Register information Patent

DE file number : 60 2017 073 913.8 (Status: pending/in force, Query started: May 8, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2017 073 913.8
96EP file numberEAKZ17 83 5182.1
86WO file numberWAKZPCT/US2017/043890
97EP publication numberEPN3491167
87WO publication numberWPN2018022719
54Designation/titleTIZUSAMMENSETZUNGEN UND VERFAHREN MIT VERWENDUNG DAVON FÜR KOHLENSTOFFDOTIERTE SILICIUMHALTIGE FILME
51IPC main classICM
(ICMV)		 H01L 21/02 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 C23C 16/34 (2006.01), C23C 16/36 (2006.01), C23C 16/455 (2006.01), C23C 16/40 (2006.01), C23C 16/30 (2006.01), C23C 16/56 (2006.01)
22DE application dateDATJul 26, 2017
96EP application dateEATJul 26, 2017
86WO application dateWATJul 26, 2017
43Date of first publicationOTFeb 1, 2018
Date of publication of grantPETSep 6, 2023
71/73Applicant/ownerINHVersum Materials US, LLC, Tempe, AZ, US
72InventorINCHANDRA, Haripin, San Marcos CA 92078, US; LEI, Xinjian, Vista CA 92081, US; MALLIKARJUNAN, Anupama, San Marcos CA 92078, US; KIM, Moo-Sung, Sungnam Gyunggi-Do 13602, KR
74RepresentativeVTRStolmár & Partner Patentanwälte PartG mbB, 80331 München, DE
Address for service Stolmár & Partner Patentanwälte PartG mbB, 80331 München, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
201715654426
Jul 19, 2017
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
201662367260 P
Jul 27, 2016
Due dateFT
FG		Jul 31, 2025
Annual fee for the 9th year Patent fees
Patent division in charge 33
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Published EP/WO documentsEPWOPNOriginal document: EP000003491167A1
Searchable text: EP000003491167A1
Original document: EP000003491167B1
Searchable text: EP000003491167B1
Original document: WO002018022719
Searchable text: WO002018022719
43Date of first publicationEVTFeb 1, 2018
Date of the first transfer into DPMAregisterEREGTJun 5, 2019
Date of the (most recent) update in DPMAregisterREGTAug 7, 2024
(Show all update days)(Hide all update days)
  • Aug 7, 2024
    • Procedures: Procedure relating to EP application, Grant has become final, 07.06.2024: changed
  • Jul 25, 2024
    • Procedures: Procedure relating to EP application, Grant has become final, 07.06.2024: new
  • Jun 12, 2024; Jun 6, 2024; May 30, 2024; May 16, 2024; May 2, 2024; Apr 25, 2024; Mar 14, 2024; Feb 22, 2024; Feb 8, 2024; Feb 1, 2024; Oct 5, 2023; Sep 21, 2023; Aug 17, 2023; Mar 16, 2023; Aug 23, 2019
    • Historical data not available for this/these date(s)
  • Jun 5, 2019
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to PCT application WO publication Feb 1, 2018  Details anzeigen
2 Procedure relating to EP application EPO 1st publication Jun 5, 2019  Details anzeigen
3 Publications Publication of a mention regarding EP 1st publication by DPMA Jul 18, 2019 Jul 18, 2019 Details anzeigen
4 Change of classification Change of IPC main class Nov 27, 2019  Details anzeigen
5 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Sep 6, 2023  Details anzeigen
6 Publications Publication by DPMA of mention regarding EP patent grant Sep 21, 2023 Sep 21, 2023 Details anzeigen
7 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Jun 7, 2024 Aug 29, 2024 Details anzeigen
View procedures Procedure relating to PCT application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO publication
Date of legal/procedural statusVSTTFeb 1, 2018
Date of update of the procedureREGTAug 17, 2023
View procedures Procedure relating to EP application (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTJun 5, 2019
View procedures Publications (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTJul 18, 2019
Issue numberHN29
YearPJ2019
Publication dateVTJul 18, 2019
Type of publicationPARTBibliographic data
View procedures Change of classification (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTChange of classification
Legal/procedural statusVSTChange of IPC main class
Date of legal/procedural statusVSTTNov 27, 2019
51IPC main classICM
(ICMV)		 H01L 21/02 (2006.01)
51Previous IPC main classICMF
(ICMVF)		 C23C 16/34 (2006.01)
Date of update of the procedureREGTMar 16, 2023
View procedures Procedure relating to EP application (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTSep 6, 2023
Date of update of the procedureREGTAug 17, 2023
View procedures Publications (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTSep 21, 2023
Issue numberHN38
YearPJ2023
Publication dateVTSep 21, 2023
Type of publicationPARTBibliographic data
PartHTPart 5
Date of update of the procedureREGTSep 21, 2023
View procedures Procedure relating to EP application (No.: 7)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTJun 7, 2024
Issue numberHN35
YearPJ2024
Publication dateVTAug 29, 2024
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTAug 7, 2024