Register information Patent

DE file number : 60 2005 052 527.0 (Status: not pending/lapsed, Query started: April 26, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTNot pending/lapsed
21DE file number DAKZ60 2005 052 527.0
96EP file numberEAKZ15 18 5639.0
97EP publication numberEPN2998982
54Designation/titleTIBELICHTUNGSVORRICHTUNG, BELICHTUNGSVERFAHREN UND VORRICHTUNGSHERSTELLUNGSVERFAHREN
51IPC main classICM
(ICMV)		 H01L 21/027 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 G03F 7/20 (2006.01)
22DE application dateDATJan 27, 2005
96EP application dateEATJan 27, 2005
43Date of first publicationOTMar 23, 2016
Date of publication of grantPETAug 9, 2017
71/73Applicant/ownerINHNikon Corporation, Tokyo, JP
72InventorINShibazaki, Yuichi, Tokyo, 100-8331, JP
74RepresentativeVTRHOFFMANN - EITLE Patent- und Rechtsanwälte PartmbB, 81925 München, DE
Address for service HOFFMANN - EITLE Patent- und Rechtsanwälte PartmbB, München, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
JP
2004025837
Feb 2, 2004
33
31
32
Foreign priorityPRC
PRNA
PRDA
JP
2004300566
Oct 14, 2004
Patent division in charge 33
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR
Published EP/WO documentsEPWOPNOriginal document: EP000002998982
Searchable text: EP000002998982
Original document: EP000002998982B1
Searchable text: EP000002998982B1
43Date of first publicationEVTMar 23, 2016
Date of the first transfer into DPMAregisterEREGTMay 4, 2016
Date of the (most recent) update in DPMAregisterREGTOct 29, 2020
(Show all update days)(Hide all update days)
  • Oct 29, 2020; Sep 17, 2020; Aug 16, 2019; Feb 9, 2019; Jan 24, 2019; Aug 9, 2018; Jul 5, 2018; Jan 27, 2018; Sep 21, 2017; Aug 11, 2017; Aug 10, 2017; May 11, 2017
    • Historical data not available for this/these date(s)
  • May 4, 2016
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to EP application EPO 1st publication Mar 23, 2016  Details anzeigen
2 Publications Publication of a mention regarding EP 1st publication by DPMA May 4, 2016 May 4, 2016 Details anzeigen
3 Change of classification Change of IPC main class Mar 31, 2017  Details anzeigen
4 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Aug 9, 2017  Details anzeigen
5 Publications Publication by DPMA of mention regarding EP patent grant Sep 21, 2017 Sep 21, 2017 Details anzeigen
6 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision May 11, 2018 Aug 9, 2018 Details anzeigen
7 Administrative procedure Application is deemed to be withdrawn due to non-payment of annual fee/ IP right has lapsed due to non-payment of annual fee Aug 1, 2020 Oct 29, 2020 Details anzeigen
View procedures Procedure relating to EP application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTMar 23, 2016
View procedures Publications (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTMay 4, 2016
Issue numberHN18
YearPJ2016
Publication dateVTMay 4, 2016
Type of publicationPARTBibliographic data
View procedures Change of classification (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTChange of classification
Legal/procedural statusVSTChange of IPC main class
Date of legal/procedural statusVSTTMar 31, 2017
51IPC main classICM
(ICMV)		 H01L 21/027 (2006.01)
51Previous IPC main classICMF
(ICMVF)		 H01L 21/027 (2006.01)
View procedures Procedure relating to EP application (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTAug 9, 2017
View procedures Publications (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTSep 21, 2017
Issue numberHN38
YearPJ2017
Publication dateVTSep 21, 2017
Type of publicationPARTBibliographic data
PartHTPart 5
View procedures Procedure relating to EP application (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTMay 11, 2018
Issue numberHN32
YearPJ2018
Publication dateVTAug 9, 2018
Type of publicationPARTBibliographic data
PartHTPart 3
View procedures Administrative procedure (No.: 7)
INIDCriterionFieldContent Close details
Type of procedureVARTAdministrative procedure
Legal/procedural statusVSTApplication is deemed to be withdrawn due to non-payment of annual fee/ IP right has lapsed due to non-payment of annual fee
Date of legal/procedural statusVSTTAug 1, 2020
Issue numberHN44
YearPJ2020
Publication dateVTOct 29, 2020
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTOct 29, 2020