Register information Patent

DE file number : 60 2012 020 126.6 (Status: pending/in force, Query started: September 26, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2012 020 126.6
96EP file numberEAKZ14 19 4712.7
97EP publication numberEPN2845921
54Designation/titleTIVerfahren und vorrichtung für ein system zur steuerung eines strömungsverhältnisses in mehreren kanälen
51IPC main classICM
(ICMV)		 C23C 16/52 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 C23C 16/455 (2006.01), G05D 11/13 (2006.01), H01L 21/00 (2006.01)
22DE application dateDATSep 28, 2012
96EP application dateEATSep 28, 2012
43Date of first publicationOTMar 11, 2015
Date of publication of grantPETJun 29, 2016
71/73Applicant/ownerINHMKS Instruments Inc., Andover, Mass., US
72InventorINDing, Junhua, Boxborough, MA 01719, US
74RepresentativeVTREisenführ Speiser Patentanwälte Rechtsanwälte PartGmbB, 28217 Bremen, DE
Address for service Eisenführ Speiser Patentanwälte Rechtsanwälte PartGmbB, 28217 Bremen, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
201113252363
Oct 4, 2011
Due dateFT
FG		Sep 30, 2025
Annual fee for the 14th year Patent fees
Patent division in charge 45
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Published EP/WO documentsEPWOPNOriginal document: EP000002845921
Searchable text: EP000002845921
Original document: EP000002845921B1
Searchable text: EP000002845921B1
43Date of first publicationEVTMar 11, 2015
Date of the first transfer into DPMAregisterEREGTMar 28, 2015
Date of the (most recent) update in DPMAregisterREGTOct 8, 2024
(Show all update days)(Hide all update days)
  • Oct 8, 2024
    • Due date: changed
  • Oct 3, 2023; Apr 6, 2023; Oct 5, 2022; Oct 6, 2021; Oct 6, 2020; Oct 9, 2019; Aug 21, 2019; Aug 6, 2019; Oct 5, 2018; Oct 11, 2017; Jul 13, 2017; Jun 8, 2017; May 11, 2017; Mar 2, 2017; Oct 15, 2016; Aug 24, 2016; Aug 4, 2016; Jul 1, 2016; Jun 30, 2016
    • Historical data not available for this/these date(s)
  • Mar 28, 2015
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Change of classification Change of IPC main class Mar 2, 2015  Details anzeigen
2 Procedure relating to EP application EPO 1st publication Mar 11, 2015  Details anzeigen
3 Publications Publication of a mention regarding EP 1st publication by DPMA Apr 23, 2015 Apr 23, 2015 Details anzeigen
4 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Jun 29, 2016  Details anzeigen
5 Publications Publication by DPMA of mention regarding EP patent grant Aug 4, 2016 Aug 4, 2016 Details anzeigen
6 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Mar 30, 2017 Jul 13, 2017 Details anzeigen
View procedures Change of classification (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTChange of classification
Legal/procedural statusVSTChange of IPC main class
Date of legal/procedural statusVSTTMar 2, 2015
51IPC main classICM
(ICMV)		 C23C 16/52 (2006.01)
51Previous IPC main classICMF
(ICMVF)		 C23C 16/52 (2006.01)
View procedures Procedure relating to EP application (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTMar 11, 2015
View procedures Publications (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTApr 23, 2015
Issue numberHN17
YearPJ2015
Publication dateVTApr 23, 2015
Type of publicationPARTBibliographic data
View procedures Procedure relating to EP application (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTJun 29, 2016
View procedures Publications (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTAug 4, 2016
Issue numberHN31
YearPJ2016
Publication dateVTAug 4, 2016
Type of publicationPARTBibliographic data
PartHTPart 5
View procedures Procedure relating to EP application (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTMar 30, 2017
Issue numberHN28
YearPJ2017
Publication dateVTJul 13, 2017
Type of publicationPARTBibliographic data
PartHTPart 3