Register information Patent

DE file number : 60 2004 051 479.9 (Status: not pending/lapsed, Query started: September 18, 2024)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTNot pending/lapsed
21DE file number DAKZ60 2004 051 479.9
96EP file numberEAKZ15 15 8780.5
97EP publication numberEPN2945184
54Designation/titleTIBELICHTUNGSVORRICHTUNG, BELICHTUNGSVERFAHREN UND VERFAHREN ZUR HERSTELLUNG DER VORRICHTUNG
51IPC main classICM
(ICMV)		 H01L 21/027 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 G03F 7/20 (2006.01)
22DE application dateDATFeb 26, 2004
96EP application dateEATFeb 26, 2004
43Date of first publicationOTNov 18, 2015
Date of publication of grantPETJun 28, 2017
71/73Applicant/ownerINHNikon Corporation, Tokyo, JP
72InventorINNagasaka, Hiroyuki, Tokyo, 100-8331, JP; Nishii, Yasufumi, Tokyo, 100-8331, JP
74RepresentativeVTRHOFFMANN - EITLE Patent- und Rechtsanwälte PartmbB, 81925 München, DE
Address for service HOFFMANN - EITLE Patent- und Rechtsanwälte PartmbB, München, DE
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31
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Foreign priorityPRC
PRNA
PRDA
JP
2003110748
Apr 15, 2003
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31
32
Foreign priorityPRC
PRNA
PRDA
JP
2003320100
Sep 11, 2003
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31
32
Foreign priorityPRC
PRNA
PRDA
JP
2003049365
Feb 26, 2003
Patent division in charge 33
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PT, RO, SE, SI, SK, TR
Published EP/WO documentsEPWOPNOriginal document: EP000002945184
Searchable text: EP000002945184
Original document: EP000002945184B1
Searchable text: EP000002945184B1
43Date of first publicationEVTNov 18, 2015
Date of the first transfer into DPMAregisterEREGTNov 19, 2015
Date of the (most recent) update in DPMAregisterREGTNov 26, 2020
(Show all update days)(Hide all update days)
  • Nov 26, 2020; Oct 17, 2020; Aug 16, 2019; Feb 16, 2019; Jun 28, 2018; May 24, 2018; Feb 27, 2018; Aug 10, 2017; Jul 1, 2017; Jun 30, 2017; Jun 14, 2017
    • Historical data not available for this/these date(s)
  • Nov 19, 2015
    • Date of the first transfer into DPMAregister
Procedural data
No. Kind of procedure Legal status Date of legal/procedural status Date of legal/procedural status sorted ascending Date of first publication Display all details
1 Procedure relating to EP application EPO 1st publication Nov 18, 2015   Display details
2 Publications Publication of a mention regarding EP 1st publication by DPMA Dec 31, 2015 Dec 31, 2015 Display details
3 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Jun 28, 2017   Display details
4 Publications Publication by DPMA of mention regarding EP patent grant Aug 10, 2017 Aug 10, 2017 Display details
5 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Mar 29, 2018 Jun 28, 2018 Display details
6 Administrative procedure Application is deemed to be withdrawn due to non-payment of annual fee/ IP right has lapsed due to non-payment of annual fee Sep 1, 2020 Nov 26, 2020 Display details