Register information Patent

DE file number : 60 2018 026 172.9 (Status: pending/in force, Query started: September 26, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2018 026 172.9
96EP file numberEAKZ18 78 9218.7
86WO file numberWAKZPCT/IB2018/057310
97EP publication numberEPN3685430
87WO publication numberWPN2019058325
54Designation/titleTIANORDNUNG ZUR ABSCHEIDUNG VON SILIZIUM-NANOSTRUKTUREN
51IPC main classICM
(ICMV)		 H01L 21/67 (2006.01)
22DE application dateDATSep 21, 2018
96EP application dateEATSep 21, 2018
86WO application dateWATSep 21, 2018
43Date of first publicationOTMar 28, 2019
Date of publication of grantPETNov 3, 2021
71/73Applicant/ownerINHUniversita' degli Studi di Roma "La Sapienza", Roma, IT
72InventorINPALMA, Fabrizio, 00185 Roma, IT
74RepresentativeVTRBCKIP Choi Ko Patentanwälte und European Patent Attorneys Partnerschaft mbB, 80339 München, DE
Address for service BCKIP Choi Ko Patentanwälte und European Patent Attorneys Partnerschaft mbB, 80339 München, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
IT
201700106479
Sep 22, 2017
Due dateFT
FG		Sep 30, 2025
Annual fee for the 8th year Patent fees
Patent division in charge 36
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Published EP/WO documentsEPWOPNOriginal document: EP000003685430A1
Searchable text: EP000003685430A1
Original document: EP000003685430B1
Searchable text: EP000003685430B1
Original document: WO002019058325
Searchable text: WO002019058325
43Date of first publicationEVTMar 28, 2019
Date of the first transfer into DPMAregisterEREGTJul 29, 2020
Date of the (most recent) update in DPMAregisterREGTDec 4, 2024
(Show all update days)(Hide all update days)
  • Dec 4, 2024
    • Representative: changed
    • Address for service: changed
  • Oct 8, 2024
    • Due date: changed
  • Jun 13, 2024; May 2, 2024; Oct 6, 2023; Jan 14, 2023; Oct 8, 2022; Oct 7, 2022; Sep 22, 2022; Jan 26, 2022; Nov 18, 2021; Oct 14, 2021
    • Historical data not available for this/these date(s)
  • Jul 29, 2020
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to PCT application WO publication Mar 28, 2019  Details anzeigen
2 Procedure relating to EP application EPO 1st publication Jul 29, 2020  Details anzeigen
3 Publications Publication of a mention regarding EP 1st publication by DPMA Sep 10, 2020 Sep 10, 2020 Details anzeigen
4 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Nov 3, 2021  Details anzeigen
5 Publications Publication by DPMA of mention regarding EP patent grant Nov 18, 2021 Nov 18, 2021 Details anzeigen
6 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Aug 4, 2022 Oct 27, 2022 Details anzeigen
View procedures Procedure relating to PCT application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO publication
Date of legal/procedural statusVSTTMar 28, 2019
Date of update of the procedureREGTOct 14, 2021
View procedures Procedure relating to EP application (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTJul 29, 2020
Date of update of the procedureREGTJul 29, 2020
View procedures Publications (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTSep 10, 2020
Issue numberHN37
YearPJ2020
Publication dateVTSep 10, 2020
Type of publicationPARTBibliographic data
Date of update of the procedureREGTJul 29, 2020
View procedures Procedure relating to EP application (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTNov 3, 2021
Date of update of the procedureREGTOct 14, 2021
View procedures Publications (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTNov 18, 2021
Issue numberHN46
YearPJ2021
Publication dateVTNov 18, 2021
Type of publicationPARTBibliographic data
PartHTPart 5
Date of update of the procedureREGTNov 18, 2021
View procedures Procedure relating to EP application (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTAug 4, 2022
Issue numberHN43
YearPJ2022
Publication dateVTOct 27, 2022
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTOct 7, 2022