Register information Patent

DE file number : 60 2014 060 312.2 (Status: pending/in force, Query started: August 2, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2014 060 312.2
96EP file numberEAKZ14 72 0984.5
86WO file numberWAKZPCT/EP2014/059106
97EP publication numberEPN3020062
87WO publication numberWPN2014177718
54Designation/titleTISTRAHLUNGSGITTERENTWURF
51IPC main classICM
(ICMV)		 H01J 37/317 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 H01J 37/09 (2006.01), H01J 37/30 (2006.01)
22DE application dateDATMay 5, 2014
96EP application dateEATMay 5, 2014
86WO application dateWATMay 5, 2014
43Date of first publicationOTNov 6, 2014
Date of publication of grantPETJan 22, 2020
71/73Applicant/ownerINHASML Netherlands B.V., Veldhoven, NL
72InventorINKUIPER, Vincent Sylvester, NL-2628 XK Delft, NL; SLOT, Erwin, NL-2728 AN Zoetermeer, NL
Address for service ASML Netherlands B.V., 5504 DR VELDHOVEN, NL
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
201361818919 P
May 3, 2013
Due dateFT
FG		May 31, 2026
Annual fee for the 13th year Patent fees
Patent division in charge 54
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Published EP/WO documentsEPWOPNOriginal document: EP000003020062
Searchable text: EP000003020062
Original document: EP000003020062B1
Searchable text: EP000003020062B1
Original document: WO002014177718
Searchable text: WO002014177718
43Date of first publicationEVTNov 6, 2014
Date of the first transfer into DPMAregisterEREGTJul 1, 2016
Date of the (most recent) update in DPMAregisterREGTJun 12, 2025
(Show all update days)(Hide all update days)
  • Jun 12, 2025
    • Due date: changed
  • Jun 10, 2025
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 22.01.2020: new
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 22.01.2020: deleted
  • Jul 1, 2016
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to PCT application WO publication Nov 6, 2014  Details anzeigen
2 Procedure relating to EP application EPO 1st publication May 18, 2016  Details anzeigen
3 Publications Publication of a mention regarding EP 1st publication by DPMA Jun 30, 2016 Jun 30, 2016 Details anzeigen
4 Change of classification Change of IPC main class Jun 27, 2017  Details anzeigen
5 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Jan 22, 2020  Details anzeigen
6 Publications Publication by DPMA of mention regarding EP patent grant Feb 20, 2020 Feb 20, 2020 Details anzeigen
7 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Oct 23, 2020 Jan 14, 2021 Details anzeigen
View procedures Procedure relating to PCT application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO publication
Date of legal/procedural statusVSTTNov 6, 2014
View procedures Procedure relating to EP application (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTMay 18, 2016
View procedures Publications (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTJun 30, 2016
Issue numberHN26
YearPJ2016
Publication dateVTJun 30, 2016
Type of publicationPARTBibliographic data
View procedures Change of classification (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTChange of classification
Legal/procedural statusVSTChange of IPC main class
Date of legal/procedural statusVSTTJun 27, 2017
51IPC main classICM
(ICMV)		 H01J 37/317 (2006.01)
51Previous IPC main classICMF
(ICMVF)		 H01J 37/317 (2006.01)
View procedures Procedure relating to EP application (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTJan 22, 2020
Date of update of the procedureREGTJun 10, 2025
View procedures Publications (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTFeb 20, 2020
Issue numberHN8
YearPJ2020
Publication dateVTFeb 20, 2020
Type of publicationPARTBibliographic data
PartHTPart 5
View procedures Procedure relating to EP application (No.: 7)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTOct 23, 2020
Issue numberHN2
YearPJ2021
Publication dateVTJan 14, 2021
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTJan 15, 2021