Master dataINID | Criterion | Field | Content |
---|
| Type of IP right | SART | Patent |
| Status | ST | Pending/in force |
21 | DE file number | DAKZ | 60 2019 012 263.2 |
96 | EP file number | EAKZ | 19 16 8714.4 |
97 | EP publication number | EPN | 3553811 |
54 | Designation/title | TI | PHOTOLACKENTFERNER |
51 | IPC main class | ICM (ICMV) | H01L 21/311 (2006.01) |
51 | IPC secondary class(es) | ICS (ICSV) | G03F 7/42 (2006.01) |
22 | DE application date | DAT | Apr 11, 2019 |
96 | EP application date | EAT | Apr 11, 2019 |
43 | Date of first publication | OT | Oct 16, 2019 |
| Date of publication of grant | PET | Mar 9, 2022 |
71/73 | Applicant/owner | INH | Versum Materials US, LLC, Tempe, AZ, US |
72 | Inventor | IN | Peters, Richard Dalton, Tempe, AZ 85284-2601, US; CAO, Yuanmei, Tempe, AZ 85284-2601, US |
74 | Representative | VTR | ANDREA SOMMER Patentanwälte Partnerschaft mbB, 80336 München, DE |
| Address for service | | ANDREA SOMMER Patentanwälte Partnerschaft mbB, 80336 München, DE |
33 31 32
| Foreign priority | PRC PRNA PRDA
| US 201862656843 P Apr 12, 2018
|
33 31 32
| Foreign priority | PRC PRNA PRDA
| US 201916365506 Mar 26, 2019
|
| Due date | FT FG | Apr 30, 2026 Annual fee for the 8th year
Patent fees |
| Patent division in charge | | 33 |
97 | EP language of publication | ELANG | EN - Englisch |
84 | Designated EP contracting states | EDS | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR |
| Published EP/WO documents | EPWOPN | Original document:
EP000003553811A1 Searchable text:
EP000003553811A1 Original document:
EP000003553811B1 Searchable text:
EP000003553811B1 |
43 | Date of first publication | EVT | Oct 16, 2019 |
| Date of the first transfer into DPMAregister | EREGT | Oct 16, 2019 |
| Date of the (most recent) update in DPMAregister | REGT | Apr 17, 2025 (Show all update days)(Hide all update days)- Apr 17, 2025
- Procedures: Procedure relating to EP application, EPO publication of mention of grant , 09.03.2022: new
- Procedures: Procedure relating to EP application, EPO publication of mention of grant , 09.03.2022: deleted
- Mar 28, 2025
- Oct 10, 2024
- St.36: changed (technical change)
- Jun 27, 2024; May 7, 2024; Apr 25, 2024; Mar 13, 2024; Mar 14, 2023; Feb 9, 2023; Jan 26, 2023; May 25, 2022; May 7, 2022; Mar 31, 2022; Feb 18, 2022; Feb 17, 2022
- Historical data not available for this/these date(s)
- Oct 16, 2019
- Date of the first transfer into DPMAregister
|