Register information Patent

DE file number : 60 2005 050 453.2 (Status: not pending/lapsed, Query started: May 3, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTNot pending/lapsed
21DE file number DAKZ60 2005 050 453.2
96EP file numberEAKZ15 17 9672.9
97EP publication numberEPN2980834
54Designation/titleTIBELICHTUNGSVORRICHTUNG, BELICHTUNGSVERFAHREN UND VERFAHREN ZUR HERSTELLUNG EINER VORRICHTUNG
51IPC main classICM
(ICMV)		 H01L 21/027 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 G03F 7/20 (2006.01)
22DE application dateDATJan 27, 2005
96EP application dateEATJan 27, 2005
43Date of first publicationOTFeb 3, 2016
Date of publication of grantPETOct 12, 2016
71/73Applicant/ownerINHNikon Corporation, Tokyo, JP
72InventorINShibazaki, Yuichi, Tokyo 100-8331, JP
74RepresentativeVTRHOFFMANN - EITLE Patent- und Rechtsanwälte PartmbB, 81925 München, DE
Address for service HOFFMANN - EITLE Patent- und Rechtsanwälte PartmbB, München, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
JP
2004025837
Feb 2, 2004
33
31
32
Foreign priorityPRC
PRNA
PRDA
JP
2004300566
Oct 14, 2004
Patent division in charge 33
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR
Published EP/WO documentsEPWOPNOriginal document: EP000002980834
Searchable text: EP000002980834
Original document: EP000002980834B1
Searchable text: EP000002980834B1
43Date of first publicationEVTFeb 3, 2016
Date of the first transfer into DPMAregisterEREGTMar 18, 2016
Date of the (most recent) update in DPMAregisterREGTOct 22, 2020
(Show all update days)(Hide all update days)
  • Oct 22, 2020; Sep 17, 2020; Aug 19, 2019; Feb 9, 2019; Jan 24, 2019; Jan 27, 2018; Oct 12, 2017; Sep 14, 2017; Jun 30, 2017; Feb 7, 2017; Nov 17, 2016; Oct 13, 2016
    • Historical data not available for this/these date(s)
  • Mar 18, 2016
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to EP application EPO 1st publication Feb 3, 2016  Details anzeigen
2 Publications Publication of a mention regarding EP 1st publication by DPMA Mar 17, 2016 Mar 17, 2016 Details anzeigen
3 Change of classification Change of IPC main class May 31, 2016  Details anzeigen
4 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Oct 12, 2016  Details anzeigen
5 Publications Publication by DPMA of mention regarding EP patent grant Nov 17, 2016 Nov 17, 2016 Details anzeigen
6 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Jul 13, 2017 Oct 19, 2017 Details anzeigen
7 Administrative procedure Application is deemed to be withdrawn due to non-payment of annual fee/ IP right has lapsed due to non-payment of annual fee Aug 1, 2020 Oct 22, 2020 Details anzeigen
View procedures Procedure relating to EP application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTFeb 3, 2016
View procedures Publications (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTMar 17, 2016
Issue numberHN11
YearPJ2016
Publication dateVTMar 17, 2016
Type of publicationPARTBibliographic data
View procedures Change of classification (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTChange of classification
Legal/procedural statusVSTChange of IPC main class
Date of legal/procedural statusVSTTMay 31, 2016
51IPC main classICM
(ICMV)		 H01L 21/027 (2006.01)
51Previous IPC main classICMF
(ICMVF)		 H01L 21/027 (2006.01)
View procedures Procedure relating to EP application (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTOct 12, 2016
View procedures Publications (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTNov 17, 2016
Issue numberHN46
YearPJ2016
Publication dateVTNov 17, 2016
Type of publicationPARTBibliographic data
PartHTPart 5
View procedures Procedure relating to EP application (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTJul 13, 2017
Issue numberHN42
YearPJ2017
Publication dateVTOct 19, 2017
Type of publicationPARTBibliographic data
PartHTPart 3
View procedures Administrative procedure (No.: 7)
INIDCriterionFieldContent Close details
Type of procedureVARTAdministrative procedure
Legal/procedural statusVSTApplication is deemed to be withdrawn due to non-payment of annual fee/ IP right has lapsed due to non-payment of annual fee
Date of legal/procedural statusVSTTAug 1, 2020
Issue numberHN43
YearPJ2020
Publication dateVTOct 22, 2020
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTOct 22, 2020