Register information Patent

DE file number : 60 2015 013 045.6 (Status: pending/in force, Query started: August 3, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2015 013 045.6
96EP file numberEAKZ15 72 3888.2
86WO file numberWAKZPCT/EP2015/060427
97EP publication numberEPN3155482
87WO publication numberWPN2015193036
54Designation/titleTILITHOGRAPHISCHE VORRICHTUNG, VERFAHREN ZUR ÜBERTRAGUNG EINES SUBSTRATS UND VORRICHTUNGSHERSTELLUNGSVERFAHREN
51IPC main classICM
(ICMV)		 G03F 7/20 (2006.01)
22DE application dateDATMay 12, 2015
96EP application dateEATMay 12, 2015
86WO application dateWATMay 12, 2015
43Date of first publicationOTDec 23, 2015
Date of publication of grantPETJul 4, 2018
71/73Applicant/ownerINHASML Netherlands B.V., Veldhoven, NL
72InventorINVAN BEUZEKOM, Aart, Adrianus, NL-5500 AH Veldhoven, NL; ALBERTI, Jozef, Augustinus, Maria, NL-5500 AH Veldhoven, NL; SEGERS, Hubert, Marie, NL-5500 AH Veldhoven, NL; VAN DER HAM, Ronald, NL-5500 AH Veldhoven, NL; FAHRNI, Francis, NL-5500 AH Veldhoven, NL; OLIESLAGERS, Ruud, NL-5500 AH Veldhoven, NL; PIETERSE, Gerben, NL-5500 AH Veldhoven, NL; ROPS, Cornelius, Maria, NL-5500 AH Veldhoven, NL; VAN DEN EIJNDEN, Pepijn, NL-5500 AH Veldhoven, NL; VAN DONGEN, Paul, NL-5500 AH Veldhoven, NL; WILLEMS, Bas, NL-5500 AH Veldhoven, NL
Address for service ASML Netherlands B.V., 5500 AH VELDHOVEN, NL
33
31
32
Foreign priorityPRC
PRNA
PRDA
EP
14178554
Jul 25, 2014
33
31
32
Foreign priorityPRC
PRNA
PRDA
EP
14198779
Dec 18, 2014
33
31
32
Foreign priorityPRC
PRNA
PRDA
EP
14172626
Jun 16, 2014
Due dateFT
FG		May 31, 2026
Annual fee for the 12th year Patent fees
Patent division in charge 51
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Published EP/WO documentsEPWOPNOriginal document: EP000003155482A1
Searchable text: EP000003155482A1
Original document: EP000003155482B1
Searchable text: EP000003155482B1
Original document: WO002015193036
Searchable text: WO002015193036
43Date of first publicationEVTDec 23, 2015
Date of the first transfer into DPMAregisterEREGTApr 20, 2017
Date of the (most recent) update in DPMAregisterREGTJun 12, 2025
(Show all update days)(Hide all update days)
  • Jun 12, 2025
    • Due date: changed
  • Jun 10, 2025
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 04.07.2018: new
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 04.07.2018: deleted
  • Apr 20, 2017
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to PCT application WO publication Dec 23, 2015  Details anzeigen
2 Procedure relating to EP application EPO 1st publication Apr 19, 2017  Details anzeigen
3 Publications Publication of a mention regarding EP 1st publication by DPMA Jun 1, 2017 Jun 1, 2017 Details anzeigen
4 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Jul 4, 2018  Details anzeigen
5 Publications Publication by DPMA of mention regarding EP patent grant Aug 2, 2018 Aug 2, 2018 Details anzeigen
6 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Apr 5, 2019 Jun 27, 2019 Details anzeigen
View procedures Procedure relating to PCT application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO publication
Date of legal/procedural statusVSTTDec 23, 2015
View procedures Procedure relating to EP application (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTApr 19, 2017
View procedures Publications (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTJun 1, 2017
Issue numberHN22
YearPJ2017
Publication dateVTJun 1, 2017
Type of publicationPARTBibliographic data
View procedures Procedure relating to EP application (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTJul 4, 2018
Date of update of the procedureREGTJun 10, 2025
View procedures Publications (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTAug 2, 2018
Issue numberHN31
YearPJ2018
Publication dateVTAug 2, 2018
Type of publicationPARTBibliographic data
PartHTPart 5
View procedures Procedure relating to EP application (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTApr 5, 2019
Issue numberHN26
YearPJ2019
Publication dateVTJun 27, 2019
Type of publicationPARTBibliographic data
PartHTPart 3