Register information Patent

DE file number : 60 2020 023 087.4 (Status: pending/in force, Query started: May 4, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2020 023 087.4
96EP file numberEAKZ20 73 7150.1
86WO file numberWAKZPCT/EP2020/068936
97EP publication numberEPN3997520
87WO publication numberWPN2021004985
54Designation/titleTISPÜLUNG UND VERFAHREN ZU IHRER VERWENDUNG FÜR DIE ENTFERNUNG VON KANTENSCHUTZSCHICHTEN UND RESTMETALLHARTMASKENKOMPONENTEN
51IPC main classICM
(ICMV)		 G03F 7/42 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 G03F 7/09 (2006.01), H01L 21/02 (2006.01), H01L 21/027 (2006.01), H01L 21/311 (2006.01)
22DE application dateDATJul 6, 2020
96EP application dateEATJul 6, 2020
86WO application dateWATJul 6, 2020
43Date of first publicationOTJan 14, 2021
Date of publication of grantPETDec 20, 2023
71/73Applicant/ownerINHMerck Patent Gesellschaft mit beschränkter Haftung, 64293 Darmstadt, DE
72InventorINRAHMAN, M. Dalil, Branchburg, New Jersey 08876, US; MULLEN, Salem K., Branchburg, New Jersey 08876, US; CHO, JoonYeon, Branchburg, New Jersey 08876, US
74RepresentativeVTRPatentanwälte Isenbruck Bösl Hörschler PartG mbB, 68163 Mannheim, DE
Address for service Patentanwälte Isenbruck Bösl Hörschler PartG mbB, 68163 Mannheim, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
201962871346 P
Jul 8, 2019
Due dateFT
FG		Jul 31, 2025
Annual fee for the 6th year Patent fees
Patent division in charge 51
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Published EP/WO documentsEPWOPNOriginal document: EP000003997520A1
Searchable text: EP000003997520A1
Original document: EP000003997520B1
Searchable text: EP000003997520B1
Original document: WO002021004985
Searchable text: WO002021004985
43Date of first publicationEVTJan 14, 2021
Date of the first transfer into DPMAregisterEREGTMay 18, 2022
Date of the (most recent) update in DPMAregisterREGTDec 12, 2024
(Show all update days)(Hide all update days)
  • Dec 12, 2024
    • Procedures: Procedure relating to EP application, Grant has become final, 23.09.2024: changed
  • Nov 7, 2024
    • Procedures: Procedure relating to EP application, Grant has become final, 23.09.2024: new
  • Jul 18, 2024
    • St.36: changed (technical change)
  • Jun 12, 2024; May 2, 2024; Mar 16, 2024; Jan 4, 2024; Nov 29, 2023; Nov 23, 2023
    • Historical data not available for this/these date(s)
  • May 18, 2022
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to PCT application WO publication Jan 14, 2021  Details anzeigen
2 Procedure relating to EP application EPO 1st publication May 18, 2022  Details anzeigen
3 Publications Publication of a mention regarding EP 1st publication by DPMA Jun 30, 2022 Jun 30, 2022 Details anzeigen
4 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Dec 20, 2023  Details anzeigen
5 Publications Publication by DPMA of mention regarding EP patent grant Jan 4, 2024 Jan 4, 2024 Details anzeigen
6 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Sep 23, 2024 Dec 12, 2024 Details anzeigen
View procedures Procedure relating to PCT application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO publication
Date of legal/procedural statusVSTTJan 14, 2021
Date of update of the procedureREGTMay 18, 2022
View procedures Procedure relating to EP application (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTMay 18, 2022
Date of update of the procedureREGTMay 18, 2022
View procedures Publications (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTJun 30, 2022
Issue numberHN26
YearPJ2022
Publication dateVTJun 30, 2022
Type of publicationPARTBibliographic data
Date of update of the procedureREGTMay 18, 2022
View procedures Procedure relating to EP application (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTDec 20, 2023
Date of update of the procedureREGTNov 23, 2023
View procedures Publications (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTJan 4, 2024
Issue numberHN1
YearPJ2024
Publication dateVTJan 4, 2024
Type of publicationPARTBibliographic data
PartHTPart 5
Date of update of the procedureREGTJan 4, 2024
View procedures Procedure relating to EP application (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTSep 23, 2024
Issue numberHN50
YearPJ2024
Publication dateVTDec 12, 2024
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTDec 12, 2024