Register information Patent

DE file number : 60 2013 067 189.3 (Status: pending/in force, Query started: October 23, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2013 067 189.3
96EP file numberEAKZ13 77 0854.1
86WO file numberWAKZPCT/EP2013/069301
97EP publication numberEPN2906994
87WO publication numberWPN2014060170
54Designation/titleTIBETÄTIGUNGSMECHANISMUS, OPTISCHE VORRICHTUNG, LITHOGRAFIEVORRICHTUNG UND VERFAHREN ZUR HERSTELLUNG VON VORRICHTUNGEN
51IPC main classICM
(ICMV)		 G03F 7/20 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 G02B 26/08 (2006.01), G02B 7/182 (2021.01)
22DE application dateDATSep 17, 2013
96EP application dateEATSep 17, 2013
86WO application dateWATSep 17, 2013
43Date of first publicationOTApr 24, 2014
Date of publication of grantPETMar 25, 2020
71/73Applicant/ownerINHASML Netherlands B.V., Veldhoven, NL
72InventorINVAN SCHOOT, Jan, NL-5504 DR Veldhoven, NL; HOL, Sven, NL-5629 GT Eindhoven, NL; BUIS, Edwin, NL-5951 GZ Belfeld, NL; REKKERS, Erik, NL-5283 CR Boxtel, NL; DE VRIES, Gosse, NL-5504 KB Veldhoven, NL; BOTMA, Hako, NL-5504 DR Veldhoven, NL; VAN DAM, Marinus, NL-5504 DR Veldhoven, NL; VAN GORKOM, Ramon, NL-5504 DR Veldhoven, NL
Address for service ASML Netherlands B.V., 5500 AH Veldhoven, NL
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31
32
Foreign priorityPRC
PRNA
PRDA
US
201261713930 P
Oct 15, 2012
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
201361757585 P
Jan 28, 2013
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
201361843263 P
Jul 5, 2013
Due dateFT
FG		Sep 30, 2026
Annual fee for the 14th year Patent fees
Patent division in charge 51
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Published EP/WO documentsEPWOPNOriginal document: EP000002906994
Searchable text: EP000002906994
Original document: EP000002906994B1
Searchable text: EP000002906994B1
Original document: WO002014060170
Searchable text: WO002014060170
43Date of first publicationEVTApr 24, 2014
Date of the first transfer into DPMAregisterEREGTAug 20, 2015
Date of the (most recent) update in DPMAregisterREGTOct 8, 2025
(Show all update days)(Hide all update days)
  • Oct 8, 2025
    • Due date: changed
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 25.03.2020: new
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 25.03.2020: deleted
  • Oct 8, 2024
    • Due date: changed
    • Procedures: Procedure relating to PCT application, Publication of PCT application, 24.04.2014: deleted
  • Oct 6, 2023; Jun 15, 2022; Oct 7, 2021; Mar 18, 2021; Feb 25, 2021; Feb 4, 2021; Oct 6, 2020; Apr 15, 2020; Mar 7, 2020; Mar 5, 2020; Aug 20, 2019; Jul 25, 2019
    • Historical data not available for this/these date(s)
  • Aug 20, 2015
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to PCT application WO publication Apr 24, 2014  Details anzeigen
2 Procedure relating to EP application EPO 1st publication Aug 19, 2015  Details anzeigen
3 Publications Publication of a mention regarding EP 1st publication by DPMA Oct 1, 2015 Oct 1, 2015 Details anzeigen
4 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Mar 25, 2020  Details anzeigen
5 Publications Publication by DPMA of mention regarding EP patent grant Apr 16, 2020 Apr 16, 2020 Details anzeigen
6 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Jan 12, 2021 Apr 1, 2021 Details anzeigen
View procedures Procedure relating to PCT application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO publication
Date of legal/procedural statusVSTTApr 24, 2014
View procedures Procedure relating to EP application (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTAug 19, 2015
View procedures Publications (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTOct 1, 2015
Issue numberHN40
YearPJ2015
Publication dateVTOct 1, 2015
Type of publicationPARTBibliographic data
View procedures Procedure relating to EP application (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTMar 25, 2020
Date of update of the procedureREGTOct 8, 2025
View procedures Publications (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTApr 16, 2020
Issue numberHN16
YearPJ2020
Publication dateVTApr 16, 2020
Type of publicationPARTBibliographic data
PartHTPart 5
View procedures Procedure relating to EP application (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTJan 12, 2021
Issue numberHN13
YearPJ2021
Publication dateVTApr 1, 2021
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTMar 18, 2021