Register information Patent

DE file number : 60 2014 048 546.4 (Status: pending/in force, Query started: October 31, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2014 048 546.4
96EP file numberEAKZ14 19 6008.8
97EP publication numberEPN2881790
54Designation/titleTIFotomaskenrohling
51IPC main classICM
(ICMV)		 G03F 1/00 (2012.01)
51IPC secondary class(es)ICS
(ICSV)		 G03F 1/26 (2012.01), G03F 1/30 (2012.01), G03F 1/54 (2012.01), G03F 1/46 (2012.01)
22DE application dateDATDec 3, 2014
96EP application dateEATDec 3, 2014
43Date of first publicationOTJun 10, 2015
Date of publication of grantPETJun 19, 2019
71/73Applicant/ownerINHShin-Etsu Chemical Co., Ltd., Tokyo, JP
72InventorINSASAMOTO, Kouhei, Joetsu-shi, Niigata, JP; INAZUKI, Yukio, Joetsu-shi, Niigata, JP; FUKAYA, Souichi, Joetsu-shi, Niigata, JP; Nakagawa, Hideo, Joetsu-shi, Niigata, JP; KANEKO, Hideo, Joetsu-shi, Niigata, JP
74RepresentativeVTRTER MEER STEINMEISTER & PARTNER PATENTANWÄLTE mbB, 80335 München, DE
Address for service TER MEER STEINMEISTER & PARTNER PATENTANWÄLTE mbB, 80335 München, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
JP
2013253239
Dec 6, 2013
Due dateFT
FG		Dec 31, 2025
Annual fee for the 12th year Patent fees
Patent division in charge 51
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Published EP/WO documentsEPWOPNOriginal document: EP000002881790
Searchable text: EP000002881790
Original document: EP000002881790B1
Searchable text: EP000002881790B1
43Date of first publicationEVTJun 10, 2015
Date of the first transfer into DPMAregisterEREGTJun 11, 2015
Date of the (most recent) update in DPMAregisterREGTNov 7, 2024
(Show all update days)(Hide all update days)
  • Nov 7, 2024
    • Due date: changed
  • May 30, 2024; Nov 9, 2023; Nov 10, 2022; Nov 11, 2021; Nov 24, 2020; Aug 13, 2020; Jul 23, 2020; Nov 26, 2019; Aug 20, 2019; Jul 2, 2019; Jun 7, 2019; May 30, 2019; Jan 10, 2019; Jul 24, 2015
    • Historical data not available for this/these date(s)
  • Jun 11, 2015
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to EP application EPO 1st publication Jun 10, 2015  Details anzeigen
2 Publications Publication of a mention regarding EP 1st publication by DPMA Jul 23, 2015 Jul 23, 2015 Details anzeigen
3 Change of classification Change of IPC main class Dec 18, 2018  Details anzeigen
4 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Jun 19, 2019  Details anzeigen
5 Publications Publication by DPMA of mention regarding EP patent grant Jul 18, 2019 Jul 18, 2019 Details anzeigen
6 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Jun 3, 2020 Aug 27, 2020 Details anzeigen
View procedures Procedure relating to EP application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTJun 10, 2015
View procedures Publications (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTJul 23, 2015
Issue numberHN30
YearPJ2015
Publication dateVTJul 23, 2015
Type of publicationPARTBibliographic data
View procedures Change of classification (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTChange of classification
Legal/procedural statusVSTChange of IPC main class
Date of legal/procedural statusVSTTDec 18, 2018
51IPC main classICM
(ICMV)		 G03F 1/00 (2012.01)
51Previous IPC main classICMF
(ICMVF)		 G03F 1/00 (2006.01)
View procedures Procedure relating to EP application (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTJun 19, 2019
View procedures Publications (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTJul 18, 2019
Issue numberHN29
YearPJ2019
Publication dateVTJul 18, 2019
Type of publicationPARTBibliographic data
PartHTPart 5
View procedures Procedure relating to EP application (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTJun 3, 2020
Issue numberHN35
YearPJ2020
Publication dateVTAug 27, 2020
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTAug 13, 2020