Register information Patent

DE file number : 60 2005 050 728.0 (Status: not pending/lapsed, Query started: May 15, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTNot pending/lapsed
21DE file number DAKZ60 2005 050 728.0
96EP file numberEAKZ15 17 1838.4
97EP publication numberEPN2960927
54Designation/titleTIBELICHTUNGSVORRICHTUNG, BELICHTUNGSVERFAHREN UND BAUELEMENTSHERSTELLUNGSVERFAHREN
51IPC main classICM
(ICMV)		 H01L 21/027 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 G03F 7/20 (2006.01)
22DE application dateDATJan 27, 2005
96EP application dateEATJan 27, 2005
43Date of first publicationOTDec 30, 2015
Date of publication of grantPETNov 16, 2016
71/73Applicant/ownerINHNikon Corp., Tokio/Tokyo, JP
72InventorINShibazaki, Yuichi, Tokyo, 108-6290, JP
74RepresentativeVTRHoffmann Eitle Patent- und Rechtsanwälte PartmbB, 81925 München, DE
Address for service HOFFMANN - EITLE Patent- und Rechtsanwälte PartmbB, 81925 München, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
JP
2004025837
Feb 2, 2004
33
31
32
Foreign priorityPRC
PRNA
PRDA
JP
2004300566
Oct 14, 2004
Patent division in charge 33
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR
Published EP/WO documentsEPWOPNOriginal document: EP000002960927
Searchable text: EP000002960927
Original document: EP000002960927B1
Searchable text: EP000002960927B1
43Date of first publicationEVTDec 30, 2015
Date of the first transfer into DPMAregisterEREGTFeb 12, 2016
Date of the (most recent) update in DPMAregisterREGTJan 29, 2025
(Show all update days)(Hide all update days)
  • Jan 29, 2025
    • Status: changed
    • Procedures: Administrative procedure, IP right lapsed through expiry of term of protection, 27.01.2025: new
  • Nov 12, 2024
    • Representative: changed
  • Dec 13, 2023; Dec 9, 2022; Dec 8, 2021; Jan 27, 2021; Dec 1, 2020; Jan 24, 2020; Aug 19, 2019; Feb 9, 2019; Jan 24, 2019; Jan 27, 2018; Nov 2, 2017; Oct 19, 2017; Jun 30, 2017; Feb 7, 2017; Dec 29, 2016; Nov 19, 2016; Nov 17, 2016; Aug 4, 2016
    • Historical data not available for this/these date(s)
  • Feb 12, 2016
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to EP application EPO 1st publication Dec 30, 2015  Details anzeigen
2 Publications Publication of a mention regarding EP 1st publication by DPMA Feb 11, 2016 Feb 11, 2016 Details anzeigen
3 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Nov 16, 2016  Details anzeigen
4 Publications Publication by DPMA of mention regarding EP patent grant Dec 29, 2016 Dec 29, 2016 Details anzeigen
5 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Aug 17, 2017 Nov 23, 2017 Details anzeigen
6 Administrative procedure IP right lapsed through expiry of term of protection Jan 27, 2025  Details anzeigen
View procedures Procedure relating to EP application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTDec 30, 2015
View procedures Publications (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTFeb 11, 2016
Issue numberHN6
YearPJ2016
Publication dateVTFeb 11, 2016
Type of publicationPARTBibliographic data
View procedures Procedure relating to EP application (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTNov 16, 2016
View procedures Publications (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTDec 29, 2016
Issue numberHN52
YearPJ2016
Publication dateVTDec 29, 2016
Type of publicationPARTBibliographic data
PartHTPart 5
View procedures Procedure relating to EP application (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTAug 17, 2017
Issue numberHN47
YearPJ2017
Publication dateVTNov 23, 2017
Type of publicationPARTBibliographic data
PartHTPart 3
View procedures Administrative procedure (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTAdministrative procedure
Legal/procedural statusVSTIP right lapsed through expiry of term of protection
Date of legal/procedural statusVSTTJan 27, 2025
Date of update of the procedureREGTJan 29, 2025