Register information Patent

DE file number : 60 2014 057 476.9 (Status: pending/in force, Query started: August 14, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2014 057 476.9
96EP file numberEAKZ14 73 5854.3
86WO file numberWAKZPCT/EP2014/001780
97EP publication numberEPN3017077
87WO publication numberWPN2015000575
54Designation/titleTIZIELALTERUNGSKOMPENSATIONSVERFAHREN ZUR DURCHFÜHRUNG VON STABILEN REAKTIVEN SPUTTERPROZESSEN
51IPC main classICM
(ICMV)		 C23C 14/00 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 C23C 14/06 (2006.01), C23C 14/34 (2006.01), C23C 14/54 (2006.01), H01J 37/32 (2006.01), H01J 37/34 (2006.01)
22DE application dateDATJun 30, 2014
96EP application dateEATJun 30, 2014
86WO application dateWATJun 30, 2014
43Date of first publicationOTJan 8, 2015
Date of publication of grantPETNov 27, 2019
71/73Applicant/ownerINHOerlikon Surface Solutions AG, Pfäffikon, Pfäffikon, CH
72InventorINKURAPOV, Denis, CH-8880 Walenstadt, CH; KRASSNITZER, Siegfried, A-6800 Feldkirch, AT
Address for service Oerlikon Surface Solutions AG, Pfäffikon, 8808 Pfäffikon SZ, CH
66
66
Domestic priorityPRN
PRD
102013011068
Jul 3, 2013
Due dateFT
FG		Jun 30, 2026
Annual fee for the 13th year Patent fees
Patent division in charge 45
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Published EP/WO documentsEPWOPNOriginal document: EP000003017077
Searchable text: EP000003017077
Original document: EP000003017077B1
Searchable text: EP000003017077B1
Original document: WO002015000575
Searchable text: WO002015000575
43Date of first publicationEVTJan 8, 2015
Date of the first transfer into DPMAregisterEREGTJun 24, 2016
Date of the (most recent) update in DPMAregisterREGTJul 8, 2025
(Show all update days)(Hide all update days)
  • Jul 8, 2025
    • Due date: changed
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 27.11.2019: new
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 27.11.2019: deleted
  • Jun 24, 2016
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to PCT application WO publication Jan 8, 2015  Details anzeigen
2 Procedure relating to EP application EPO 1st publication May 11, 2016  Details anzeigen
3 Publications Publication of a mention regarding EP 1st publication by DPMA Jun 23, 2016 Jun 23, 2016 Details anzeigen
4 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Nov 27, 2019  Details anzeigen
5 Publications Publication by DPMA of mention regarding EP patent grant Dec 19, 2019 Dec 19, 2019 Details anzeigen
6 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Aug 28, 2020 Nov 19, 2020 Details anzeigen
View procedures Procedure relating to PCT application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO publication
Date of legal/procedural statusVSTTJan 8, 2015
View procedures Procedure relating to EP application (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTMay 11, 2016
View procedures Publications (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTJun 23, 2016
Issue numberHN25
YearPJ2016
Publication dateVTJun 23, 2016
Type of publicationPARTBibliographic data
View procedures Procedure relating to EP application (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTNov 27, 2019
Date of update of the procedureREGTJul 8, 2025
View procedures Publications (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTDec 19, 2019
Issue numberHN51
YearPJ2019
Publication dateVTDec 19, 2019
Type of publicationPARTBibliographic data
PartHTPart 5
View procedures Procedure relating to EP application (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTAug 28, 2020
Issue numberHN47
YearPJ2020
Publication dateVTNov 19, 2020
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTNov 19, 2020