Master data| INID | Criterion | Field | Content |
|---|
| Type of IP right | SART | Patent |
| Status | ST | Pending/in force |
| 21 | DE file number | DAKZ | 60 2019 015 496.8 |
| 96 | EP file number | EAKZ | 19 80 1044.9 |
| 86 | WO file number | WAKZ | PCT/EP2019/081282 |
| 97 | EP publication number | EPN | 3899662 |
| 87 | WO publication number | WPN | 2020126242 |
| 54 | Designation/title | TI | VERFAHREN ZUR STEUERUNG EINES HERSTELLUNGSVERFAHRENS UND ZUGEHÖRIGE VORRICHTUNGEN |
| 51 | IPC main class | ICM
(ICMV) | G03F 7/20 (2006.01) |
| 51 | IPC secondary class(es) | ICS
(ICSV) | G03F 9/00 (2006.01) |
| 22 | DE application date | DAT | Nov 14, 2019 |
| 96 | EP application date | EAT | Nov 14, 2019 |
| 86 | WO application date | WAT | Nov 14, 2019 |
| 43 | Date of first publication | OT | Jun 25, 2020 |
| Date of publication of grant | PET | Jun 1, 2022 |
| 71/73 | Applicant/owner | INH | ASML Netherlands B.V., Veldhoven, NL |
| 72 | Inventor | IN | BRANTJES, Nicolaas Petrus Marcus, 5500 AH Veldhoven, NL; COX, Matthijs, 5500 AH Veldhoven, NL; MENCHTCHIKOV, Boris, San Jose, CA 95131, US; TABERY, Cyrus, Emil, San Jose, CA 95131, US; ZHANG, Youping, San Jose, CA 95131, US; ZOU, Yi, San Jose, CA 95131, US; LIN, Chenxi, San Jose, CA 95131, US; CHENG, Yana, San Jose, CA 95131, US; HASTINGS, Simon, Philip, Spencer, San Jose, CA 95131, US; GENIN, Maxime, Philippe, Frederic, San Jose, CA 95131, US |
| Address for service | | ASML Netherlands B.V., 5500 AH Veldhoven, NL |
33
31
32
| Foreign priority | PRC
PRNA
PRDA
| EP
18214013
Dec 19, 2018
|
33
31
32
| Foreign priority | PRC
PRNA
PRDA
| US
201962802866 P
Feb 8, 2019
|
| Due date | FT
FG | Nov 30, 2024
Annual fee for the 6th year
Patent fees |
| Patent division in charge | | 51 |
| 97 | EP language of publication | ELANG | EN - Englisch |
| 84 | Designated EP contracting states | EDS | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR |
| Published EP/WO documents | EPWOPN | Original document:
EP000003899662A1
Searchable text:
EP000003899662A1
Original document:
EP000003899662B1
Searchable text:
EP000003899662B1
Original document:
WO002020126242
Searchable text:
WO002020126242 |
| 43 | Date of first publication | EVT | Jun 25, 2020 |
| Date of the first transfer into DPMAregister | EREGT | Oct 27, 2021 |
| Date of the (most recent) update in DPMAregister | REGT | May 30, 2024
(Show all update days)(Hide all update days)- May 30, 2024; May 2, 2024; Feb 22, 2024; Dec 7, 2023; Apr 27, 2023; Apr 13, 2023; Dec 9, 2022; Jun 23, 2022; May 17, 2022; May 12, 2022
- Historical data not available for this/these date(s)
- Oct 27, 2021
- Date of the first transfer into DPMAregister
|
