Register information Patent

DE file number : 60 2019 045 834.7 (Status: pending/in force, Query started: April 24, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2019 045 834.7
96EP file numberEAKZ19 90 2588.3
86WO file numberWAKZPCT/JP2019/043353
97EP publication numberEPN3890002
87WO publication numberWPN2020137173
54Designation/titleTISUBSTRATANALYSEVERFAHREN UND SUBSTRATANALYSEVORRICHTUNG
51IPC main classICM
(ICMV)		 H01L 21/66 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 G01N 1/28 (2006.01), G01N 1/32 (2006.01), G01N 21/94 (2006.01), G01N 21/95 (2006.01), G01N 35/10 (2006.01)
22DE application dateDATNov 6, 2019
96EP application dateEATNov 6, 2019
86WO application dateWATNov 6, 2019
43Date of first publicationOTJul 2, 2020
Date of publication of grantPETJan 24, 2024
71/73Applicant/ownerINHIas Inc., Hino-shi, Tokyo, JP
72InventorINKAWABATA, Katsuhiko, Hino-shi, Tokyo 191-0011, JP; LEE, Sungjae, Hino-shi, Tokyo 191-0011, JP; HAYASHI, Takuma, Hino-shi, Tokyo 191-0011, JP
74RepresentativeVTRWeickmann & Weickmann Patent- und Rechtsanwälte PartmbB, 81679 München, DE
Address for service Weickmann & Weickmann Patent- und Rechtsanwälte PartmbB, 81679 München, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
JP
2018242929
Dec 26, 2018
Due dateFT
FG		Nov 30, 2025
Annual fee for the 7th year Patent fees
Patent division in charge 33
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Published EP/WO documentsEPWOPNOriginal document: EP000003890002A1
Searchable text: EP000003890002A1
Original document: EP000003890002B1
Searchable text: EP000003890002B1
Original document: WO002020137173
Searchable text: WO002020137173
43Date of first publicationEVTJul 2, 2020
Date of the first transfer into DPMAregisterEREGTOct 6, 2021
Date of the (most recent) update in DPMAregisterREGTJan 9, 2025
(Show all update days)(Hide all update days)
  • Jan 9, 2025
    • Procedures: Procedure relating to EP application, Grant has become final, 25.10.2024: changed
  • Dec 5, 2024
    • Procedures: Procedure relating to EP application, Grant has become final, 25.10.2024: new
  • Nov 29, 2024
    • Due date: changed
  • Jul 18, 2024
    • St.36: changed (technical change)
  • May 3, 2024; Mar 1, 2024; Feb 15, 2024; Jan 5, 2024; Jan 4, 2024; Sep 28, 2023; Jun 15, 2023
    • Historical data not available for this/these date(s)
  • Oct 6, 2021
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to PCT application WO publication Jul 2, 2020  Details anzeigen
2 Procedure relating to EP application EPO 1st publication Oct 6, 2021  Details anzeigen
3 Publications Publication of a mention regarding EP 1st publication by DPMA Nov 18, 2021 Nov 18, 2021 Details anzeigen
4 Change of classification Change of IPC main class May 30, 2023  Details anzeigen
5 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Jan 24, 2024  Details anzeigen
6 Publications Publication by DPMA of mention regarding EP patent grant Feb 15, 2024 Feb 15, 2024 Details anzeigen
7 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Oct 25, 2024 Jan 9, 2025 Details anzeigen
View procedures Procedure relating to PCT application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO publication
Date of legal/procedural statusVSTTJul 2, 2020
Date of update of the procedureREGTOct 6, 2021
View procedures Procedure relating to EP application (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTOct 6, 2021
Date of update of the procedureREGTOct 6, 2021
View procedures Publications (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTNov 18, 2021
Issue numberHN46
YearPJ2021
Publication dateVTNov 18, 2021
Type of publicationPARTBibliographic data
Date of update of the procedureREGTOct 6, 2021
View procedures Change of classification (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTChange of classification
Legal/procedural statusVSTChange of IPC main class
Date of legal/procedural statusVSTTMay 30, 2023
51IPC main classICM
(ICMV)		 H01L 21/66 (2006.01)
51Previous IPC main classICMF
(ICMVF)		 H01L 21/66 (2006.01)
Date of update of the procedureREGTJun 15, 2023
View procedures Procedure relating to EP application (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTJan 24, 2024
Date of update of the procedureREGTJan 4, 2024
View procedures Publications (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTFeb 15, 2024
Issue numberHN7
YearPJ2024
Publication dateVTFeb 15, 2024
Type of publicationPARTBibliographic data
PartHTPart 5
Date of update of the procedureREGTFeb 15, 2024
View procedures Procedure relating to EP application (No.: 7)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTOct 25, 2024
Issue numberHN2
YearPJ2025
Publication dateVTJan 9, 2025
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTJan 9, 2025