Register information Patent

DE file number : 60 2019 015 496.8 (Status: pending/in force, Query started: July 15, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2019 015 496.8
96EP file numberEAKZ19 80 1044.9
86WO file numberWAKZPCT/EP2019/081282
97EP publication numberEPN3899662
87WO publication numberWPN2020126242
54Designation/titleTIVERFAHREN ZUR STEUERUNG EINES HERSTELLUNGSVERFAHRENS UND ZUGEHÖRIGE VORRICHTUNGEN
51IPC main classICM
(ICMV)		 G03F 7/20 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 G03F 9/00 (2006.01)
22DE application dateDATNov 14, 2019
96EP application dateEATNov 14, 2019
86WO application dateWATNov 14, 2019
43Date of first publicationOTJun 25, 2020
Date of publication of grantPETJun 1, 2022
71/73Applicant/ownerINHASML Netherlands B.V., Veldhoven, NL
72InventorINBRANTJES, Nicolaas Petrus Marcus, 5500 AH Veldhoven, NL; COX, Matthijs, 5500 AH Veldhoven, NL; MENCHTCHIKOV, Boris, San Jose, CA 95131, US; TABERY, Cyrus, Emil, San Jose, CA 95131, US; ZHANG, Youping, San Jose, CA 95131, US; ZOU, Yi, San Jose, CA 95131, US; LIN, Chenxi, San Jose, CA 95131, US; CHENG, Yana, San Jose, CA 95131, US; HASTINGS, Simon, Philip, Spencer, San Jose, CA 95131, US; GENIN, Maxime, Philippe, Frederic, San Jose, CA 95131, US
Address for service ASML Netherlands B.V., 5500 AH Veldhoven, NL
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
201962802866 P
Feb 8, 2019
33
31
32
Foreign priorityPRC
PRNA
PRDA
EP
18214013
Dec 19, 2018
Due dateFT
FG		Nov 30, 2025
Annual fee for the 7th year Patent fees
Patent division in charge 51
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Published EP/WO documentsEPWOPNOriginal document: EP000003899662A1
Searchable text: EP000003899662A1
Original document: EP000003899662B1
Searchable text: EP000003899662B1
Original document: WO002020126242
Searchable text: WO002020126242
43Date of first publicationEVTJun 25, 2020
Date of the first transfer into DPMAregisterEREGTOct 27, 2021
Date of the (most recent) update in DPMAregisterREGTDec 10, 2024
(Show all update days)(Hide all update days)
  • Dec 10, 2024
    • Due date: changed
  • Nov 27, 2024
    • St.36: changed (technical change)
  • Oct 10, 2024
    • St.36: changed (technical change)
  • May 30, 2024; May 2, 2024; Feb 22, 2024; Dec 7, 2023; Apr 27, 2023; Apr 13, 2023; Dec 9, 2022; Jun 23, 2022; May 17, 2022; May 12, 2022
    • Historical data not available for this/these date(s)
  • Oct 27, 2021
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to PCT application WO publication Jun 25, 2020  Details anzeigen
2 Procedure relating to EP application EPO 1st publication Oct 27, 2021  Details anzeigen
3 Publications Publication of a mention regarding EP 1st publication by DPMA Dec 9, 2021 Dec 9, 2021 Details anzeigen
4 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Jun 1, 2022  Details anzeigen
5 Publications Publication by DPMA of mention regarding EP patent grant Jun 23, 2022 Jun 23, 2022 Details anzeigen
6 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Mar 2, 2023 May 17, 2023 Details anzeigen
View procedures Procedure relating to PCT application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO publication
Date of legal/procedural statusVSTTJun 25, 2020
Date of update of the procedureREGTMay 12, 2022
View procedures Procedure relating to EP application (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTOct 27, 2021
Date of update of the procedureREGTOct 27, 2021
View procedures Publications (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTDec 9, 2021
Issue numberHN49
YearPJ2021
Publication dateVTDec 9, 2021
Type of publicationPARTBibliographic data
Date of update of the procedureREGTOct 27, 2021
View procedures Procedure relating to EP application (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTJun 1, 2022
Date of update of the procedureREGTMay 12, 2022
View procedures Publications (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTJun 23, 2022
Issue numberHN25
YearPJ2022
Publication dateVTJun 23, 2022
Type of publicationPARTBibliographic data
PartHTPart 5
Date of update of the procedureREGTJun 23, 2022
View procedures Procedure relating to EP application (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTMar 2, 2023
Issue numberHN20
YearPJ2023
Publication dateVTMay 17, 2023
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTApr 27, 2023