Register information Patent

DE file number : 60 2014 076 867.9 (Status: pending/in force, Query started: April 24, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2014 076 867.9
96EP file numberEAKZ14 83 5827.8
86WO file numberWAKZPCT/US2014/050539
97EP publication numberEPN3033440
87WO publication numberWPN2015023585
54Designation/titleTISPUTTERZIEL MIT RÜCKSEITIGEN KÜHLRILLEN
51IPC main classICM
(ICMV)		 C23C 14/34 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 H01J 37/34 (2006.01)
22DE application dateDATAug 14, 2014
96EP application dateEATAug 14, 2014
86WO application dateWATAug 14, 2014
43Date of first publicationOTFeb 19, 2015
Date of publication of grantPETApr 21, 2021
71/73Applicant/ownerINHApplied Materials, Inc., Santa Clara, CA, US
72InventorINWEST, Brian T., San Jose, California 95130, US; COX, Michael S., Gilroy, California 95020, US; OH, Jeonghoon, Saratoga, California 95070, US
74RepresentativeVTRZimmermann & Partner Patentanwälte mbB, 80331 München, DE
Address for service Zimmermann & Partner Patentanwälte mbB, 80069 München, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
201361866006 P
Aug 14, 2013
Due dateFT
FG		Aug 31, 2025
Annual fee for the 12th year Patent fees
Patent division in charge 45
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Published EP/WO documentsEPWOPNOriginal document: EP000003033440
Searchable text: EP000003033440
Original document: EP000003033440B1
Searchable text: EP000003033440B1
Original document: WO002015023585
Searchable text: WO002015023585
43Date of first publicationEVTFeb 19, 2015
Date of the first transfer into DPMAregisterEREGTAug 5, 2016
Date of the (most recent) update in DPMAregisterREGTJul 30, 2024
(Show all update days)(Hide all update days)
  • Jul 30, 2024
    • Due date: changed
  • Jun 27, 2024; May 9, 2024; Jul 29, 2023; Aug 5, 2022; Apr 14, 2022; Mar 10, 2022; Jul 28, 2021; Jun 1, 2021; May 6, 2021; Apr 1, 2021; Nov 5, 2020; Feb 8, 2018; Apr 6, 2017
    • Historical data not available for this/these date(s)
  • Aug 5, 2016
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to PCT application WO publication Feb 19, 2015  Details anzeigen
2 Procedure relating to EP application EPO 1st publication Jun 22, 2016  Details anzeigen
3 Publications Publication of a mention regarding EP 1st publication by DPMA Aug 4, 2016 Aug 4, 2016 Details anzeigen
4 Change of classification Change of IPC main class Feb 28, 2017  Details anzeigen
5 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Apr 21, 2021  Details anzeigen
6 Publications Publication by DPMA of mention regarding EP patent grant May 6, 2021 May 6, 2021 Details anzeigen
7 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Jan 24, 2022 Apr 14, 2022 Details anzeigen
View procedures Procedure relating to PCT application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO publication
Date of legal/procedural statusVSTTFeb 19, 2015
Date of update of the procedureREGTApr 1, 2021
View procedures Procedure relating to EP application (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTJun 22, 2016
View procedures Publications (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTAug 4, 2016
Issue numberHN31
YearPJ2016
Publication dateVTAug 4, 2016
Type of publicationPARTBibliographic data
View procedures Change of classification (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTChange of classification
Legal/procedural statusVSTChange of IPC main class
Date of legal/procedural statusVSTTFeb 28, 2017
51IPC main classICM
(ICMV)		 C23C 14/34 (2006.01)
51Previous IPC main classICMF
(ICMVF)		 C23C 14/34 (2006.01)
Date of update of the procedureREGTApr 1, 2021
View procedures Procedure relating to EP application (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTApr 21, 2021
Date of update of the procedureREGTApr 1, 2021
View procedures Publications (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTMay 6, 2021
Issue numberHN18
YearPJ2021
Publication dateVTMay 6, 2021
Type of publicationPARTBibliographic data
PartHTPart 5
Date of update of the procedureREGTMay 6, 2021
View procedures Procedure relating to EP application (No.: 7)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTJan 24, 2022
Issue numberHN15
YearPJ2022
Publication dateVTApr 14, 2022
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTApr 14, 2022