Register information Patent

DE file number : 60 2018 055 156.5 (Status: pending/in force, Query started: May 1, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2018 055 156.5
96EP file numberEAKZ18 83 1823.2
86WO file numberWAKZPCT/US2018/037539
97EP publication numberEPN3652778
87WO publication numberWPN2019013920
54Designation/titleTIGASZUFUHRSYSTEM FÜR HOCHDRUCKPROZESSKAMMER
51IPC main classICM
(ICMV)		 H01L 21/67 (2006.01)
22DE application dateDATJun 14, 2018
96EP application dateEATJun 14, 2018
86WO application dateWATJun 14, 2018
43Date of first publicationOTJan 17, 2019
Date of publication of grantPETAug 9, 2023
71/73Applicant/ownerINHMicromaterials LLC, Wilmington, DE, US
72InventorINKHAN, Adib, Santa Clara California 95054, US; LIANG, Qiwei, Fremont California 94536, US; MALIK, Sultan, Sacramento California 95834, US; WONG, Keith Tatseun, Los Gatos California 95032, US; NEMANI, Srinivas D., Sunnyvale California 94087, US
74RepresentativeVTRZimmermann & Partner Patentanwälte mbB, 80331 München, DE
Address for service Zimmermann & Partner Patentanwälte mbB, 80069 München, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
201762532715 P
Jul 14, 2017
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
201715835378
Dec 7, 2017
Due dateFT
FG		Jun 30, 2025
Annual fee for the 8th year Patent fees
Patent division in charge 36
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Published EP/WO documentsEPWOPNOriginal document: EP000003652778A1
Searchable text: EP000003652778A1
Original document: EP000003652778B1
Searchable text: EP000003652778B1
Original document: WO002019013920
Searchable text: WO002019013920
43Date of first publicationEVTJan 17, 2019
Date of the first transfer into DPMAregisterEREGTMay 20, 2020
Date of the (most recent) update in DPMAregisterREGTAug 1, 2024
(Show all update days)(Hide all update days)
  • Aug 1, 2024
    • St.36: changed (technical change)
  • Jul 9, 2024; Jun 27, 2024; Jun 6, 2024; May 28, 2024; May 23, 2024; May 9, 2024; Apr 25, 2024; Feb 22, 2024; Feb 8, 2024; Feb 1, 2024; Aug 26, 2023; Aug 25, 2023; Jul 22, 2023; Jul 20, 2023
    • Historical data not available for this/these date(s)
  • May 20, 2020
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to PCT application WO publication Jan 17, 2019  Details anzeigen
2 Procedure relating to EP application EPO 1st publication May 20, 2020  Details anzeigen
3 Publications Publication of a mention regarding EP 1st publication by DPMA Jul 2, 2020 Jul 2, 2020 Details anzeigen
4 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Aug 9, 2023  Details anzeigen
5 Publications Publication by DPMA of mention regarding EP patent grant Aug 31, 2023 Aug 31, 2023 Details anzeigen
6 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision May 13, 2024 Aug 1, 2024 Details anzeigen
View procedures Procedure relating to PCT application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO publication
Date of legal/procedural statusVSTTJan 17, 2019
Date of update of the procedureREGTJul 20, 2023
View procedures Procedure relating to EP application (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTMay 20, 2020
View procedures Publications (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTJul 2, 2020
Issue numberHN27
YearPJ2020
Publication dateVTJul 2, 2020
Type of publicationPARTBibliographic data
View procedures Procedure relating to EP application (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTAug 9, 2023
Date of update of the procedureREGTJul 20, 2023
View procedures Publications (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTAug 31, 2023
Issue numberHN35
YearPJ2023
Publication dateVTAug 31, 2023
Type of publicationPARTBibliographic data
PartHTPart 5
Date of update of the procedureREGTAug 25, 2023
View procedures Procedure relating to EP application (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTMay 13, 2024
Issue numberHN31
YearPJ2024
Publication dateVTAug 1, 2024
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTJul 9, 2024