Register information Patent

DE file number : 60 2013 082 792.3 (Status: pending/in force, Query started: September 25, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2013 082 792.3
96EP file numberEAKZ13 76 2468.0
86WO file numberWAKZPCT/EP2013/068930
97EP publication numberEPN2904453
87WO publication numberWPN2014053296
54Designation/titleTIVERFAHREN ZUR KALIBRIERUNG EINER CODIERSKALA UND LITHOGRAFISCHE VORRICHTUNG
51IPC main classICM
(ICMV)		 G03F 7/20 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 G01D 5/244 (2006.01), G01D 18/00 (2006.01)
22DE application dateDATSep 12, 2013
96EP application dateEATSep 12, 2013
86WO application dateWATSep 12, 2013
43Date of first publicationOTApr 10, 2014
Date of publication of grantPETNov 2, 2022
71/73Applicant/ownerINHASML Netherlands B.V., Veldhoven, NL
72InventorINDEKKERS, Jeroen, 5627 MG Eindhoven, NL; JEUNINK, Andre Bernardus, 5571 TR Bergeijk, NL; LOOPSTRA, Erik Roelof, 5613 ES Eindhoven, NL; van der Pasch, Engelbertus Antonius Fransiscus, 5688 EG Oirschot, NL; RENKENS, Michael Jozef Mathijs, 6135 HC Sittard, NL; SCHOORMANS, Carolus Johannes Catharina, 5095 AS Hooge Mierde, NL; HOEKSTRA, Peter, 5506 CT Veldhoven, NL
Address for service ASML Netherlands B.V., 5500 AH Veldhoven, NL
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
201261708411 P
Oct 1, 2012
Due dateFT
FG		Sep 30, 2025
Annual fee for the 13th year Patent fees
Patent division in charge 51
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Published EP/WO documentsEPWOPNOriginal document: EP000002904453
Searchable text: EP000002904453
Original document: EP000002904453B1
Searchable text: EP000002904453B1
Original document: WO002014053296
Searchable text: WO002014053296
43Date of first publicationEVTApr 10, 2014
Date of the first transfer into DPMAregisterEREGTAug 13, 2015
Date of the (most recent) update in DPMAregisterREGTAug 14, 2025
(Show all update days)(Hide all update days)
  • Aug 14, 2025
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 02.11.2022: new
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 02.11.2022: deleted
  • Oct 8, 2024
    • Due date: changed
  • Jun 6, 2024; Oct 6, 2023; Sep 21, 2023; Nov 17, 2022; Oct 13, 2022; Sep 15, 2022; Dec 5, 2019
    • Historical data not available for this/these date(s)
  • Aug 13, 2015
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to PCT application WO publication Apr 10, 2014  Details anzeigen
2 Procedure relating to EP application EPO 1st publication Aug 12, 2015  Details anzeigen
3 Publications Publication of a mention regarding EP 1st publication by DPMA Sep 24, 2015 Sep 24, 2015 Details anzeigen
4 Change of classification Change of IPC main class May 11, 2022  Details anzeigen
5 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Nov 2, 2022  Details anzeigen
6 Publications Publication by DPMA of mention regarding EP patent grant Nov 17, 2022 Nov 17, 2022 Details anzeigen
7 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Aug 3, 2023 Oct 26, 2023 Details anzeigen
View procedures Procedure relating to PCT application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO publication
Date of legal/procedural statusVSTTApr 10, 2014
Date of update of the procedureREGTOct 13, 2022
View procedures Procedure relating to EP application (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTAug 12, 2015
View procedures Publications (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTSep 24, 2015
Issue numberHN39
YearPJ2015
Publication dateVTSep 24, 2015
Type of publicationPARTBibliographic data
View procedures Change of classification (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTChange of classification
Legal/procedural statusVSTChange of IPC main class
Date of legal/procedural statusVSTTMay 11, 2022
51IPC main classICM
(ICMV)		 G03F 7/20 (2006.01)
51Previous IPC main classICMF
(ICMVF)		 G03F 7/20 (2006.01)
Date of update of the procedureREGTOct 13, 2022
View procedures Procedure relating to EP application (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTNov 2, 2022
Date of update of the procedureREGTAug 14, 2025
View procedures Publications (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTNov 17, 2022
Issue numberHN46
YearPJ2022
Publication dateVTNov 17, 2022
Type of publicationPARTBibliographic data
PartHTPart 5
Date of update of the procedureREGTNov 17, 2022
View procedures Procedure relating to EP application (No.: 7)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTAug 3, 2023
Issue numberHN43
YearPJ2023
Publication dateVTOct 26, 2023
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTOct 6, 2023