Register information Patent

DE file number : 60 2019 053 492.2 (Status: pending/in force, Query started: April 24, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2019 053 492.2
96EP file numberEAKZ19 20 6672.8
97EP publication numberEPN3647384
54Designation/titleTIUNTERDRÜCKUNG DER SIN-ENTFERNUNGSRATEN UND REDUZIERUNG DES OXID-TRENCH-DISHING FÜR PROZESS DER FLACHGRABENISOLATION (STI)
51IPC main classICM
(ICMV)		 C09G 1/02 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 C09K 3/14 (2006.01), H01L 21/3105 (2006.01)
22DE application dateDATOct 31, 2019
96EP application dateEATOct 31, 2019
43Date of first publicationOTMay 6, 2020
Date of publication of grantPETJun 12, 2024
71/73Applicant/ownerINHVersum Materials US, LLC, Tempe, AZ, US
72InventorINSHI, Xiaobo, Tempe, Arizona 85284, US; MURELLA, Krishna P., Tempe, Arizona 85284, US; ROSE, Joseph D, Tempe, Arizona 85284, US; ZHOU, Hongjun, Tempe, Arizona 85284, US; O'NEILL, Mark Leonard, Tempe, Arizona 85284, US
Address for service METIDA, 01109 Vilnius, LT
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
201916664924
Oct 27, 2019
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
201862753431 P
Oct 31, 2018
Due dateFT
FG		Oct 31, 2025
Annual fee for the 7th year Patent fees
Patent division in charge 43
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Published EP/WO documentsEPWOPNOriginal document: EP000003647384A1
Searchable text: EP000003647384A1
Original document: EP000003647384B1
Searchable text: EP000003647384B1
43Date of first publicationEVTMay 6, 2020
Date of the first transfer into DPMAregisterEREGTMay 6, 2020
Date of the (most recent) update in DPMAregisterREGTFeb 6, 2025
(Show all update days)(Hide all update days)
  • Feb 6, 2025
    • St.36: changed (technical change)
  • Dec 19, 2024
    • St.36: changed (technical change)
  • Oct 24, 2024
    • St.36: changed (technical change)
  • Sep 11, 2024
    • Due date: changed
  • Jun 25, 2024; May 23, 2024; Nov 9, 2023
    • Historical data not available for this/these date(s)
  • May 6, 2020
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to EP application EPO 1st publication May 6, 2020  Details anzeigen
2 Publications Publication of a mention regarding EP 1st publication by DPMA Jun 18, 2020 Jun 18, 2020 Details anzeigen
3 Change of classification Change of IPC main class Oct 26, 2023  Details anzeigen
4 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Jun 12, 2024  Details anzeigen
5 Publications Publication by DPMA of mention regarding EP patent grant Jun 27, 2024 Jun 27, 2024 Details anzeigen
View procedures Procedure relating to EP application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTMay 6, 2020
View procedures Publications (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTJun 18, 2020
Issue numberHN25
YearPJ2020
Publication dateVTJun 18, 2020
Type of publicationPARTBibliographic data
View procedures Change of classification (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTChange of classification
Legal/procedural statusVSTChange of IPC main class
Date of legal/procedural statusVSTTOct 26, 2023
51IPC main classICM
(ICMV)		 C09G 1/02 (2006.01)
51Previous IPC main classICMF
(ICMVF)		 C09G 1/02 (2006.01)
Date of update of the procedureREGTNov 9, 2023
View procedures Procedure relating to EP application (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTJun 12, 2024
Date of update of the procedureREGTMay 23, 2024
View procedures Publications (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTJun 27, 2024
Issue numberHN26
YearPJ2024
Publication dateVTJun 27, 2024
Type of publicationPARTBibliographic data
PartHTPart 5
Date of update of the procedureREGTJun 25, 2024