2023  Details anzeigen
5 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Oct 18, 2023  Details anzeigen
6 Publications Publication by DPMA of mention regarding EP patent grant Nov 9, 2023 Nov 9, 2023 Details anzeigen
7 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Jul 19, 2024 Oct 10, 2024 Details anzeigen
8 Administrative procedure Application is deemed to be withdrawn due to non-payment of annual fee/ IP right has lapsed due to non-payment of annual fee Oct 1, 2024 Jan 2, 2025 Details anzeigen
View procedures Procedure relating to PCT application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO publication
Date of legal/procedural statusVSTTOct 8, 2020
Date of update of the procedureREGTSep 28, 2023
View procedures Procedure relating to EP application (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTFeb 9, 2022
Date of update of the procedureREGTFeb 9, 2022
View procedures Publications (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTMar 24, 2022
Issue numberHN12
YearPJ2022
Publication dateVTMar 24, 2022
Type of publicationPARTBibliographic data
Date of update of the procedureREGTFeb 9, 2022
View procedures Change of classification (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTChange of classification
Legal/procedural statusVSTChange of IPC main class
Date of legal/procedural statusVSTTMar 31, 2023
51IPC main classICM
(ICMV)		 C08F 220/16 (2006.01)
51Previous IPC main classICMF
(ICMVF)		 C08F 220/16 (2006.01)
Date of update of the procedureREGTApr 13, 2023
View procedures Procedure relating to EP application (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTOct 18, 2023
Date of update of the procedureREGTSep 28, 2023
View procedures Publications (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTNov 9, 2023
Issue numberHN45
YearPJ2023
Publication dateVTNov 9, 2023
Type of publicationPARTBibliographic data
PartHTPart 5
Date of update of the procedureREGTNov 9, 2023
View procedures Procedure relating to EP application (No.: 7)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTJul 19, 2024
Issue numberHN41
YearPJ2024
Publication dateVTOct 10, 2024
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTOct 10, 2024
View procedures Administrative procedure (No.: 8)
INIDCriterionFieldContent Close details
Type of procedureVARTAdministrative procedure
Legal/procedural statusVSTApplication is deemed to be withdrawn due to non-payment of annual fee/ IP right has lapsed due to non-payment of annual fee
Date of legal/procedural statusVSTTOct 1, 2024
Issue numberHN1
YearPJ2025
Publication dateVTJan 2, 2025
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTJan 2, 2025