Register information Patent

DE file number : 60 2016 084 859.7 (Status: pending/in force, Query started: May 15, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2016 084 859.7
96EP file numberEAKZ16 78 7344.7
86WO file numberWAKZPCT/EP2016/073380
97EP publication numberEPN3377942
87WO publication numberWPN2017084797
54Designation/titleTILITHOGRAFISCHE VORRICHTUNG UND VERFAHREN ZUM BETRIEB EINER LITHOGRAFISCHEN VORRICHTUNG
51IPC main classICM
(ICMV)		 G03F 7/20 (2006.01)
22DE application dateDATSep 30, 2016
96EP application dateEATSep 30, 2016
86WO application dateWATSep 30, 2016
43Date of first publicationOTMay 26, 2017
Date of publication of grantPETDec 20, 2023
71/73Applicant/ownerINHASML Netherlands B.V., Veldhoven, NL
72InventorINKANEHARA, Junichi, 5500 AH Veldhoven, NL; BUTLER, Hans, 5500 AH Veldhoven, NL; DE WIT, Paul Corné Henri, 5500 AH Veldhoven, NL; VAN DER PASCH, Engelbertus Antonius Fransiscus, 5500 AH Veldhoven, NL
Address for service ASML Netherlands B.V., 5500 AH Veldhoven, NL
33
31
32
Foreign priorityPRC
PRNA
PRDA
EP
16157155
Feb 24, 2016
33
31
32
Foreign priorityPRC
PRNA
PRDA
EP
15195532
Nov 20, 2015
Due dateFT
FG		Sep 30, 2025
Annual fee for the 10th year Patent fees
Patent division in charge 51
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Published EP/WO documentsEPWOPNOriginal document: EP000003377942A1
Searchable text: EP000003377942A1
Original document: EP000003377942B1
Searchable text: EP000003377942B1
Original document: WO002017084797
Searchable text: WO002017084797
43Date of first publicationEVTMay 26, 2017
Date of the first transfer into DPMAregisterEREGTSep 26, 2018
Date of the (most recent) update in DPMAregisterREGTMay 8, 2025
(Show all update days)(Hide all update days)
  • May 8, 2025
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 20.12.2023: new
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 20.12.2023: deleted
  • Dec 12, 2024
    • Procedures: Procedure relating to EP application, Grant has become final, 23.09.2024: changed
  • Nov 7, 2024
    • Procedures: Procedure relating to EP application, Grant has become final, 23.09.2024: new
  • Oct 8, 2024
    • Due date: changed
  • Jul 25, 2024
    • St.36: changed (technical change)
  • Jul 18, 2024
    • St.36: changed (technical change)
  • Jun 6, 2024; May 2, 2024; Apr 25, 2024; Jan 4, 2024; Nov 24, 2023; Nov 23, 2023
    • Historical data not available for this/these date(s)
  • Sep 26, 2018
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to PCT application WO publication May 26, 2017  Details anzeigen
2 Procedure relating to EP application EPO 1st publication Sep 26, 2018  Details anzeigen
3 Publications Publication of a mention regarding EP 1st publication by DPMA Nov 8, 2018 Nov 8, 2018 Details anzeigen
4 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Dec 20, 2023  Details anzeigen
5 Publications Publication by DPMA of mention regarding EP patent grant Jan 4, 2024 Jan 4, 2024 Details anzeigen
6 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Sep 23, 2024 Dec 12, 2024 Details anzeigen
View procedures Procedure relating to PCT application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO publication
Date of legal/procedural statusVSTTMay 26, 2017
View procedures Procedure relating to EP application (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTSep 26, 2018
View procedures Publications (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTNov 8, 2018
Issue numberHN45
YearPJ2018
Publication dateVTNov 8, 2018
Type of publicationPARTBibliographic data
View procedures Procedure relating to EP application (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTDec 20, 2023
Date of update of the procedureREGTMay 8, 2025
View procedures Publications (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTJan 4, 2024
Issue numberHN1
YearPJ2024
Publication dateVTJan 4, 2024
Type of publicationPARTBibliographic data
PartHTPart 5
Date of update of the procedureREGTJan 4, 2024
View procedures Procedure relating to EP application (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTSep 23, 2024
Issue numberHN50
YearPJ2024
Publication dateVTDec 12, 2024
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTDec 12, 2024