Register information Patent

DE file number : 60 2016 071 783.2 (Status: not pending/lapsed, Query started: October 31, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTNot pending/lapsed
21DE file number DAKZ60 2016 071 783.2
96EP file numberEAKZ16 76 2616.7
86WO file numberWAKZPCT/US2016/022058
97EP publication numberEPN3268505
87WO publication numberWPN2016145337
54Designation/titleTIVERFAHREN ZUR NEUTRALSTRAHLVERARBEITUNG AUF BASIS VON GASCLUSTER-IONENSTRAHLTECHNOLOGIE
51IPC main classICM
(ICMV)		 H01L 21/033 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 H01L 21/02 (2006.01), C23C 14/00 (2006.01)
22DE application dateDATMar 11, 2016
96EP application dateEATMar 11, 2016
86WO application dateWATMar 11, 2016
43Date of first publicationOTSep 15, 2016
Date of publication of grantPETMay 4, 2022
71/73Applicant/ownerINHExogenesis Corporation, Billerica, MA, US
72InventorINKIRKPATRICK, Sean, R., Billerica, Massachusetts 01821, US; SVRLUGA, Richard, C., Billerica, Massachusetts 01821, US
74RepresentativeVTRStolmár & Partner Patentanwälte PartG mbB, 80331 München, DE
Address for service Stolmár & Partner Patentanwälte PartG mbB, 80331 München, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
201562131669 P
Mar 11, 2015
Patent division in charge 33
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Published EP/WO documentsEPWOPNOriginal document: EP000003268505A1
Searchable text: EP000003268505A1
Original document: EP000003268505B1
Searchable text: EP000003268505B1
Original document: WO002016145337
Searchable text: WO002016145337
43Date of first publicationEVTSep 15, 2016
Date of the first transfer into DPMAregisterEREGTJan 17, 2018
Date of the (most recent) update in DPMAregisterREGTAug 14, 2025
(Show all update days)(Hide all update days)
  • Aug 14, 2025
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 04.05.2022: new
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 04.05.2022: deleted
  • Dec 24, 2024
    • Procedures: Administrative procedure, Application deemed withdrawn due to non-payment of annual fee, 01.10.2024: changed
  • Nov 15, 2024
    • Status: changed
    • Due date: deleted
    • Procedures: Administrative procedure, Application deemed withdrawn due to non-payment of annual fee, 01.10.2024: new
  • Aug 6, 2024
    • St.36: changed (technical change)
  • Jul 16, 2024; Apr 5, 2023; Mar 30, 2023; Mar 16, 2023; Aug 6, 2022; May 19, 2022; Apr 14, 2022; Nov 4, 2021
    • Historical data not available for this/these date(s)
  • Jan 17, 2018
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to PCT application WO publication Sep 15, 2016  Details anzeigen
2 Procedure relating to EP application EPO 1st publication Jan 17, 2018  Details anzeigen
3 Publications Publication of a mention regarding EP 1st publication by DPMA Mar 1, 2018 Mar 1, 2018 Details anzeigen
4 Change of classification Change of IPC main class Oct 5, 2018  Details anzeigen
5 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) May 4, 2022  Details anzeigen
6 Publications Publication by DPMA of mention regarding EP patent grant May 19, 2022 May 19, 2022 Details anzeigen
7 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Feb 7, 2023 Apr 20, 2023 Details anzeigen
8 Administrative procedure Application is deemed to be withdrawn due to non-payment of annual fee/ IP right has lapsed due to non-payment of annual fee Oct 1, 2024 Dec 24, 2024 Details anzeigen
View procedures Procedure relating to PCT application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO publication
Date of legal/procedural statusVSTTSep 15, 2016
Date of update of the procedureREGTApr 14, 2022
View procedures Procedure relating to EP application (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTJan 17, 2018
View procedures Publications (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTMar 1, 2018
Issue numberHN9
YearPJ2018
Publication dateVTMar 1, 2018
Type of publicationPARTBibliographic data
View procedures Change of classification (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTChange of classification
Legal/procedural statusVSTChange of IPC main class
Date of legal/procedural statusVSTTOct 5, 2018
51IPC main classICM
(ICMV)		 H01L 21/033 (2006.01)
51Previous IPC main classICMF
(ICMVF)		 C23C 14/00 (2006.01)
Date of update of the procedureREGTApr 14, 2022
View procedures Procedure relating to EP application (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTMay 4, 2022
Date of update of the procedureREGTAug 14, 2025
View procedures Publications (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTMay 19, 2022
Issue numberHN20
YearPJ2022
Publication dateVTMay 19, 2022
Type of publicationPARTBibliographic data
PartHTPart 5
Date of update of the procedureREGTMay 19, 2022
View procedures Procedure relating to EP application (No.: 7)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTFeb 7, 2023
Issue numberHN16
YearPJ2023
Publication dateVTApr 20, 2023
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTMar 30, 2023
View procedures Administrative procedure (No.: 8)
INIDCriterionFieldContent Close details
Type of procedureVARTAdministrative procedure
Legal/procedural statusVSTApplication is deemed to be withdrawn due to non-payment of annual fee/ IP right has lapsed due to non-payment of annual fee
Date of legal/procedural statusVSTTOct 1, 2024
Issue numberHN52
YearPJ2024
Publication dateVTDec 24, 2024
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTDec 24, 2024