Master dataINID | Criterion | Field | Content |
---|
| Type of IP right | SART | Patent |
| Status | ST | Pending/in force |
21 | DE file number | DAKZ | 60 2019 033 851.1 |
96 | EP file number | EAKZ | 19 16 1776.0 |
97 | EP publication number | EPN | 3537474 |
54 | Designation/title | TI | PHOTOLACKENTFERNER |
51 | IPC main class | ICM (ICMV) | H01L 21/311 (2006.01) |
51 | IPC secondary class(es) | ICS (ICSV) | G03F 7/42 (2006.01) |
22 | DE application date | DAT | Mar 9, 2019 |
96 | EP application date | EAT | Mar 9, 2019 |
43 | Date of first publication | OT | Sep 11, 2019 |
| Date of publication of grant | PET | Aug 2, 2023 |
71/73 | Applicant/owner | INH | Versum Materials US, LLC, Tempe, AZ, US |
72 | Inventor | IN | CAO, Yuanmei, Carmel, IN 46033, US; Phenis, Michael T., Markleville, IN 46056, US; DALTON, Richard Peters, Westfield, IN 46074, US |
74 | Representative | VTR | ANDREA SOMMER Patentanwälte Partnerschaft mbB, 80336 München, DE |
| Address for service | | ANDREA SOMMER Patentanwälte Partnerschaft mbB, 80336 München, DE |
33 31 32
| Foreign priority | PRC PRNA PRDA
| US 201916286808 Feb 27, 2019
|
| Due date | FT FG | Mar 31, 2026 Annual fee for the 8th year
Patent fees |
| Patent division in charge | | 33 |
97 | EP language of publication | ELANG | EN - Englisch |
84 | Designated EP contracting states | EDS | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR |
| Published EP/WO documents | EPWOPN | Original document:
EP000003537474A1 Searchable text:
EP000003537474A1 Original document:
EP000003537474B1 Searchable text:
EP000003537474B1 |
43 | Date of first publication | EVT | Sep 11, 2019 |
| Date of the first transfer into DPMAregister | EREGT | Sep 11, 2019 |
| Date of the (most recent) update in DPMAregister | REGT | Apr 17, 2025 (Show all update days)(Hide all update days)- Apr 17, 2025
- Procedures: Procedure relating to EP application, EPO publication of mention of grant , 02.08.2023: new
- Procedures: Procedure relating to EP application, EPO publication of mention of grant , 02.08.2023: deleted
- Jan 16, 2025
- Jul 25, 2024
- Procedures: Procedure relating to EP application, Grant has become final, 03.05.2024: changed
- Jun 20, 2024; May 9, 2024; Jan 17, 2024; Aug 4, 2023; Jul 13, 2023; Jul 6, 2023
- Historical data not available for this/these date(s)
- Sep 11, 2019
- Date of the first transfer into DPMAregister
|