Master dataINID | Criterion | Field | Content |
---|
| Type of IP right | SART | Patent |
| Status | ST | Pending/in force |
21 | DE file number | DAKZ | 60 2019 041 785.3 |
96 | EP file number | EAKZ | 19 18 3705.3 |
97 | EP publication number | EPN | 3587525 |
54 | Designation/title | TI | CHEMISCH-MECHANISCHES POLIEREN FÜR NIEDRIGES OXID-TRENCH-DISHING |
51 | IPC main class | ICM (ICMV) | C09G 1/02 (2006.01) |
51 | IPC secondary class(es) | ICS (ICSV) | H01L 21/3105 (2006.01) |
22 | DE application date | DAT | Jul 1, 2019 |
96 | EP application date | EAT | Jul 1, 2019 |
43 | Date of first publication | OT | Jan 1, 2020 |
| Date of publication of grant | PET | Nov 22, 2023 |
71/73 | Applicant/owner | INH | Versum Materials US, LLC, Tempe, AZ, US |
72 | Inventor | IN | Shi, Xiaobo, Tempe, Arizona 85284, US; MURELLA, Krishna, P., Tempe, Arizona 85284, US; ROSE, Joseph, D., Tempe, Arizona 85284, US; ZHOU, Hongjun, Tempe, Arizona 85284, US; O'NEILL, Mark, Leonard, Tempe, Arizona 85284, US |
74 | Representative | VTR | Stolmár & Partner Patentanwälte PartG mbB, 80331 München, DE |
| Address for service | | Stolmár & Partner Patentanwälte PartG mbB, 80331 München, DE |
33 31 32
| Foreign priority | PRC PRNA PRDA
| US 201916450784 Jun 24, 2019
|
33 31 32
| Foreign priority | PRC PRNA PRDA
| US 201862692639 P Jun 29, 2018
|
33 31 32
| Foreign priority | PRC PRNA PRDA
| US 201862692633 P Jun 29, 2018
|
| Due date | FT FG | Jul 31, 2025 Annual fee for the 7th year
Patent fees |
| Patent division in charge | | 43 |
97 | EP language of publication | ELANG | EN - Englisch |
84 | Designated EP contracting states | EDS | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR |
| Published EP/WO documents | EPWOPN | Original document:
EP000003587525A1 Searchable text:
EP000003587525A1 Original document:
EP000003587525B1 Searchable text:
EP000003587525B1 |
43 | Date of first publication | EVT | Jan 1, 2020 |
| Date of the first transfer into DPMAregister | EREGT | Jan 1, 2020 |
| Date of the (most recent) update in DPMAregister | REGT | Apr 3, 2025 (Show all update days)(Hide all update days)- Apr 3, 2025
- St.36: changed (technical change)
- Feb 20, 2025
- St.36: changed (technical change)
- Nov 14, 2024
- St.36: changed (technical change)
- Nov 5, 2024
- Procedures: Procedure relating to EP application, Grant has become final, 23.08.2024: changed
- Oct 10, 2024
- Procedures: Procedure relating to EP application, Grant has become final, 23.08.2024: new
- Aug 15, 2024
- St.36: changed (technical change)
- Aug 7, 2024
- St.36: changed (technical change)
- Aug 1, 2024
- St.36: changed (technical change)
- Jul 25, 2024
- St.36: changed (technical change)
- Jun 12, 2024; Jun 6, 2024; May 30, 2024; May 16, 2024; May 2, 2024; Apr 25, 2024; Nov 14, 2023; Nov 10, 2023; Oct 28, 2023; Oct 26, 2023; Aug 17, 2023
- Historical data not available for this/these date(s)
- Jan 1, 2020
- Date of the first transfer into DPMAregister
|