Register information Patent

DE file number : 60 2020 013 335.6 (Status: pending/in force, Query started: August 6, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2020 013 335.6
96EP file numberEAKZ20 72 5523.3
86WO file numberWAKZPCT/EP2020/063077
97EP publication numberEPN3973358
87WO publication numberWPN2020234028
54Designation/titleTIVERFAHREN ZUR BESTIMMUNG EINES ABTASTSCHEMAS, HALBLEITERSUBSTRATMESSVORRICHTUNG, LITHOGRAFISCHE VORRICHTUNG
51IPC main classICM
(ICMV)		 G03F 7/20 (2006.01)
22DE application dateDATMay 11, 2020
96EP application dateEATMay 11, 2020
86WO application dateWATMay 11, 2020
43Date of first publicationOTNov 26, 2020
Date of publication of grantPETJul 5, 2023
71/73Applicant/ownerINHASML Netherlands B.V., Veldhoven, NL
72InventorINSMORENBERG, Pieter, Gerardus, Jacobus, 5500 AH Veldhoven, NL; SAPUTRA, Putra, 5500 AH Veldhoven, NL; ELBATTAY, Khalid, 5500 AH Veldhoven, NL; DERWIN, Paul, 5500 AH Veldhoven, NL; WERKMAN, Roy, 5500 AH Veldhoven, NL; JENSEN, Erik, 5500 AH Veldhoven, NL; YU, Hyun-Woo, 5500 AH Veldhoven, NL; SARMA, Gautam, 5500 AH Veldhoven, NL
Address for service ASML Netherlands B.V., 5500 AH Veldhoven, NL
33
31
32
Foreign priorityPRC
PRNA
PRDA
EP
20173733
May 8, 2020
33
31
32
Foreign priorityPRC
PRNA
PRDA
EP
19176024
May 22, 2019
Due dateFT
FG		May 31, 2026
Annual fee for the 7th year Patent fees
Patent division in charge 51
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Published EP/WO documentsEPWOPNOriginal document: EP000003973358A1
Searchable text: EP000003973358A1
Original document: EP000003973358B1
Searchable text: EP000003973358B1
Original document: WO002020234028
Searchable text: WO002020234028
43Date of first publicationEVTNov 26, 2020
Date of the first transfer into DPMAregisterEREGTMar 30, 2022
Date of the (most recent) update in DPMAregisterREGTJun 12, 2025
(Show all update days)(Hide all update days)
  • Jun 12, 2025
    • Due date: changed
  • Jun 10, 2025
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 05.07.2023: new
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 05.07.2023: deleted
  • Jan 23, 2025
    • St.36: changed (technical change)
  • Nov 27, 2024
    • St.36: changed (technical change)
  • Aug 15, 2024
    • St.36: changed (technical change)
  • Mar 30, 2022
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to PCT application WO publication Nov 26, 2020  Details anzeigen
2 Procedure relating to EP application EPO 1st publication Mar 30, 2022  Details anzeigen
3 Publications Publication of a mention regarding EP 1st publication by DPMA May 12, 2022 May 12, 2022 Details anzeigen
4 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Jul 5, 2023  Details anzeigen
5 Publications Publication by DPMA of mention regarding EP patent grant Jul 27, 2023 Jul 27, 2023 Details anzeigen
6 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Apr 8, 2024 Jun 27, 2024 Details anzeigen
View procedures Procedure relating to PCT application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO publication
Date of legal/procedural statusVSTTNov 26, 2020
Date of update of the procedureREGTJun 15, 2023
View procedures Procedure relating to EP application (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTMar 30, 2022
Date of update of the procedureREGTMar 30, 2022
View procedures Publications (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTMay 12, 2022
Issue numberHN19
YearPJ2022
Publication dateVTMay 12, 2022
Type of publicationPARTBibliographic data
Date of update of the procedureREGTMar 30, 2022
View procedures Procedure relating to EP application (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTJul 5, 2023
Date of update of the procedureREGTJun 10, 2025
View procedures Publications (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTJul 27, 2023
Issue numberHN30
YearPJ2023
Publication dateVTJul 27, 2023
Type of publicationPARTBibliographic data
PartHTPart 5
Date of update of the procedureREGTJul 27, 2023
View procedures Procedure relating to EP application (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTApr 8, 2024
Issue numberHN26
YearPJ2024
Publication dateVTJun 27, 2024
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTJun 6, 2024