Register information Patent

DE file number : 60 2014 080 552.3 (Status: pending/in force, Query started: May 1, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2014 080 552.3
96EP file numberEAKZ14 83 6059.7
86WO file numberWAKZPCT/US2014/050390
97EP publication numberEPN3033764
87WO publication numberWPN2015023542
54Designation/titleTIVERFAHREN UND VORRICHTUNG ZUR FOKUSBESTIMMUNG
51IPC main classICM
(ICMV)		 H01L 21/027 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 G03F 7/20 (2006.01)
22DE application dateDATAug 8, 2014
96EP application dateEATAug 8, 2014
86WO application dateWATAug 8, 2014
43Date of first publicationOTFeb 19, 2015
Date of publication of grantPETOct 6, 2021
71/73Applicant/ownerINHKLA-Tencor Corporation, Milpitas, CA, US
72InventorINPANDEV, Stillian Ivanov, Santa Clara, California 95050, US
74RepresentativeVTRStolmár & Partner Patentanwälte PartG mbB, 80331 München, DE
Address for service Stolmár & Partner Patentanwälte, 80331 München, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
201361864527 P
Aug 10, 2013
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
201414451320
Aug 4, 2014
Due dateFT
FG		Aug 31, 2025
Annual fee for the 12th year Patent fees
Patent division in charge 33
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Published EP/WO documentsEPWOPNOriginal document: EP000003033764
Searchable text: EP000003033764
Original document: EP000003033764B1
Searchable text: EP000003033764B1
Original document: WO002015023542
Searchable text: WO002015023542
43Date of first publicationEVTFeb 19, 2015
Date of the first transfer into DPMAregisterEREGTAug 5, 2016
Date of the (most recent) update in DPMAregisterREGTSep 6, 2024
(Show all update days)(Hide all update days)
  • Sep 6, 2024
    • Due date: changed
  • Jun 27, 2024; Jun 13, 2024; Apr 25, 2024; Sep 12, 2023; Sep 2, 2022; Aug 18, 2022; Oct 6, 2021; Sep 21, 2021; Sep 16, 2021; Sep 7, 2017
    • Historical data not available for this/these date(s)
  • Aug 5, 2016
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to PCT application WO publication Feb 19, 2015  Details anzeigen
2 Procedure relating to EP application EPO 1st publication Jun 22, 2016  Details anzeigen
3 Publications Publication of a mention regarding EP 1st publication by DPMA Aug 4, 2016 Aug 4, 2016 Details anzeigen
4 Change of classification Change of IPC main class Feb 16, 2017  Details anzeigen
5 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Oct 6, 2021  Details anzeigen
6 Publications Publication by DPMA of mention regarding EP patent grant Oct 28, 2021 Oct 28, 2021 Details anzeigen
7 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Jul 7, 2022 Sep 22, 2022 Details anzeigen
View procedures Procedure relating to PCT application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO publication
Date of legal/procedural statusVSTTFeb 19, 2015
Date of update of the procedureREGTSep 16, 2021
View procedures Procedure relating to EP application (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTJun 22, 2016
View procedures Publications (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTAug 4, 2016
Issue numberHN31
YearPJ2016
Publication dateVTAug 4, 2016
Type of publicationPARTBibliographic data
View procedures Change of classification (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTChange of classification
Legal/procedural statusVSTChange of IPC main class
Date of legal/procedural statusVSTTFeb 16, 2017
51IPC main classICM
(ICMV)		 H01L 21/027 (2006.01)
51Previous IPC main classICMF
(ICMVF)		 H01L 21/027 (2006.01)
Date of update of the procedureREGTSep 16, 2021
View procedures Procedure relating to EP application (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTOct 6, 2021
Date of update of the procedureREGTSep 16, 2021
View procedures Publications (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTOct 28, 2021
Issue numberHN43
YearPJ2021
Publication dateVTOct 28, 2021
Type of publicationPARTBibliographic data
PartHTPart 5
Date of update of the procedureREGTOct 6, 2021
View procedures Procedure relating to EP application (No.: 7)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTJul 7, 2022
Issue numberHN38
YearPJ2022
Publication dateVTSep 22, 2022
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTSep 2, 2022