Master dataINID | Criterion | Field | Content |
---|
| Type of IP right | SART | Patent |
| Status | ST | Pending/in force |
21 | DE file number | DAKZ | 60 2007 046 331.9 |
96 | EP file number | EAKZ | 14 16 5494.7 |
97 | EP publication number | EPN | 2763162 |
54 | Designation/title | TI | VERFAHREN ZUR VERHINDERUNG VON METALLVERUNREINUNGEN DURCH EINEN SUBSTRATHALTER |
51 | IPC main class | ICM (ICMV) | H01L 21/687 (2006.01) |
51 | IPC secondary class(es) | ICS (ICSV) | C23C 14/06 (2006.01), C23C 16/26 (2006.01) |
22 | DE application date | DAT | May 31, 2007 |
96 | EP application date | EAT | May 31, 2007 |
43 | Date of first publication | OT | Aug 6, 2014 |
| Date of publication of grant | PET | May 11, 2016 |
71/73 | Applicant/owner | INH | Sulzer Metaplas GmbH, 51427 Bergisch Gladbach, DE |
72 | Inventor | IN | Groenen, Roland, 8780 Oostrozebeke, BE; Dekempeneer, Erik, 2390 Oostmalle, BE; Ackerman, Cyndi L., Depew, 14043, US; Venkatraman, Chandra, Williamsville, 14221, US; Kirk, Matthew, Lockport, NY 14094, US |
74 | Representative | VTR | Kempkens, Anke, 86938 Schondorf, DE |
| Address for service | | Kempkens, Anke, 86938 Schondorf, DE |
33 31 32
| Foreign priority | PRC PRNA PRDA
| EP 06114915 Jun 2, 2006
|
| Due date | FT FG | May 31, 2026 Annual fee for the 20th year
Patent fees |
| Patent division in charge | | 36 |
97 | EP language of publication | ELANG | EN - Englisch |
84 | Designated EP contracting states | EDS | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MT, NL, PL, PT, RO, SE, SI, SK, TR |
| Published EP/WO documents | EPWOPN | Original document:
EP000002763162 Searchable text:
EP000002763162 Original document:
EP000002763162B1 Searchable text:
EP000002763162B1 |
43 | Date of first publication | EVT | Aug 6, 2014 |
| Date of the first transfer into DPMAregister | EREGT | Sep 19, 2014 |
| Date of the (most recent) update in DPMAregister | REGT | Jun 12, 2025 (Show all update days)(Hide all update days)- Jun 12, 2025
- Jun 11, 2025
- Procedures: Procedure relating to EP application, EPO publication of mention of grant , 11.05.2016: new
- Procedures: Procedure relating to EP application, EPO publication of mention of grant , 11.05.2016: deleted
- Sep 19, 2014
- Date of the first transfer into DPMAregister
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