Register information Patent

DE file number : 60 2016 086 222.0 (Status: pending/in force, Query started: May 24, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2016 086 222.0
96EP file numberEAKZ16 89 8139.7
86WO file numberWAKZPCT/US2016/060626
97EP publication numberEPN3440511
87WO publication numberWPN2017176314
54Designation/titleTIVERBESSERUNG DER PROZESSKOMPATIBILITÄT DURCH FÜLLFAKTORMODULATION
51IPC main classICM
(ICMV)		 G03F 7/20 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 G03F 7/00 (2006.01), H01L 21/027 (2006.01), H01L 21/66 (2006.01)
22DE application dateDATNov 4, 2016
96EP application dateEATNov 4, 2016
86WO application dateWATNov 4, 2016
43Date of first publicationOTOct 12, 2017
Date of publication of grantPETMar 6, 2024
71/73Applicant/ownerINHKLA-Tencor Corporation, Milpitas, CA, US
72InventorINLEVINSKI, Vladimir, 23100 Migdal Haemek, IL; HAJAJ, Eitan, 61000 Tel Aviv, IL; ITZKOVICH, Tal, 99735 Kfar Uriya, IL; AHARON, Sharon, 1796000 Hanaton, IL; ADEL, Michael E., 30900 Ya'akov Zichron, IL; PASKOVER, Yuri, Milipitas, CA 95035, US; NEGRI, Daria, Milipitas, CA 95035, DE; LUBASHEVSKY, Yuval, Milipitas, CA 95035, DE; MANASSEN, Amnon, Milipitas, CA 95035, DE; LEE, Myungjun, Milipitas, CA 95035, DE; SMITH, Mark D, Milipitas, CA 95035, DE
74RepresentativeVTRStolmár & Partner Patentanwälte PartG mbB, 80331 München, DE
Address for service Stolmár & Partner Patentanwälte PartG mbB, 80331 München, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
201662318086 P
Apr 4, 2016
Due dateFT
FG		Nov 30, 2025
Annual fee for the 10th year Patent fees
Patent division in charge 51
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Published EP/WO documentsEPWOPNOriginal document: EP000003440511A1
Searchable text: EP000003440511A1
Original document: EP000003440511B1
Searchable text: EP000003440511B1
Original document: WO002017176314
Searchable text: WO002017176314
43Date of first publicationEVTOct 12, 2017
Date of the first transfer into DPMAregisterEREGTFeb 13, 2019
Date of the (most recent) update in DPMAregisterREGTMay 8, 2025
(Show all update days)(Hide all update days)
  • May 8, 2025
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 06.03.2024: new
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 06.03.2024: deleted
  • Feb 27, 2025
    • Procedures: Procedure relating to EP application, Grant has become final, 09.12.2024: changed
  • Jan 23, 2025
    • Procedures: Procedure relating to EP application, Grant has become final, 09.12.2024: new
  • Dec 4, 2024
    • Due date: changed
  • Jul 25, 2024
    • St.36: changed (technical change)
  • Mar 12, 2024; Mar 9, 2024; Feb 15, 2024; Aug 23, 2019
    • Historical data not available for this/these date(s)
  • Feb 13, 2019
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to PCT application WO publication Oct 12, 2017  Details anzeigen
2 Procedure relating to EP application EPO 1st publication Feb 13, 2019  Details anzeigen
3 Publications Publication of a mention regarding EP 1st publication by DPMA Mar 28, 2019 Mar 28, 2019 Details anzeigen
4 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Mar 6, 2024  Details anzeigen
5 Publications Publication by DPMA of mention regarding EP patent grant Mar 21, 2024 Mar 21, 2024 Details anzeigen
6 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Dec 9, 2024 Feb 27, 2025 Details anzeigen
View procedures Procedure relating to PCT application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO publication
Date of legal/procedural statusVSTTOct 12, 2017
View procedures Procedure relating to EP application (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTFeb 13, 2019
View procedures Publications (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTMar 28, 2019
Issue numberHN13
YearPJ2019
Publication dateVTMar 28, 2019
Type of publicationPARTBibliographic data
View procedures Procedure relating to EP application (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTMar 6, 2024
Date of update of the procedureREGTMay 8, 2025
View procedures Publications (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTMar 21, 2024
Issue numberHN12
YearPJ2024
Publication dateVTMar 21, 2024
Type of publicationPARTBibliographic data
PartHTPart 5
Date of update of the procedureREGTMar 9, 2024
View procedures Procedure relating to EP application (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTDec 9, 2024
Issue numberHN9
YearPJ2025
Publication dateVTFeb 27, 2025
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTFeb 27, 2025